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Class Information
Number: 355/53
Name: Photocopying > Projection printing and copying cameras > Step and repeat
Description: Subject matter including means to reposition the photosensitive paper relative to the objective lens after each exposure for repeated copying of the same original on either different sheets of photosensitive paper or on different areas of a photosensitive sheet or film.










Patents under this class:

Patent Number Title Of Patent Date Issued
8711333 Lithographic apparatus and device manufacturing method Apr. 29, 2014
8711332 Mirror elements for EUV lithography and production methods therefor Apr. 29, 2014
8711330 Lithographic apparatus and device manufacturing method Apr. 29, 2014
8711329 Lithographic apparatus and device manufacturing method Apr. 29, 2014
8711328 Stage drive method and stage unit, exposure apparatus, and device manufacturing method Apr. 29, 2014
8711327 Exposure apparatus, exposure method, and device manufacturing method Apr. 29, 2014
8711324 Exposure method, exposure apparatus, and method for producing device Apr. 29, 2014
8711323 Lithographic apparatus and device manufacturing method Apr. 29, 2014
8705011 Digital stereo imaging photosensitive device for a grating and a photosensitive material and its method Apr. 22, 2014
8705009 Heat pipe, lithographic apparatus and device manufacturing method Apr. 22, 2014
8705007 Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Apr. 22, 2014
8705005 Microlithographic illumination system Apr. 22, 2014
8705003 Photosensing device for digital stereo spliced picture projection imaging and operation method thereof Apr. 22, 2014
8705002 Stage drive method and stage unit, exposure apparatus, and device manufacturing method Apr. 22, 2014
8705001 Exposure apparatus, and device manufacturing method Apr. 22, 2014
8705000 Illumination optics and projection exposure apparatus Apr. 22, 2014
8704999 Exposure apparatus, exposure method, and method for producing device Apr. 22, 2014
8692977 Optical system, inspection system and manufacturing method Apr. 8, 2014
8692976 Exposure apparatus, and device manufacturing method Apr. 8, 2014
8692975 Measurement apparatus, exposure apparatus, and device fabrication method Apr. 8, 2014
8692974 Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control Apr. 8, 2014
8692973 Exposure apparatus and method for producing device Apr. 8, 2014
8687170 Asymmetric complementary dipole illuminator Apr. 1, 2014
8687168 Lithographic apparatus and device manufacturing method Apr. 1, 2014
8687167 Lithographic apparatus and device manufacturing method Apr. 1, 2014
8687166 Lithographic apparatus having an encoder position sensor system Apr. 1, 2014
8681316 Measurement system, method and lithographic apparatus Mar. 25, 2014
8681315 Tunable two-mirror interference lithography system Mar. 25, 2014
8681314 Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method Mar. 25, 2014
8681313 Diffraction elements for alignment targets Mar. 25, 2014
8681312 Inspection apparatus for lithography Mar. 25, 2014
8681311 Lithographic apparatus and device manufacturing method Mar. 25, 2014
8681310 Mechanical fixture of pellicle to lithographic photomask Mar. 25, 2014
8681308 Lithographic apparatus and device manufacturing method Mar. 25, 2014
8675180 Maskless exposure apparatus and method of alignment for overlay in maskless exposure Mar. 18, 2014
8675175 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8675174 Exposure apparatus, exposure method, and method for producing device Mar. 18, 2014
8675173 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8675172 Lithographic apparatus and method of removing liquid Mar. 18, 2014
8675171 Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method Mar. 18, 2014
8675170 Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Mar. 18, 2014
8675169 Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Mar. 18, 2014
8675168 Gas gauge compatible with vacuum environments Mar. 18, 2014
8670107 Maskless exposure apparatus and control method thereof Mar. 11, 2014
8670105 Immersion photolithography system and method using microchannel nozzles Mar. 11, 2014
8665455 Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method Mar. 4, 2014
8665419 Device for an optical arrangement and method for positioning an optical element of an optical arrangement Mar. 4, 2014
8665418 Projection optical system, exposure apparatus, and device manufacturing method Mar. 4, 2014
8665417 Apparatus and method for inspecting a substrate Mar. 4, 2014
8665416 Exposure apparatus and method of manufacturing device Mar. 4, 2014











 
 
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