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Class Information
Number: 355/53
Name: Photocopying > Projection printing and copying cameras > Step and repeat
Description: Subject matter including means to reposition the photosensitive paper relative to the objective lens after each exposure for repeated copying of the same original on either different sheets of photosensitive paper or on different areas of a photosensitive sheet or film.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7408631 |
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask |
Aug. 5, 2008 |
| 7408624 |
Lithographic apparatus and device manufacturing method |
Aug. 5, 2008 |
| 7408622 |
Illumination system and polarizer for a microlithographic projection exposure apparatus |
Aug. 5, 2008 |
| 7408621 |
Projection exposure system |
Aug. 5, 2008 |
| 7408620 |
Exposure apparatus |
Aug. 5, 2008 |
| 7408619 |
Photolithographic method using exposure system for controlling vertical CD difference |
Aug. 5, 2008 |
| 7408618 |
Lithographic apparatus substrate alignment |
Aug. 5, 2008 |
| 7408617 |
Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method |
Aug. 5, 2008 |
| 7408616 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method |
Aug. 5, 2008 |
| 7408615 |
Lithographic apparatus and device manufacturing method |
Aug. 5, 2008 |
| 7405811 |
Lithographic apparatus and positioning apparatus |
Jul. 29, 2008 |
| 7405810 |
Method and apparatus for positioning a substrate on a substrate table |
Jul. 29, 2008 |
| 7405808 |
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus |
Jul. 29, 2008 |
| 7405807 |
Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method |
Jul. 29, 2008 |
| 7405806 |
Imaging system and method employing beam folding |
Jul. 29, 2008 |
| 7405805 |
Lithographic apparatus and device manufacturing method |
Jul. 29, 2008 |
| 7405804 |
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby |
Jul. 29, 2008 |
| 7405802 |
Large field of view 2X magnification projection optical system for FPD manufacture |
Jul. 29, 2008 |
| 7403336 |
Broadband imaging system and method |
Jul. 22, 2008 |
| 7403267 |
System and method for providing modified illumination intensity |
Jul. 22, 2008 |
| 7403265 |
Lithographic apparatus and device manufacturing method utilizing data filtering |
Jul. 22, 2008 |
| 7403263 |
Exposure apparatus |
Jul. 22, 2008 |
| 7403262 |
Projection optical system and exposure apparatus having the same |
Jul. 22, 2008 |
| 7403261 |
Lithographic apparatus and device manufacturing method |
Jul. 22, 2008 |
| 7403259 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method |
Jul. 22, 2008 |
| 7400699 |
Illumination system with raster elements of different sizes |
Jul. 15, 2008 |
| 7400458 |
Imaging optics with wavelength dependent aperture stop |
Jul. 15, 2008 |
| 7400381 |
Lithographic apparatus and device manufacturing method |
Jul. 15, 2008 |
| 7400380 |
Two-dimensional light-modulating nano/micro aperture array and high-speed nano pattern recording system utilized with the array |
Jul. 15, 2008 |
| 7400379 |
Apparatus for measuring an exposure intensity on a wafer |
Jul. 15, 2008 |
| 7399978 |
Method and device for irradiating spots on a layer |
Jul. 15, 2008 |
| 7397539 |
Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof |
Jul. 8, 2008 |
| 7397538 |
Radiation system and lithographic apparatus |
Jul. 8, 2008 |
| 7397535 |
Lithographic apparatus and device manufacturing method |
Jul. 8, 2008 |
| 7397534 |
Exposure apparatus and device manufacturing method |
Jul. 8, 2008 |
| 7397533 |
Lithographic apparatus and device manufacturing method |
Jul. 8, 2008 |
| 7397532 |
Run-off path to collect liquid for an immersion lithography apparatus |
Jul. 8, 2008 |
| 7397040 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jul. 8, 2008 |
| 7397039 |
Real-time compensation of mechanical position error in pattern generation or imaging applications |
Jul. 8, 2008 |
| 7394525 |
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method |
Jul. 1, 2008 |
| 7394524 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jul. 1, 2008 |
| 7394523 |
Exposure apparatus and method of controlling exposure apparatus |
Jul. 1, 2008 |
| 7394522 |
Exposure apparatus and device manufacturing method |
Jul. 1, 2008 |
| 7394521 |
Lithographic apparatus and device manufacturing method |
Jul. 1, 2008 |
| 7394520 |
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock |
Jul. 1, 2008 |
| 7391502 |
Lithographic apparatus, device manufacturing method, and method of manufacturing a component |
Jun. 24, 2008 |
| 7391500 |
Light exposure apparatus and method of light exposure using immersion lithography with saturated cyclic hydrocarbon liquid |
Jun. 24, 2008 |
| 7391499 |
Lithographic apparatus and device manufacturing method |
Jun. 24, 2008 |
| 7391498 |
Technique of suppressing influence of contamination of exposure atmosphere |
Jun. 24, 2008 |
| 7391497 |
Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium |
Jun. 24, 2008 |
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