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Class Information
Number: 355/53
Name: Photocopying > Projection printing and copying cameras > Step and repeat
Description: Subject matter including means to reposition the photosensitive paper relative to the objective lens after each exposure for repeated copying of the same original on either different sheets of photosensitive paper or on different areas of a photosensitive sheet or film.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619718 |
Method and system for active purging of pellicle volumes |
Nov. 17, 2009 |
| 7619717 |
Method for performing a focus test and a device manufacturing method |
Nov. 17, 2009 |
| 7619716 |
Exposure method |
Nov. 17, 2009 |
| 7619715 |
Coupling apparatus, exposure apparatus, and device fabricating method |
Nov. 17, 2009 |
| 7619714 |
Immersion exposure technique |
Nov. 17, 2009 |
| 7619330 |
Stage apparatus |
Nov. 17, 2009 |
| 7618755 |
Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields |
Nov. 17, 2009 |
| 7616383 |
Lithographic apparatus and device manufacturing method |
Nov. 10, 2009 |
| 7616291 |
Lithographic processing cell and device manufacturing method |
Nov. 10, 2009 |
| 7616290 |
Exposure apparatus and method |
Nov. 10, 2009 |
| 7612868 |
Exposure apparatus and method of manufacturing device |
Nov. 3, 2009 |
| 7612866 |
Lithography system |
Nov. 3, 2009 |
| 7609363 |
Helical optical pulse stretcher |
Oct. 27, 2009 |
| 7609361 |
Substrate processing method and substrate processing system |
Oct. 27, 2009 |
| 7608369 |
Photomask to which phase shift is applied and exposure apparatus |
Oct. 27, 2009 |
| 7605907 |
Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method |
Oct. 20, 2009 |
| 7605905 |
Method for distortion correction in a microlithographic projection exposure apparatus |
Oct. 20, 2009 |
| 7602489 |
Lithographic apparatus and device manufacturing method |
Oct. 13, 2009 |
| 7602476 |
Substrate-holding technique |
Oct. 13, 2009 |
| 7602475 |
System and method for providing modified illumination intensity |
Oct. 13, 2009 |
| 7602473 |
Exposure apparatus and device manufacturing method using the same |
Oct. 13, 2009 |
| 7602472 |
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device |
Oct. 13, 2009 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Oct. 13, 2009 |
| 7599043 |
Position measurement system and lithographic apparatus |
Oct. 6, 2009 |
| 7598507 |
Adjustable lithography blocking device and method |
Oct. 6, 2009 |
| 7595863 |
Lithographic apparatus, excimer laser and device manufacturing method |
Sep. 29, 2009 |
| 7595861 |
Exposure apparatus and method of manufacturing device |
Sep. 29, 2009 |
| 7593096 |
Lithographic apparatus and device manufacturing method |
Sep. 22, 2009 |
| 7593095 |
System for reducing the coherence of laser radiation |
Sep. 22, 2009 |
| 7593094 |
Patterning device |
Sep. 22, 2009 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Sep. 22, 2009 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Sep. 22, 2009 |
| 7593091 |
Imaging or exposure device, in particular for making an electronic microcircuit |
Sep. 22, 2009 |
| 7592760 |
Lithographic apparatus and device manufacturing method |
Sep. 22, 2009 |
| 7589822 |
Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
Sep. 15, 2009 |
| 7589821 |
Exposure apparatus and device manufacturing method |
Sep. 15, 2009 |
| 7589820 |
Exposure apparatus and method for producing device |
Sep. 15, 2009 |
| 7589819 |
Method for the generation of variable pitch nested lines and/or contact holes using fixed size pixels for direct-write lithographic systems |
Sep. 15, 2009 |
| 7589818 |
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus |
Sep. 15, 2009 |
| 7586626 |
Measurement method, exposure method, exposure apparatus, and device fabrication method |
Sep. 8, 2009 |
| 7586598 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate |
Sep. 8, 2009 |
| 7586583 |
Nanolithography system |
Sep. 8, 2009 |
| 7586582 |
Exposure apparatus |
Sep. 8, 2009 |
| 7586113 |
EUV illumination system |
Sep. 8, 2009 |
| 7583361 |
System for controlling a dual mover assembly for an exposure apparatus |
Sep. 1, 2009 |
| 7583358 |
Systems and methods for retrieving residual liquid during immersion lens photolithography |
Sep. 1, 2009 |
| 7583357 |
Lithographic apparatus and device manufacturing method |
Sep. 1, 2009 |
| 7583356 |
Exposure apparatus and device manufacturing method |
Sep. 1, 2009 |
| 7580116 |
Exposure apparatus and device fabrication method |
Aug. 25, 2009 |
| 7580115 |
Exposure apparatus and method, and device manufacturing method |
Aug. 25, 2009 |
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