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Class Information
Number: 355/53
Name: Photocopying > Projection printing and copying cameras > Step and repeat
Description: Subject matter including means to reposition the photosensitive paper relative to the objective lens after each exposure for repeated copying of the same original on either different sheets of photosensitive paper or on different areas of a photosensitive sheet or film.


Patents under this class:

Patent Number Title Of Patent Date Issued
7408631 Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask Aug. 5, 2008
7408624 Lithographic apparatus and device manufacturing method Aug. 5, 2008
7408622 Illumination system and polarizer for a microlithographic projection exposure apparatus Aug. 5, 2008
7408621 Projection exposure system Aug. 5, 2008
7408620 Exposure apparatus Aug. 5, 2008
7408619 Photolithographic method using exposure system for controlling vertical CD difference Aug. 5, 2008
7408618 Lithographic apparatus substrate alignment Aug. 5, 2008
7408617 Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method Aug. 5, 2008
7408616 Microlithographic exposure method as well as a projection exposure system for carrying out the method Aug. 5, 2008
7408615 Lithographic apparatus and device manufacturing method Aug. 5, 2008
7405811 Lithographic apparatus and positioning apparatus Jul. 29, 2008
7405810 Method and apparatus for positioning a substrate on a substrate table Jul. 29, 2008
7405808 Optical system, in particular illumination system, of a microlithographic projection exposure apparatus Jul. 29, 2008
7405807 Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method Jul. 29, 2008
7405806 Imaging system and method employing beam folding Jul. 29, 2008
7405805 Lithographic apparatus and device manufacturing method Jul. 29, 2008
7405804 Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby Jul. 29, 2008
7405802 Large field of view 2X magnification projection optical system for FPD manufacture Jul. 29, 2008
7403336 Broadband imaging system and method Jul. 22, 2008
7403267 System and method for providing modified illumination intensity Jul. 22, 2008
7403265 Lithographic apparatus and device manufacturing method utilizing data filtering Jul. 22, 2008
7403263 Exposure apparatus Jul. 22, 2008
7403262 Projection optical system and exposure apparatus having the same Jul. 22, 2008
7403261 Lithographic apparatus and device manufacturing method Jul. 22, 2008
7403259 Lithographic processing cell, lithographic apparatus, track and device manufacturing method Jul. 22, 2008
7400699 Illumination system with raster elements of different sizes Jul. 15, 2008
7400458 Imaging optics with wavelength dependent aperture stop Jul. 15, 2008
7400381 Lithographic apparatus and device manufacturing method Jul. 15, 2008
7400380 Two-dimensional light-modulating nano/micro aperture array and high-speed nano pattern recording system utilized with the array Jul. 15, 2008
7400379 Apparatus for measuring an exposure intensity on a wafer Jul. 15, 2008
7399978 Method and device for irradiating spots on a layer Jul. 15, 2008
7397539 Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof Jul. 8, 2008
7397538 Radiation system and lithographic apparatus Jul. 8, 2008
7397535 Lithographic apparatus and device manufacturing method Jul. 8, 2008
7397534 Exposure apparatus and device manufacturing method Jul. 8, 2008
7397533 Lithographic apparatus and device manufacturing method Jul. 8, 2008
7397532 Run-off path to collect liquid for an immersion lithography apparatus Jul. 8, 2008
7397040 Lithographic apparatus, device manufacturing method, and device manufactured thereby Jul. 8, 2008
7397039 Real-time compensation of mechanical position error in pattern generation or imaging applications Jul. 8, 2008
7394525 Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method Jul. 1, 2008
7394524 Lithographic apparatus, device manufacturing method, and device manufactured thereby Jul. 1, 2008
7394523 Exposure apparatus and method of controlling exposure apparatus Jul. 1, 2008
7394522 Exposure apparatus and device manufacturing method Jul. 1, 2008
7394521 Lithographic apparatus and device manufacturing method Jul. 1, 2008
7394520 Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock Jul. 1, 2008
7391502 Lithographic apparatus, device manufacturing method, and method of manufacturing a component Jun. 24, 2008
7391500 Light exposure apparatus and method of light exposure using immersion lithography with saturated cyclic hydrocarbon liquid Jun. 24, 2008
7391499 Lithographic apparatus and device manufacturing method Jun. 24, 2008
7391498 Technique of suppressing influence of contamination of exposure atmosphere Jun. 24, 2008
7391497 Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium Jun. 24, 2008



 
 
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