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Class Information
Number: 355/30
Name: Photocopying > Projection printing and copying cameras > With temperature or foreign particle control
Description: Subject matter including means to heat, cool, or ventilate any part of the projection or photographing system; or including means to prevent moisture, dust or other foreign matter from coming in contact with the projection or photographing system or including means to remove such foreign matter from the projection or photographing system.










Patents under this class:

Patent Number Title Of Patent Date Issued
8711330 Lithographic apparatus and device manufacturing method Apr. 29, 2014
8711328 Stage drive method and stage unit, exposure apparatus, and device manufacturing method Apr. 29, 2014
8711326 Fluid handling structure, a lithographic apparatus and a device manufacturing method Apr. 29, 2014
8711325 Method and system for determining a suppression factor of a suppression system and a lithographic apparatus Apr. 29, 2014
8711324 Exposure method, exposure apparatus, and method for producing device Apr. 29, 2014
8711323 Lithographic apparatus and device manufacturing method Apr. 29, 2014
8705010 Lithography system, method of clamping and wafer table Apr. 22, 2014
8705009 Heat pipe, lithographic apparatus and device manufacturing method Apr. 22, 2014
8705002 Stage drive method and stage unit, exposure apparatus, and device manufacturing method Apr. 22, 2014
8705001 Exposure apparatus, and device manufacturing method Apr. 22, 2014
8704999 Exposure apparatus, exposure method, and method for producing device Apr. 22, 2014
8704998 Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Apr. 22, 2014
8704997 Immersion lithographic apparatus and method for rinsing immersion space before exposure Apr. 22, 2014
8692976 Exposure apparatus, and device manufacturing method Apr. 8, 2014
8692973 Exposure apparatus and method for producing device Apr. 8, 2014
8691477 Reticle design for the reduction of lens heating phenomenon Apr. 8, 2014
8687168 Lithographic apparatus and device manufacturing method Apr. 1, 2014
8687166 Lithographic apparatus having an encoder position sensor system Apr. 1, 2014
8685632 Radiation source, lithographic apparatus and device manufacturing method Apr. 1, 2014
8681311 Lithographic apparatus and device manufacturing method Mar. 25, 2014
8681310 Mechanical fixture of pellicle to lithographic photomask Mar. 25, 2014
8681309 Lithographic apparatus and device manufacturing method Mar. 25, 2014
8681308 Lithographic apparatus and device manufacturing method Mar. 25, 2014
8675174 Exposure apparatus, exposure method, and method for producing device Mar. 18, 2014
8675173 Lithographic apparatus and device manufacturing method Mar. 18, 2014
8675172 Lithographic apparatus and method of removing liquid Mar. 18, 2014
8675170 Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Mar. 18, 2014
8675169 Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Mar. 18, 2014
8675168 Gas gauge compatible with vacuum environments Mar. 18, 2014
8670105 Immersion photolithography system and method using microchannel nozzles Mar. 11, 2014
8670104 Cleanup method for optics in immersion lithography with cleaning liquid opposed by a surface of object Mar. 11, 2014
8670103 Cleanup method for optics in immersion lithography using bubbles Mar. 11, 2014
8665415 Exposure apparatus and device manufacturing method Mar. 4, 2014
8659743 Detection apparatus, exposure apparatus, and device fabrication method Feb. 25, 2014
8659742 Lithographic apparatus and a device manufacturing method Feb. 25, 2014
8659741 Lithographic apparatus, removable member and device manufacturing method Feb. 25, 2014
8659740 Drive error compensation for projection optics Feb. 25, 2014
8654309 Fluid extraction system, lithographic apparatus and device manufacturing method Feb. 18, 2014
8654308 Method for determining exposure condition, exposure method, exposure apparatus, and method for manufacturing device Feb. 18, 2014
8654306 Exposure apparatus, cleaning method, and device fabricating method Feb. 18, 2014
8654305 Systems and methods for insitu lens cleaning in immersion lithography Feb. 18, 2014
8648997 Member with a cleaning surface and a method of removing contamination Feb. 11, 2014
8647797 Methos and device for keeping mask dimensions constant Feb. 11, 2014
8638422 Exposure method, exposure apparatus, method for producing device, and method for evaluating exposure apparatus Jan. 28, 2014
8638421 Lithographic apparatus and method of cleaning a lithographic apparatus Jan. 28, 2014
8638419 Lithographic apparatus and device manufacturing method Jan. 28, 2014
8638418 Lithographic apparatus Jan. 28, 2014
8638417 Fluid handling structure, lithographic apparatus and a device manufacturing method Jan. 28, 2014
8638416 Device manufacturing apparatus, including coolant temperature control, and method of manufacturing device Jan. 28, 2014
8638415 Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets Jan. 28, 2014











 
 
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