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Class Information
Number: 355/27
Name: Photocopying > Projection printing and copying cameras > With developing
Description: Subject matter including means to develop the exposed photosensitive film, usually by immersing it in a solution which chemically reacts therewith to form a visible image of the original on the film.










Sub-classes under this class:

Class Number Class Name Patents
355/28 And film severing 140


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8665417 Apparatus and method for inspecting a substrate Mar. 4, 2014
8534936 Coating and developing apparatus Sep. 17, 2013
8482715 Monitoring apparatus and method particularly useful in photolithographically processing substrates Jul. 9, 2013
8477301 Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus Jul. 2, 2013
8450046 Methods for enhancing photolithography patterning May. 28, 2013
8441618 Substrate transfer method and apparatus May. 14, 2013
8419299 Coating and developing apparatus and method, and storage medium Apr. 16, 2013
8416382 Processing apparatus and device manufacturing method Apr. 9, 2013
8411246 Resist coating and developing apparatus and method Apr. 2, 2013
8289496 System and method for treating substrate Oct. 16, 2012
8262301 Developer spraying device for reducing usage quantity of developer Sep. 11, 2012
8264664 Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method Sep. 11, 2012
8231285 Substrate processing method and apparatus Jul. 31, 2012
8163467 Dummy light-exposed substrate, method of manufacturing the same, immersion exposure apparatus, and device manufacturing method Apr. 24, 2012
8134681 Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer s Mar. 13, 2012
8120748 Lithographic processing optimization based on hypersampled correlations Feb. 21, 2012
8111372 Coating film forming apparatus and coating film forming method for immersion light exposure Feb. 7, 2012
8054443 Developing method and developing apparatus Nov. 8, 2011
8040488 Substrate processing apparatus Oct. 18, 2011
8040490 Liquid immersion exposure apparatus, exposure method, and method for producing device Oct. 18, 2011
8034539 Exposure apparatus and method for producing device Oct. 11, 2011
8031324 Substrate processing apparatus with integrated cleaning unit Oct. 4, 2011
8023099 Substrate processing system and substrate processing method for double patterning with carrier block, process section, and interface block Sep. 20, 2011
7999910 System and method for manufacturing a mask for semiconductor processing Aug. 16, 2011
7965372 Apparatus for removing photoresist film Jun. 21, 2011
7934880 Coating and developing apparatus, coating and developing method, and storage medium May. 3, 2011
7924396 Coating/developing apparatus and pattern forming method Apr. 12, 2011
7896562 Developing method, developing apparatus and storage medium Mar. 1, 2011
7889313 Immersion lithography apparatus and exposure method Feb. 15, 2011
7880859 Substrate processing system and substrate processing method Feb. 1, 2011
7871211 Coating and developing system, coating and developing method and storage medium Jan. 18, 2011
7867673 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program Jan. 11, 2011
7867674 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program Jan. 11, 2011
7862966 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program Jan. 4, 2011
7856601 Dynamic service presentation Dec. 21, 2010
7829263 Exposure method and apparatus, coating apparatus for applying resist to plural substrates, and device manufacturing method Nov. 9, 2010
7826032 Circulation system for high refractive index liquid in pattern forming apparatus Nov. 2, 2010
7821614 Monitoring apparatus and method particularly useful in photolithographically processing substrates Oct. 26, 2010
7821616 Resist pattern forming method, semiconductor apparatus using said method, and exposure apparatus thereof Oct. 26, 2010
7816276 Substrate treatment system, substrate treatment method, and computer readable storage medium Oct. 19, 2010
7817241 Lithographic apparatus and device manufacturing method Oct. 19, 2010
7796237 Lithography apparatus, method of forming pattern and method of manufacturing semiconductor device Sep. 14, 2010
7789576 PEB embedded exposure apparatus Sep. 7, 2010
7780366 Resist pattern forming method Aug. 24, 2010
7751025 Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control Jul. 6, 2010
7742146 Coating and developing method, coating and developing system and storage medium Jun. 22, 2010
7726891 Substrate processing apparatus and substrate processing method Jun. 1, 2010
7722267 Substrate processing apparatus May. 25, 2010
7714979 Substrate processing apparatus May. 11, 2010
7692764 Exposure apparatus, operation decision method, substrate processing system, maintenance management method, and device manufacturing method Apr. 6, 2010

1 2 3 4 5 6 7 8 9 10 11 12 13










 
 
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