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Class Information
Number: 349/4
Name: Liquid crystal cells, elements and systems > Liquid crystal system > Liquid crystal for recording or imaging on photosensitive medium > Exposure device for lithography
Description: Subject matter wherein the liquid crystal cell is used as an automatic or adjustable mask in forming high definition exposures on very small areas.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7613538 |
Compensation for distortion in contact lithography |
Nov. 3, 2009 |
| 7596420 |
Device manufacturing method and computer program product |
Sep. 29, 2009 |
| 7542013 |
System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode |
Jun. 2, 2009 |
| 7469058 |
Method and system for a maskless lithography rasterization technique based on global optimization |
Dec. 23, 2008 |
| 7403236 |
Programmable mask and method of fabricating biomolecule array using the same |
Jul. 22, 2008 |
| 7362485 |
Image display medium, image writing device, and image forming apparatus |
Apr. 22, 2008 |
| 7116398 |
Lithographic apparatus and device manufacturing method |
Oct. 3, 2006 |
| 7106401 |
Reflex liquid crystal display device, display apparatus, projection optical system, and projection display system |
Sep. 12, 2006 |
| 7042530 |
Transfer apparatus |
May. 9, 2006 |
| 6856359 |
Biochip with means for scanning light and method of reading the biochip |
Feb. 15, 2005 |
| 6813082 |
Wavefront aberrator and method of manufacturing |
Nov. 2, 2004 |
| 6590635 |
High resolution optical stepper |
Jul. 8, 2003 |
| 6556181 |
Matrix driven liquid crystal display module system apparatus and method |
Apr. 29, 2003 |
| 6517055 |
Printing device and photograph processing apparatus equipped with such a device |
Feb. 11, 2003 |
| 6504581 |
Liquid crystal display apparatus and manufacturing method thereof |
Jan. 7, 2003 |
| 6333780 |
Projection aligner |
Dec. 25, 2001 |
| 5777804 |
Projection-type display apparatus |
Jul. 7, 1998 |
| 5734145 |
Laser marking method using laser heated liquid crystal mask |
Mar. 31, 1998 |
| H1525 |
Method and system for high speed photolithography |
Apr. 2, 1996 |
| 5138368 |
Fabrication of printed wiring boards by projection imaging |
Aug. 11, 1992 |
| 5116110 |
Partially coherent optical system with scattering type object |
May. 26, 1992 |
| 5078474 |
Exposure apparatus having a magnifying lens system |
Jan. 7, 1992 |
| 5045419 |
Pattern exposure/transfer method and pattern exposure/transfer mask apparatus |
Sep. 3, 1991 |
| 5026145 |
Exposure apparatus |
Jun. 25, 1991 |
| 4992803 |
Simultaneous laser writing of multiple LALC cells |
Feb. 12, 1991 |
| 4653860 |
Programable mask or reticle with opaque portions on electrodes |
Mar. 31, 1987 |
| 4256405 |
Scanning spectrometer |
Mar. 17, 1981 |
| 4013466 |
Method of preparing a circuit utilizing a liquid crystal artwork master |
Mar. 22, 1977 |
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