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Class Information
Number: 324/751
Name: Electricity: measuring and testing > Fault detecting in electric circuits and of electric components > Of individual circuit component or element > System sensing fields adjacent device under test (dut) > Using electron beam probe
Description: Subject matter wherein a cathode-ray device is used to sense the fields.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7623982 |
Method of testing an electronic circuit and apparatus thereof |
Nov. 24, 2009 |
| 7612570 |
Surface-potential distribution measuring apparatus, image carrier, and image forming apparatus |
Nov. 3, 2009 |
| 7602197 |
High current electron beam inspection |
Oct. 13, 2009 |
| 7598755 |
Probe navigation method and device and defect inspection device |
Oct. 6, 2009 |
| 7592827 |
Apparatus and method for electrical detection and localization of shorts in metal interconnect lines |
Sep. 22, 2009 |
| 7587700 |
Process monitoring system and method for processing a large number of sub-micron measurement targets |
Sep. 8, 2009 |
| 7560939 |
Electrical defect detection using pre-charge and sense scanning with prescribed delays |
Jul. 14, 2009 |
| 7550982 |
Semiconductor device test method for comparing a first area with a second area |
Jun. 23, 2009 |
| 7547884 |
Pattern defect inspection method and apparatus thereof |
Jun. 16, 2009 |
| 7535238 |
In-line electron beam test system |
May. 19, 2009 |
| 7525325 |
System and method for floating-substrate passive voltage contrast |
Apr. 28, 2009 |
| 7518383 |
Inspection apparatus and inspection method using electron beam |
Apr. 14, 2009 |
| 7514274 |
Enhanced uniqueness for pattern recognition |
Apr. 7, 2009 |
| 7514681 |
Electrical process monitoring using mirror-mode electron microscopy |
Apr. 7, 2009 |
| 7507959 |
Method for charging substrate to a potential |
Mar. 24, 2009 |
| 7504625 |
Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus |
Mar. 17, 2009 |
| 7501625 |
Electron microscope application apparatus and sample inspection method |
Mar. 10, 2009 |
| 7495217 |
Film thickness and composition measurement via auger electron spectroscopy and electron probe microanalysis |
Feb. 24, 2009 |
| 7495457 |
Semiconductor device evaluation method and apparatus using the same |
Feb. 24, 2009 |
| 7491934 |
SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast |
Feb. 17, 2009 |
| 7488938 |
Charge-control method and apparatus for electron beam imaging |
Feb. 10, 2009 |
| 7476875 |
Contact opening metrology |
Jan. 13, 2009 |
| 7474108 |
Apparatus and method for contacting of test objects |
Jan. 6, 2009 |
| 7474107 |
Buried short location determination using voltage contrast inspection |
Jan. 6, 2009 |
| 7473911 |
Specimen current mapper |
Jan. 6, 2009 |
| 7453274 |
Detection of defects using transient contrast |
Nov. 18, 2008 |
| 7449898 |
Method and apparatus for reviewing defects by detecting images having voltage contrast |
Nov. 11, 2008 |
| 7446555 |
Apparatus to inspect TFT substrate and method of inspecting TFT substrate |
Nov. 4, 2008 |
| 7446543 |
Non-contact electrical connections test device |
Nov. 4, 2008 |
| 7443189 |
Method to detect and predict metal silicide defects in a microelectronic device during the manufacture of an integrated circuit |
Oct. 28, 2008 |
| 7425704 |
Inspection method and apparatus using an electron beam |
Sep. 16, 2008 |
| 7420163 |
Determining layer thickness using photoelectron spectroscopy |
Sep. 2, 2008 |
| 7420379 |
Semiconductor device test method and semiconductor device tester |
Sep. 2, 2008 |
| 7417444 |
Method and apparatus for inspecting integrated circuit pattern |
Aug. 26, 2008 |
| 7403022 |
Method for measuring peak carrier concentration in ultra-shallow junctions |
Jul. 22, 2008 |
| 7385195 |
Semiconductor device tester |
Jun. 10, 2008 |
| 7381978 |
Contact opening metrology |
Jun. 3, 2008 |
| 7378830 |
Miniature modified Faraday cup for micro electron beams |
May. 27, 2008 |
| 7375505 |
Method and apparatus for testing function of active microstructural elements and method for producing microstructural elements using the test method |
May. 20, 2008 |
| 7375538 |
Method of inspecting pattern and inspecting instrument |
May. 20, 2008 |
| 7372283 |
Probe navigation method and device and defect inspection device |
May. 13, 2008 |
| 7365324 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Apr. 29, 2008 |
| 7365322 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern |
Apr. 29, 2008 |
| 7355418 |
Configurable prober for TFT LCD array test |
Apr. 8, 2008 |
| 7352195 |
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus |
Apr. 1, 2008 |
| 7330041 |
Localizing a temperature of a device for testing |
Feb. 12, 2008 |
| 7323888 |
System and method for use in functional failure analysis by induced stimulus |
Jan. 29, 2008 |
| 7321232 |
Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam |
Jan. 22, 2008 |
| 7319335 |
Configurable prober for TFT LCD array testing |
Jan. 15, 2008 |
| 7319336 |
Charged particle beam device probe operation |
Jan. 15, 2008 |
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