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Class Information
Number: 324/751
Name: Electricity: measuring and testing > Fault detecting in electric circuits and of electric components > Of individual circuit component or element > System sensing fields adjacent device under test (dut) > Using electron beam probe
Description: Subject matter wherein a cathode-ray device is used to sense the fields.

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
7795593 Surface contamination analyzer for semiconductor wafers Sep. 14, 2010
7795886 Surface voltmeter Sep. 14, 2010
7786436 FIB based open via analysis and repair Aug. 31, 2010
7746088 In-line electron beam test system Jun. 29, 2010
7741601 Testing apparatus using charged particles and device manufacturing method using the testing apparatus Jun. 22, 2010
7733109 Test structure for resistive open detection using voltage contrast inspection and related methods Jun. 8, 2010
7733111 Segmented optical and electrical testing for photovoltaic devices Jun. 8, 2010
7733099 Monitoring pattern for detecting a defect in a semiconductor device and method for detecting a defect Jun. 8, 2010
7732791 Semiconductor testing method and semiconductor tester Jun. 8, 2010
7723724 System for using test structures to evaluate a fabrication of a wafer May. 25, 2010
7705301 Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector Apr. 27, 2010
7705621 Test pattern and method of monitoring defects using the same Apr. 27, 2010
7675300 Charged particle beam device probe operation Mar. 9, 2010
7663104 Specimen inspection equipment and how to make electron beam absorbed current images Feb. 16, 2010
7656171 Method and apparatus for reviewing defects by detecting images having voltage contrast Feb. 2, 2010
7656170 Multiple directional scans of test structures on semiconductor integrated circuits Feb. 2, 2010
7635843 In-line reliability test using E-beam scan Dec. 22, 2009
7633303 Semiconductor wafer inspection apparatus Dec. 15, 2009
7623982 Method of testing an electronic circuit and apparatus thereof Nov. 24, 2009
7612570 Surface-potential distribution measuring apparatus, image carrier, and image forming apparatus Nov. 3, 2009
7602197 High current electron beam inspection Oct. 13, 2009
7598755 Probe navigation method and device and defect inspection device Oct. 6, 2009
7592827 Apparatus and method for electrical detection and localization of shorts in metal interconnect lines Sep. 22, 2009
7587700 Process monitoring system and method for processing a large number of sub-micron measurement targets Sep. 8, 2009
7560939 Electrical defect detection using pre-charge and sense scanning with prescribed delays Jul. 14, 2009
7550982 Semiconductor device test method for comparing a first area with a second area Jun. 23, 2009
7547884 Pattern defect inspection method and apparatus thereof Jun. 16, 2009
7535238 In-line electron beam test system May. 19, 2009
7525325 System and method for floating-substrate passive voltage contrast Apr. 28, 2009
7518383 Inspection apparatus and inspection method using electron beam Apr. 14, 2009
7514681 Electrical process monitoring using mirror-mode electron microscopy Apr. 7, 2009
7514274 Enhanced uniqueness for pattern recognition Apr. 7, 2009
7507959 Method for charging substrate to a potential Mar. 24, 2009
7504625 Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus Mar. 17, 2009
7501625 Electron microscope application apparatus and sample inspection method Mar. 10, 2009
7495457 Semiconductor device evaluation method and apparatus using the same Feb. 24, 2009
7495217 Film thickness and composition measurement via auger electron spectroscopy and electron probe microanalysis Feb. 24, 2009
7491934 SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast Feb. 17, 2009
7488938 Charge-control method and apparatus for electron beam imaging Feb. 10, 2009
7476875 Contact opening metrology Jan. 13, 2009
7474108 Apparatus and method for contacting of test objects Jan. 6, 2009
7474107 Buried short location determination using voltage contrast inspection Jan. 6, 2009
7473911 Specimen current mapper Jan. 6, 2009
7453274 Detection of defects using transient contrast Nov. 18, 2008
7449898 Method and apparatus for reviewing defects by detecting images having voltage contrast Nov. 11, 2008
7446555 Apparatus to inspect TFT substrate and method of inspecting TFT substrate Nov. 4, 2008
7446543 Non-contact electrical connections test device Nov. 4, 2008
7443189 Method to detect and predict metal silicide defects in a microelectronic device during the manufacture of an integrated circuit Oct. 28, 2008
7425704 Inspection method and apparatus using an electron beam Sep. 16, 2008
7420163 Determining layer thickness using photoelectron spectroscopy Sep. 2, 2008

1 2 3 4 5 6 7 8

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