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Class Information
Number: 324/71.3
Name: Electricity: measuring and testing > Determining nonelectric properties by measuring electric properties > Beam of atomic particles
Description: Subject matter where the property being measured is some characteristic of a beam of atomic particles.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8653807 Apparatus and method for measuring ion beam current Feb. 18, 2014
8377518 In-situ flux measurement devices, methods, and systems Feb. 19, 2013
8350556 Integrated optical element and Faraday cup Jan. 8, 2013
8338803 Device for testing an integrated circuit and method for implementing same Dec. 25, 2012
8330129 Uniformity of a scanned ion beam Dec. 11, 2012
8168941 Ion beam angle calibration and emittance measurement system for ribbon beams May. 1, 2012
8093883 Ion current measurement device Jan. 10, 2012
8053739 Particle beam generating system and method with measurement of the beam spot of the particle beam Nov. 8, 2011
7902503 Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams Mar. 8, 2011
7696497 Focusing system and method for a charged particle imaging system Apr. 13, 2010
7683348 Sensor for ion implanter Mar. 23, 2010
7564048 Automated faraday sensor test system Jul. 21, 2009
7468549 Method for producing a package for an electronic circuit and a substrate for a package Dec. 23, 2008
7435970 Beam current meter Oct. 14, 2008
7378830 Miniature modified Faraday cup for micro electron beams May. 27, 2008
7368731 Method and apparatus which enable high resolution particle beam profile measurement May. 6, 2008
7279882 Method and apparatus for measuring properties of particle beams using thermo-resistive material properties Oct. 9, 2007
7244950 Trigger probe for determining the orientation of the power distribution of an electron beam Jul. 17, 2007
7170067 Ion beam measurement apparatus and method Jan. 30, 2007
7161352 Beam current measuring device and apparatus using the same Jan. 9, 2007
7106233 Integrated galvanomagnetic sensor array system Sep. 12, 2006
7012419 Fast Faraday cup with high bandwidth Mar. 14, 2006
6972551 Beam profile monitor with accurate horizontal and vertical beam profiles Dec. 6, 2005
6972552 Method for the precise measurement of dependency on amplitude and phase of a plurality of high frequency signals and a device for carrying out said method Dec. 6, 2005
6914253 System for measurement of absorbed doses of electron beams in an irradiated object Jul. 5, 2005
6763316 Method for measurement of beam emittance in a charged particle transport system Jul. 13, 2004
6700122 Wafer inspection system and wafer inspection process using charged particle beam Mar. 2, 2004
6617596 On-line measurement of absorbed electron beam dosage in irradiated product Sep. 9, 2003
6531859 Electronic arrangement for an electric component and as a support for sensors Mar. 11, 2003
6459283 Method and system for testing an electrical component Oct. 1, 2002
6429444 Real time monitoring of electron beam radiation dose Aug. 6, 2002
6313474 Method for measuring distribution of beams of charged particles and methods relating thereto Nov. 6, 2001
6300755 Enhanced modified faraday cup for determination of power density distribution of electron beams Oct. 9, 2001
6259090 Supported thin foil stripper and simple non-obstructing power meter for a space based neutral particle beam system Jul. 10, 2001
5991707 Method and system for predictive diagnosing of system reliability problems and/or system failure in a physical system Nov. 23, 1999
5844406 Method and apparatus for testing and measuring for porosity and anomalies of materials using electron beams Dec. 1, 1998
5793195 Angular distribution probe Aug. 11, 1998
5714875 Electron beam stop analyzer Feb. 3, 1998
5703492 System and method for fault analysis of semiconductor integrated circuit Dec. 30, 1997
5644220 Process and apparatus for measuring charge quantity flowing in a vacuum Jul. 1, 1997
5631461 Apparatus for, and methods of, detecting the direction and focal properties of neutral particle beams May. 20, 1997
5608338 Evaluating the lifetime and reliability of a TFT in a stress test using gate voltage and temperature measurements Mar. 4, 1997
5602489 Switch potential electron beam substrate tester Feb. 11, 1997
5583427 Tomographic determination of the power distribution in electron beams Dec. 10, 1996
5554926 Modified Faraday cup Sep. 10, 1996
5483036 Method of automatic measurement and focus of an electron beam and apparatus therefor Jan. 9, 1996
5475228 Unipolar blocking method and apparatus for monitoring electrically charged particles Dec. 12, 1995
5468966 System for tomographic determination of the power distribution in electron beams Nov. 21, 1995
5459393 Beam position monitor and beam position detecting method Oct. 17, 1995
5387795 Photon beam position monitor Feb. 7, 1995

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