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Class Information
Number: 318/687
Name: Electricity: motive power systems > Positional servo systems (e.g., servomechanisms) > With particular motor control system responsive to the "actuating signal" > Linear movement motors
Description: Subject matter in which the particular motor control is used to control a linear movement motor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7626348 |
Linear motor door actuator |
Dec. 1, 2009 |
| 7592760 |
Lithographic apparatus and device manufacturing method |
Sep. 22, 2009 |
| 7589482 |
Hot spot sensoring control of linear motors |
Sep. 15, 2009 |
| 7579793 |
System and method for efficient wide dynamic range coil drive |
Aug. 25, 2009 |
| 7537091 |
Magnetic elevator door mover |
May. 26, 2009 |
| 7528560 |
Driving controlling apparatus of linear compressor and method thereof |
May. 5, 2009 |
| 7504794 |
Planar motor |
Mar. 17, 2009 |
| 7492117 |
Electromagnetic variable degrees of freedom actuator systems and methods |
Feb. 17, 2009 |
| 7416130 |
Precise transport positioning apparatus using a closed loop controlled, non-direct drive or friction drive system with absolute positioning encoder |
Aug. 26, 2008 |
| 7402966 |
Linear drive with travel measurement |
Jul. 22, 2008 |
| 7385363 |
Linear motor having progressive movement control |
Jun. 10, 2008 |
| 7385370 |
Driving apparatus, exposure apparatus, and device manufacturing method |
Jun. 10, 2008 |
| 7348745 |
Controller |
Mar. 25, 2008 |
| 7319303 |
Method and apparatus for estimating the position of a moving part of a linear actuator |
Jan. 15, 2008 |
| 7282874 |
Alignment apparatus, exposure apparatus, and device manufacturing method |
Oct. 16, 2007 |
| 7268504 |
Stator position feedback controller |
Sep. 11, 2007 |
| 7262575 |
Method and apparatus for precise positioning of an object with linear stepper motors |
Aug. 28, 2007 |
| 7245092 |
Alignment stage apparatus, exposure apparatus, and semiconductor device manufacturing method |
Jul. 17, 2007 |
| 7245103 |
Motor speed and position control |
Jul. 17, 2007 |
| 7233119 |
Method and circuit arrangement for the sensorless determination of load states of synchronous linear motors |
Jun. 19, 2007 |
| 7199493 |
Alignment stage apparatus |
Apr. 3, 2007 |
| 7184254 |
Apparatus and method for controlling the maximum stroke for linear compressors |
Feb. 27, 2007 |
| 7181296 |
Method of adaptive interactive learning control and a lithographic manufacturing process and apparatus employing such a method |
Feb. 20, 2007 |
| 7170241 |
Path module for a linear motor, modular linear motor system and method to control same |
Jan. 30, 2007 |
| 7135827 |
Sawyer motor forcer with integrated drive electronics |
Nov. 14, 2006 |
| 7119879 |
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method |
Oct. 10, 2006 |
| 7108189 |
Precise transport positioning apparatus using a closed loop controlled, non-direct drive or friction drive system with absolute positioning encoder |
Sep. 19, 2006 |
| 7057370 |
Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector |
Jun. 6, 2006 |
| 6975383 |
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method |
Dec. 13, 2005 |
| 6949896 |
Apparatus for and method of driving motor to move object at a constant velocity |
Sep. 27, 2005 |
| 6885165 |
Patient bed for multiple position emission scans |
Apr. 26, 2005 |
| 6882126 |
Holder mover for a stage assembly |
Apr. 19, 2005 |
| 6882901 |
Ultra-precision robotic system |
Apr. 19, 2005 |
| 6853158 |
Adaptive ripple suppression/compensation apparatus for permanent magnet linear motors |
Feb. 8, 2005 |
| 6799079 |
Method and apparatus for correcting positional deviation of finite linear rolling guide |
Sep. 28, 2004 |
| 6770890 |
Stage devices including linear motors that produce reduced beam-perturbing stray magnetic fields, and charged-particle-beam microlithography systems comprising same |
Aug. 3, 2004 |
| 6750625 |
Wafer stage with magnetic bearings |
Jun. 15, 2004 |
| 6744228 |
High-speed precision positioning apparatus |
Jun. 1, 2004 |
| 6727666 |
XY table for a semiconductor manufacturing apparatus |
Apr. 27, 2004 |
| 6703806 |
XYZ-axes table |
Mar. 9, 2004 |
| 6682310 |
Apparatus and method for controlling operation of reciprocating motor compressor |
Jan. 27, 2004 |
| 6683433 |
Exposure apparatus and method utilizing isolated reaction frame |
Jan. 27, 2004 |
| 6674085 |
Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems |
Jan. 6, 2004 |
| 6650079 |
System and method to control planar motors |
Nov. 18, 2003 |
| 6583597 |
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same |
Jun. 24, 2003 |
| 6518721 |
Oscillation isolator |
Feb. 11, 2003 |
| 6518718 |
Speed electromotive force phase control system adapted to low speed |
Feb. 11, 2003 |
| 6515440 |
Departure control system using simulated phase |
Feb. 4, 2003 |
| 6507178 |
Switching type bandgap controller |
Jan. 14, 2003 |
| 6448733 |
XYZ-axes table |
Sep. 10, 2002 |
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