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Class Information
Number: 318/649
Name: Electricity: motive power systems > Positional servo systems (e.g., servomechanisms) > With particular "error-detecting" means > With inertial, direction or inclination measuring instrument > Stable platforms
Description: Subject matter in which the measuring instrument includes a stable platform.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7592760 |
Lithographic apparatus and device manufacturing method |
Sep. 22, 2009 |
| 7583044 |
Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor |
Sep. 1, 2009 |
| 7573225 |
Electromagnetic alignment and scanning apparatus |
Aug. 11, 2009 |
| 7557529 |
Stage unit and exposure apparatus |
Jul. 7, 2009 |
| 7554283 |
Non-reaction torque drive |
Jun. 30, 2009 |
| 7535193 |
Five axis compensated rotating stage |
May. 19, 2009 |
| 7504794 |
Planar motor |
Mar. 17, 2009 |
| 7436135 |
Method for controlling stage apparatus |
Oct. 14, 2008 |
| 7429845 |
System and method for controlling a stage assembly |
Sep. 30, 2008 |
| 7427846 |
Method of optimizing servo controller power in two-dimensional flexure mems storage devices |
Sep. 23, 2008 |
| 7394218 |
Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor |
Jul. 1, 2008 |
| 7385370 |
Driving apparatus, exposure apparatus, and device manufacturing method |
Jun. 10, 2008 |
| 7372231 |
Movable body position control device and stage device using the movable body position control device |
May. 13, 2008 |
| 7365513 |
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
Apr. 29, 2008 |
| 7352149 |
Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus |
Apr. 1, 2008 |
| 7348752 |
Stage apparatus and lithographic apparatus |
Mar. 25, 2008 |
| 7304448 |
Developing apparatus and image processing system with the developing apparatus |
Dec. 4, 2007 |
| RE39906 |
Gyro-stabilized platforms for force-feedback applications |
Nov. 6, 2007 |
| 7239106 |
System and method for facilitating fluid three-dimensional movement of an object via directional force |
Jul. 3, 2007 |
| 7239107 |
Flexure stage |
Jul. 3, 2007 |
| 7215095 |
Driving apparatus, exposure apparatus, and device manufacturing method |
May. 8, 2007 |
| 7205741 |
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method |
Apr. 17, 2007 |
| 7202937 |
Balanced positioning system for use in lithographic apparatus |
Apr. 10, 2007 |
| 7170203 |
Two-dimensional variable reluctance planar motor |
Jan. 30, 2007 |
| 7154243 |
Rotary indexing table |
Dec. 26, 2006 |
| 7133115 |
Positioning device, exposure apparatus using the positioning device, and device production method |
Nov. 7, 2006 |
| 7126666 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Oct. 24, 2006 |
| 7119511 |
Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor |
Oct. 10, 2006 |
| 7113256 |
Lithographic apparatus and device manufacturing method with feed-forward focus control |
Sep. 26, 2006 |
| 7088071 |
Cabling system and method for facilitating fluid three-dimensional movement of a suspended camera |
Aug. 8, 2006 |
| 7075623 |
Flexure-supported split reaction mass |
Jul. 11, 2006 |
| 7064512 |
Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method |
Jun. 20, 2006 |
| 7057365 |
Prober and testing apparatus using same |
Jun. 6, 2006 |
| 7057370 |
Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector |
Jun. 6, 2006 |
| 7034920 |
Balanced positioning system for use in lithographic apparatus |
Apr. 25, 2006 |
| 7012398 |
Electromagnetic alignment and scanning apparatus |
Mar. 14, 2006 |
| 7009359 |
Foam core chuck for the scanning stage of a lithography system |
Mar. 7, 2006 |
| 7009685 |
Bearing arrangement for reaction mass in a controlled environment |
Mar. 7, 2006 |
| 6989647 |
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
Jan. 24, 2006 |
| 6975089 |
System and method for facilitating fluid three-dimensional movement of an object via directional force |
Dec. 13, 2005 |
| 6975086 |
Positioning control method |
Dec. 13, 2005 |
| 6969966 |
Electromagnetic alignment and scanning apparatus |
Nov. 29, 2005 |
| 6965426 |
Positioning system and exposure apparatus having the same |
Nov. 15, 2005 |
| 6948367 |
Dual bridge angular and linear accelerometer |
Sep. 27, 2005 |
| 6947125 |
Bearing arrangement for reaction mass in a controlled environment |
Sep. 20, 2005 |
| 6927840 |
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
Aug. 9, 2005 |
| 6927838 |
Multiple stage, stage assembly having independent stage bases |
Aug. 9, 2005 |
| 6895817 |
Dual bridge angular accelerometer |
May. 24, 2005 |
| 6882126 |
Holder mover for a stage assembly |
Apr. 19, 2005 |
| 6879127 |
3-ring magnetic anti-gravity support |
Apr. 12, 2005 |
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