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Class Information
Number: 315/111.81
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Electron or ion source
Description: Subject matter including means for producing electrons or ions.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619224 |
Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam |
Nov. 17, 2009 |
| 7609002 |
Plasma accelerating apparatus and plasma processing system having the same |
Oct. 27, 2009 |
| 7609003 |
Ion implantation system and control method |
Oct. 27, 2009 |
| 7605379 |
Cold-cathode-based ion source element |
Oct. 20, 2009 |
| 7601971 |
Charged beam gun |
Oct. 13, 2009 |
| 7598500 |
Ion source and metals used in making components thereof and method of making same |
Oct. 6, 2009 |
| 7592261 |
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system |
Sep. 22, 2009 |
| 7589333 |
Methods for rapidly switching off an ion beam |
Sep. 15, 2009 |
| 7589474 |
Ion source with upstream inner magnetic pole piece |
Sep. 15, 2009 |
| 7586101 |
Ion sources for ion implantation apparatus |
Sep. 8, 2009 |
| 7586109 |
Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
Sep. 8, 2009 |
| 7581380 |
Air-breathing electrostatic ion thruster |
Sep. 1, 2009 |
| 7579780 |
Power supply apparatus |
Aug. 25, 2009 |
| 7576337 |
Power supply for an ion implantation system |
Aug. 18, 2009 |
| 7569837 |
Ion source |
Aug. 4, 2009 |
| 7569995 |
Apparatus for magnetic and electrostatic confinement of plasma |
Aug. 4, 2009 |
| 7566883 |
Thermal transfer sheet for ion source |
Jul. 28, 2009 |
| 7560870 |
Power supply apparatus for ion accelerator |
Jul. 14, 2009 |
| 7557364 |
Charge neutralizing device |
Jul. 7, 2009 |
| 7557362 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
Jul. 7, 2009 |
| 7556749 |
Electron source |
Jul. 7, 2009 |
| 7554054 |
High-frequency heating device, semiconductor manufacturing device, and light source device |
Jun. 30, 2009 |
| 7550719 |
Electron beam source device available for detecting life span of filament |
Jun. 23, 2009 |
| 7550927 |
System and method for generating ions and radicals |
Jun. 23, 2009 |
| 7544957 |
Non-uniform ion implantation |
Jun. 9, 2009 |
| 7541597 |
Automatic cleaning of ion sources |
Jun. 2, 2009 |
| 7528550 |
Ion implantation system and control method |
May. 5, 2009 |
| 7518124 |
Monatomic dopant ion source and method |
Apr. 14, 2009 |
| 7507977 |
System and method of ion beam control in response to a beam glitch |
Mar. 24, 2009 |
| 7498587 |
Bi-directional filtered arc plasma source |
Mar. 3, 2009 |
| 7498588 |
Tandem accelerator having low-energy static voltage injection and method of operation thereof |
Mar. 3, 2009 |
| 7498592 |
Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams |
Mar. 3, 2009 |
| 7498586 |
Ion source control system |
Mar. 3, 2009 |
| 7495241 |
Ion beam irradiation apparatus and insulating spacer for the same |
Feb. 24, 2009 |
| 7491931 |
Power supply regulation using a feedback circuit comprising an AC and DC component |
Feb. 17, 2009 |
| 7479643 |
Ion implantation ion source, system and method |
Jan. 20, 2009 |
| 7476868 |
Apparatus and method for generating ions of an ion implanter |
Jan. 13, 2009 |
| 7476869 |
Gas distributor for ion source |
Jan. 13, 2009 |
| 7459693 |
Ion guide for mass spectrometers |
Dec. 2, 2008 |
| 7459704 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
Dec. 2, 2008 |
| 7459858 |
Hall thruster with shared magnetic structure |
Dec. 2, 2008 |
| 7453059 |
Technique for monitoring and controlling a plasma process |
Nov. 18, 2008 |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7439678 |
Magnetic and electrostatic confinement of plasma with tuning of electrostatic field |
Oct. 21, 2008 |
| 7439529 |
High current density ion source |
Oct. 21, 2008 |
| 7439521 |
Ion source with removable anode assembly |
Oct. 21, 2008 |
| 7436122 |
Helicon hall thruster |
Oct. 14, 2008 |
| 7435980 |
Electron beam irradiation device |
Oct. 14, 2008 |
| 7435971 |
Ion source |
Oct. 14, 2008 |
| 7432468 |
Plasma processing apparatus and plasma processing method |
Oct. 7, 2008 |
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