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Class Information
Number: 315/111.71
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating > With magnetic field > Plasma containment
Description: Subject matter wherein the magnetic field confines the plasma.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7423367 |
Design of high power pulsed flash lamps |
Sep. 9, 2008 |
| 7420182 |
Combined radio frequency and hall effect ion source and plasma accelerator system |
Sep. 2, 2008 |
| 7411352 |
Dual plasma beam sources and method |
Aug. 12, 2008 |
| 7405410 |
Method and apparatus for confining, neutralizing, compressing and accelerating an ion field |
Jul. 29, 2008 |
| 7382098 |
Plasma producing apparatus and doping apparatus |
Jun. 3, 2008 |
| 7364623 |
Confinement ring drive |
Apr. 29, 2008 |
| 7327089 |
Beam plasma source |
Feb. 5, 2008 |
| 7315128 |
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition |
Jan. 1, 2008 |
| 7315129 |
Plasma producing apparatus and doping apparatus |
Jan. 1, 2008 |
| 7304435 |
Device for confinement of a plasma within a volume |
Dec. 4, 2007 |
| 7276140 |
Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same |
Oct. 2, 2007 |
| 7183715 |
Method for operating a semiconductor processing apparatus |
Feb. 27, 2007 |
| 7156047 |
Apparatus for fabricating semiconductor device using plasma |
Jan. 2, 2007 |
| 7109660 |
Plasma processing device and baffle plate thereof |
Sep. 19, 2006 |
| 7095179 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities |
Aug. 22, 2006 |
| 7090742 |
Device for producing inductively coupled plasma and method thereof |
Aug. 15, 2006 |
| 7084573 |
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition |
Aug. 1, 2006 |
| 7061184 |
Plasma electron density measuring and monitoring device |
Jun. 13, 2006 |
| 7026764 |
Plasma producing apparatus and doping apparatus |
Apr. 11, 2006 |
| 7023128 |
Dipole ion source |
Apr. 4, 2006 |
| 7009330 |
Composition of plasma display panel |
Mar. 7, 2006 |
| 6998785 |
Liquid-jet/liquid droplet initiated plasma discharge for generating useful plasma radiation |
Feb. 14, 2006 |
| 6979954 |
Inter-stage plasma source |
Dec. 27, 2005 |
| 6975073 |
Ion plasma beam generating device |
Dec. 13, 2005 |
| 6972418 |
Ion doping apparatus, and multi-apertured electrode for the same |
Dec. 6, 2005 |
| 6956329 |
Apparatus and method for forming a high pressure plasma discharge column |
Oct. 18, 2005 |
| 6954033 |
Plasma processing apparatus |
Oct. 11, 2005 |
| 6936135 |
Twist-N-Lock wafer area pressure ring and assembly for reducing particulate contaminant in a plasma processing chamber |
Aug. 30, 2005 |
| 6926803 |
Confinement ring support assembly |
Aug. 9, 2005 |
| 6924600 |
Laser plasma generation method and structure thereof |
Aug. 2, 2005 |
| 6919689 |
Method for toolmatching and troubleshooting a plasma processing system |
Jul. 19, 2005 |
| 6911779 |
Magnetic mirror plasma source |
Jun. 28, 2005 |
| 6906469 |
Radio frequency ion source with maneuverable electrode(s) |
Jun. 14, 2005 |
| 6903511 |
Generation of uniformly-distributed plasma |
Jun. 7, 2005 |
| 6897615 |
Plasma process and apparatus |
May. 24, 2005 |
| 6885154 |
Discharge plasma processing system |
Apr. 26, 2005 |
| 6882704 |
Radiation source for generating extreme ultraviolet radiation |
Apr. 19, 2005 |
| 6873114 |
Method for toolmatching and troubleshooting a plasma processing system |
Mar. 29, 2005 |
| 6873113 |
Stand alone plasma vacuum pump |
Mar. 29, 2005 |
| 6864636 |
Apparatus, method, and system for a laser-assisted field emission microwave signal generator |
Mar. 8, 2005 |
| 6841943 |
Plasma processor with electrode simultaneously responsive to plural frequencies |
Jan. 11, 2005 |
| 6815900 |
Radiation source with high average EUV radiation output |
Nov. 9, 2004 |
| 6815899 |
Remote plasma generator |
Nov. 9, 2004 |
| 6806653 |
Method and structure to segment RF coupling to silicon electrode |
Oct. 19, 2004 |
| 6774569 |
Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions |
Aug. 10, 2004 |
| 6771026 |
Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave |
Aug. 3, 2004 |
| 6759808 |
Microwave stripline applicators |
Jul. 6, 2004 |
| 6750615 |
Plasma apparatus including plasma-measuring device |
Jun. 15, 2004 |
| 6737812 |
Plasma processing apparatus |
May. 18, 2004 |
| 6729850 |
Applied plasma duct system |
May. 4, 2004 |
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