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Class Information
Number: 315/111.41
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating > With magnetic field
Description: Subject matter including means for generating a magnetic field.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622721 |
Focused anode layer ion source with converging and charge compensated beam (falcon) |
Nov. 24, 2009 |
| 7619224 |
Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam |
Nov. 17, 2009 |
| 7611603 |
Plasma processing apparatus having impedance varying electrodes |
Nov. 3, 2009 |
| 7613271 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Nov. 3, 2009 |
| 7604716 |
Methods and apparatus for generating high-density plasma |
Oct. 20, 2009 |
| 7602111 |
Plasma accelerating apparatus and plasma processing system including secondary electron amplification coating layer formed at inner wall of channel |
Oct. 13, 2009 |
| 7602127 |
Phase and frequency control of a radio frequency generator from an external source |
Oct. 13, 2009 |
| 7598500 |
Ion source and metals used in making components thereof and method of making same |
Oct. 6, 2009 |
| 7589474 |
Ion source with upstream inner magnetic pole piece |
Sep. 15, 2009 |
| 7579780 |
Power supply apparatus |
Aug. 25, 2009 |
| 7571732 |
Ignition control of remote plasma unit |
Aug. 11, 2009 |
| 7569837 |
Ion source |
Aug. 4, 2009 |
| 7569995 |
Apparatus for magnetic and electrostatic confinement of plasma |
Aug. 4, 2009 |
| 7566883 |
Thermal transfer sheet for ion source |
Jul. 28, 2009 |
| 7527713 |
Variable quadruple electromagnet array in plasma processing |
May. 5, 2009 |
| 7498587 |
Bi-directional filtered arc plasma source |
Mar. 3, 2009 |
| 7486758 |
Combined plasma source and liner implosion system |
Feb. 3, 2009 |
| 7476869 |
Gas distributor for ion source |
Jan. 13, 2009 |
| 7477718 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Jan. 13, 2009 |
| 7459858 |
Hall thruster with shared magnetic structure |
Dec. 2, 2008 |
| 7459654 |
Controlled fusion in a field reversed configuration and direct energy conversion |
Dec. 2, 2008 |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7446479 |
High-density plasma source |
Nov. 4, 2008 |
| 7439678 |
Magnetic and electrostatic confinement of plasma with tuning of electrostatic field |
Oct. 21, 2008 |
| 7439521 |
Ion source with removable anode assembly |
Oct. 21, 2008 |
| 7425711 |
Thermal control plate for ion source |
Sep. 16, 2008 |
| 7420182 |
Combined radio frequency and hall effect ion source and plasma accelerator system |
Sep. 2, 2008 |
| 7411352 |
Dual plasma beam sources and method |
Aug. 12, 2008 |
| 7408303 |
Pulsed plasma accelerator and method |
Aug. 5, 2008 |
| 7405411 |
Ion source with multi-piece outer cathode |
Jul. 29, 2008 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7400096 |
Large area plasma source |
Jul. 15, 2008 |
| 7391160 |
Controlled fusion in a field reversed configuration and direct energy conversion |
Jun. 24, 2008 |
| 7372059 |
Plasma-based EUV light source |
May. 13, 2008 |
| 7371991 |
Iron beam irradiation device and insulating spacer for the device |
May. 13, 2008 |
| 7342236 |
Fluid-cooled ion source |
Mar. 11, 2008 |
| 7342361 |
Plasma source |
Mar. 11, 2008 |
| 7327089 |
Beam plasma source |
Feb. 5, 2008 |
| 7323821 |
Device for generating and/or influencing electromagnetic radiation from a plasma |
Jan. 29, 2008 |
| 7319295 |
High-frequency power supply structure and plasma CVD device using the same |
Jan. 15, 2008 |
| 7316199 |
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber |
Jan. 8, 2008 |
| 7315128 |
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition |
Jan. 1, 2008 |
| 7312579 |
Hall-current ion source for ion beams of low and high energy for technological applications |
Dec. 25, 2007 |
| 7259378 |
Closed drift ion source |
Aug. 21, 2007 |
| 7253572 |
Electromagnetic induced accelerator based on coil-turn modulation |
Aug. 7, 2007 |
| 7250727 |
High power, long focus electron source for beam processing |
Jul. 31, 2007 |
| 7208878 |
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode |
Apr. 24, 2007 |
| 7193369 |
Method for generating gas plasma |
Mar. 20, 2007 |
| 7180243 |
Plasma accelerator with closed electron drift |
Feb. 20, 2007 |
| 7180242 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Feb. 20, 2007 |
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