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Class Information
Number: 315/111.41
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating > With magnetic field
Description: Subject matter including means for generating a magnetic field.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7411352 |
Dual plasma beam sources and method |
Aug. 12, 2008 |
| 7408303 |
Pulsed plasma accelerator and method |
Aug. 5, 2008 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7405411 |
Ion source with multi-piece outer cathode |
Jul. 29, 2008 |
| 7400096 |
Large area plasma source |
Jul. 15, 2008 |
| 7391160 |
Controlled fusion in a field reversed configuration and direct energy conversion |
Jun. 24, 2008 |
| 7371991 |
Iron beam irradiation device and insulating spacer for the device |
May. 13, 2008 |
| 7372059 |
Plasma-based EUV light source |
May. 13, 2008 |
| 7342236 |
Fluid-cooled ion source |
Mar. 11, 2008 |
| 7342361 |
Plasma source |
Mar. 11, 2008 |
| 7327089 |
Beam plasma source |
Feb. 5, 2008 |
| 7323821 |
Device for generating and/or influencing electromagnetic radiation from a plasma |
Jan. 29, 2008 |
| 7319295 |
High-frequency power supply structure and plasma CVD device using the same |
Jan. 15, 2008 |
| 7316199 |
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber |
Jan. 8, 2008 |
| 7315128 |
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition |
Jan. 1, 2008 |
| 7312579 |
Hall-current ion source for ion beams of low and high energy for technological applications |
Dec. 25, 2007 |
| 7259378 |
Closed drift ion source |
Aug. 21, 2007 |
| 7253572 |
Electromagnetic induced accelerator based on coil-turn modulation |
Aug. 7, 2007 |
| 7250727 |
High power, long focus electron source for beam processing |
Jul. 31, 2007 |
| 7208878 |
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode |
Apr. 24, 2007 |
| 7193369 |
Method for generating gas plasma |
Mar. 20, 2007 |
| 7180242 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Feb. 20, 2007 |
| 7180243 |
Plasma accelerator with closed electron drift |
Feb. 20, 2007 |
| 7129656 |
Apparatus for magnetic and electrostatic confinement of plasma |
Oct. 31, 2006 |
| 7126283 |
System and method for generating a discharge in high pressure gases |
Oct. 24, 2006 |
| 7126284 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Oct. 24, 2006 |
| 7119489 |
Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode |
Oct. 10, 2006 |
| 7116054 |
High-efficient ion source with improved magnetic field |
Oct. 3, 2006 |
| 7115185 |
Pulsed excitation of inductively coupled plasma sources |
Oct. 3, 2006 |
| 7102292 |
Method and device for removing harmonics in semiconductor plasma processing systems |
Sep. 5, 2006 |
| 7090742 |
Device for producing inductively coupled plasma and method thereof |
Aug. 15, 2006 |
| 7084572 |
Plasma-accelerator configuration |
Aug. 1, 2006 |
| 7084573 |
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition |
Aug. 1, 2006 |
| 7081710 |
Elementary plasma source and plasma generation apparatus using the same |
Jul. 25, 2006 |
| 7026763 |
Apparatus for magnetic and electrostatic confinement of plasma |
Apr. 11, 2006 |
| 7015646 |
Magnetic and electrostatic confinement of plasma with tuning of electrostatic field |
Mar. 21, 2006 |
| 7002148 |
Controlled fusion in a field reversed configuration and direct energy conversion |
Feb. 21, 2006 |
| 6995515 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Feb. 7, 2006 |
| 6982520 |
Hall effect thruster with anode having magnetic field barrier |
Jan. 3, 2006 |
| 6960888 |
Method of producing and accelerating an ion beam |
Nov. 1, 2005 |
| 6922021 |
Microwave energized plasma lamp with solid dielectric waveguide |
Jul. 26, 2005 |
| 6906469 |
Radio frequency ion source with maneuverable electrode(s) |
Jun. 14, 2005 |
| 6900596 |
Capacitively coupled plasma reactor with uniform radial distribution of plasma |
May. 31, 2005 |
| 6897616 |
Slow-wave induction plasma transport |
May. 24, 2005 |
| 6894298 |
Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge |
May. 17, 2005 |
| 6885154 |
Discharge plasma processing system |
Apr. 26, 2005 |
| 6876154 |
Plasma processing apparatus |
Apr. 5, 2005 |
| 6873114 |
Method for toolmatching and troubleshooting a plasma processing system |
Mar. 29, 2005 |
| 6864486 |
Ion sources |
Mar. 8, 2005 |
| 6853141 |
Capacitively coupled plasma reactor with magnetic plasma control |
Feb. 8, 2005 |
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