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Class Information
Number: 315/111.31
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating > With extraction electrode
Description: Subject matter including means for removing ions of one charge from the plasma or discharge space.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622721 |
Focused anode layer ion source with converging and charge compensated beam (falcon) |
Nov. 24, 2009 |
| 7598500 |
Ion source and metals used in making components thereof and method of making same |
Oct. 6, 2009 |
| 7595594 |
Arrangement for switching high electric currents by a gas discharge |
Sep. 29, 2009 |
| 7569837 |
Ion source |
Aug. 4, 2009 |
| 7564042 |
Ion beam apparatus having plasma sheath controller |
Jul. 21, 2009 |
| 7498592 |
Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams |
Mar. 3, 2009 |
| 7486758 |
Combined plasma source and liner implosion system |
Feb. 3, 2009 |
| 7476868 |
Apparatus and method for generating ions of an ion implanter |
Jan. 13, 2009 |
| 7476849 |
Technique for monitoring and controlling a plasma process |
Jan. 13, 2009 |
| 7453059 |
Technique for monitoring and controlling a plasma process |
Nov. 18, 2008 |
| 7420181 |
Liquid metal ion gun |
Sep. 2, 2008 |
| 7405415 |
Ion source with particular grid assembly |
Jul. 29, 2008 |
| 7372059 |
Plasma-based EUV light source |
May. 13, 2008 |
| 7342361 |
Plasma source |
Mar. 11, 2008 |
| 7321198 |
Ion source with uniformity of radial distribution of ion beam intensity |
Jan. 22, 2008 |
| 7279845 |
Plasma processing method and apparatus |
Oct. 9, 2007 |
| 7244475 |
Plasma treatment apparatus and control method thereof |
Jul. 17, 2007 |
| 7235945 |
Energy conversion systems |
Jun. 26, 2007 |
| 7204921 |
Vacuum apparatus and vacuum processing method |
Apr. 17, 2007 |
| 7196337 |
Particle processing apparatus and methods |
Mar. 27, 2007 |
| 7078862 |
Beam source and beam processing apparatus |
Jul. 18, 2006 |
| 7071626 |
Plasma generator |
Jul. 4, 2006 |
| 7045793 |
Multi-grid ion beam source for generating a highly collimated ion beam |
May. 16, 2006 |
| 7038403 |
Method and apparatus for maintaining alignment of a cyclotron dee |
May. 2, 2006 |
| 7005782 |
Charged particle beam extraction and formation apparatus |
Feb. 28, 2006 |
| 6956329 |
Apparatus and method for forming a high pressure plasma discharge column |
Oct. 18, 2005 |
| 6929712 |
Plasma processing apparatus capable of evaluating process performance |
Aug. 16, 2005 |
| 6909086 |
Neutral particle beam processing apparatus |
Jun. 21, 2005 |
| 6909087 |
Method of processing a surface of a workpiece |
Jun. 21, 2005 |
| 6894298 |
Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge |
May. 17, 2005 |
| 6885153 |
Plasma processing apparatus and method |
Apr. 26, 2005 |
| 6870321 |
High-frequency electron source |
Mar. 22, 2005 |
| 6861643 |
Neutral particle beam processing apparatus |
Mar. 1, 2005 |
| 6858838 |
Neutral particle beam processing apparatus |
Feb. 22, 2005 |
| 6759807 |
Multi-grid ion beam source for generating a highly collimated ion beam |
Jul. 6, 2004 |
| 6717133 |
Grating pattern and arrangement for mass spectrometers |
Apr. 6, 2004 |
| 6700329 |
Method and apparatus for providing flow-stabilized microdischarges in metal capillaries |
Mar. 2, 2004 |
| 6670623 |
Thermal regulation of an ion implantation system |
Dec. 30, 2003 |
| 6563907 |
Radiation source with shaped emission |
May. 13, 2003 |
| 6554968 |
Method for measuring and controlling beam current in ion beam processing |
Apr. 29, 2003 |
| 6545419 |
Double chamber ion implantation system |
Apr. 8, 2003 |
| 6528948 |
Plasma valve |
Mar. 4, 2003 |
| 6417625 |
Apparatus and method for forming a high pressure plasma discharge column |
Jul. 9, 2002 |
| 6414438 |
Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
Jul. 2, 2002 |
| 6388381 |
Constricted glow discharge plasma source |
May. 14, 2002 |
| 6320321 |
Ion beam processing apparatus for processing work piece with ion beam being neutralized uniformly |
Nov. 20, 2001 |
| 6300720 |
Plasma gun and methods for the use thereof |
Oct. 9, 2001 |
| 6278241 |
Four-nozzle plasma generator for forming an activated jet |
Aug. 21, 2001 |
| 6172324 |
Plasma focus radiation source |
Jan. 9, 2001 |
| 6169370 |
Method and device for producing plasma with electrodes having openings twice the diameter of the isolator opening |
Jan. 2, 2001 |
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