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Class Information
Number: 315/111.21
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating
Description: Subject matter including means for producing a plasma.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7411353 |
Alternating current multi-phase plasma gas generator with annular electrodes |
Aug. 12, 2008 |
| 7411352 |
Dual plasma beam sources and method |
Aug. 12, 2008 |
| 7408303 |
Pulsed plasma accelerator and method |
Aug. 5, 2008 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7405521 |
Multiple frequency plasma processor method and apparatus |
Jul. 29, 2008 |
| 7405411 |
Ion source with multi-piece outer cathode |
Jul. 29, 2008 |
| 7405410 |
Method and apparatus for confining, neutralizing, compressing and accelerating an ion field |
Jul. 29, 2008 |
| 7403764 |
RF power delivery diagnostic system |
Jul. 22, 2008 |
| 7397013 |
Plasma lineation electrode |
Jul. 8, 2008 |
| 7394041 |
Apparatus for treating a waste gas using plasma torch |
Jul. 1, 2008 |
| 7391160 |
Controlled fusion in a field reversed configuration and direct energy conversion |
Jun. 24, 2008 |
| 7367196 |
Spinning cold plasma apparatus and methods relating thereto |
May. 6, 2008 |
| 7368876 |
Plasma processing apparatus |
May. 6, 2008 |
| 7359177 |
Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output |
Apr. 15, 2008 |
| 7345429 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities |
Mar. 18, 2008 |
| 7345428 |
Transducer package for process control |
Mar. 18, 2008 |
| 7342198 |
Method and apparatus for generating an electrical arc |
Mar. 11, 2008 |
| 7342361 |
Plasma source |
Mar. 11, 2008 |
| 7338581 |
Sputtering apparatus |
Mar. 4, 2008 |
| 7329884 |
Exposure apparatus and exposure method |
Feb. 12, 2008 |
| 7327089 |
Beam plasma source |
Feb. 5, 2008 |
| 7323821 |
Device for generating and/or influencing electromagnetic radiation from a plasma |
Jan. 29, 2008 |
| 7319295 |
High-frequency power supply structure and plasma CVD device using the same |
Jan. 15, 2008 |
| 7317171 |
Method and apparatus for generating an electric arc |
Jan. 8, 2008 |
| 7312579 |
Hall-current ion source for ion beams of low and high energy for technological applications |
Dec. 25, 2007 |
| 7313451 |
Plasma processing method, detecting method of completion of seasoning, plasma processing apparatus and storage medium |
Dec. 25, 2007 |
| 7309961 |
Driving frequency modulation system and method for plasma accelerator |
Dec. 18, 2007 |
| 7304435 |
Device for confinement of a plasma within a volume |
Dec. 4, 2007 |
| 7294969 |
Two-stage hall effect plasma accelerator including plasma source driven by high-frequency discharge |
Nov. 13, 2007 |
| 7291985 |
External resonator/cavity electrode-less plasma lamp and method of exciting with radio-frequency energy |
Nov. 6, 2007 |
| 7292191 |
Tunable plasma frequency devices |
Nov. 6, 2007 |
| 7291377 |
Plasma display panel |
Nov. 6, 2007 |
| 7288204 |
Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (APG) |
Oct. 30, 2007 |
| 7285916 |
Multi chamber plasma process system |
Oct. 23, 2007 |
| 7279845 |
Plasma processing method and apparatus |
Oct. 9, 2007 |
| 7276135 |
Vacuum plasma processor including control in response to DC bias voltage |
Oct. 2, 2007 |
| 7262555 |
Method and system for discretely controllable plasma processing |
Aug. 28, 2007 |
| 7262384 |
Reaction vessel and method for synthesizing nanoparticles using cyclonic gas flow |
Aug. 28, 2007 |
| 7259378 |
Closed drift ion source |
Aug. 21, 2007 |
| 7256134 |
Selective etching of carbon-doped low-k dielectrics |
Aug. 14, 2007 |
| 7245084 |
Transformer ignition circuit for a transformer coupled plasma source |
Jul. 17, 2007 |
| 7230202 |
Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod |
Jun. 12, 2007 |
| 7220462 |
Method and electrode assembly for non-equilibrium plasma treatment |
May. 22, 2007 |
| 7204921 |
Vacuum apparatus and vacuum processing method |
Apr. 17, 2007 |
| 7196283 |
Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface |
Mar. 27, 2007 |
| 7190119 |
Methods and apparatus for optimizing a substrate in a plasma processing system |
Mar. 13, 2007 |
| 7186314 |
Plasma processor and plasma processing method |
Mar. 6, 2007 |
| 7183715 |
Method for operating a semiconductor processing apparatus |
Feb. 27, 2007 |
| 7183514 |
Helix coupled remote plasma source |
Feb. 27, 2007 |
| 7180242 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Feb. 20, 2007 |
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