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Class Information
Number: 315/111.21
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating
Description: Subject matter including means for producing a plasma.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619233 |
Light source |
Nov. 17, 2009 |
| 7619178 |
Directly connected magnetron powered self starting plasma plume igniter |
Nov. 17, 2009 |
| 7615931 |
Pulsed dielectric barrier discharge |
Nov. 10, 2009 |
| 7613271 |
Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
Nov. 3, 2009 |
| 7609432 |
Nanowire-based device and method of making same |
Oct. 27, 2009 |
| 7609002 |
Plasma accelerating apparatus and plasma processing system having the same |
Oct. 27, 2009 |
| 7604716 |
Methods and apparatus for generating high-density plasma |
Oct. 20, 2009 |
| 7602127 |
Phase and frequency control of a radio frequency generator from an external source |
Oct. 13, 2009 |
| 7598500 |
Ion source and metals used in making components thereof and method of making same |
Oct. 6, 2009 |
| 7595594 |
Arrangement for switching high electric currents by a gas discharge |
Sep. 29, 2009 |
| 7592261 |
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system |
Sep. 22, 2009 |
| 7589474 |
Ion source with upstream inner magnetic pole piece |
Sep. 15, 2009 |
| 7589473 |
Pulsed plasma device and method for generating pulsed plasma |
Sep. 15, 2009 |
| 7587989 |
Plasma processing method and apparatus |
Sep. 15, 2009 |
| 7586099 |
Vacuum plasma generator |
Sep. 8, 2009 |
| 7586100 |
Closed loop control and process optimization in plasma doping processes using a time of flight ion detector |
Sep. 8, 2009 |
| 7582184 |
Plasma processing member |
Sep. 1, 2009 |
| 7582185 |
Plasma-processing apparatus |
Sep. 1, 2009 |
| 7580110 |
Exposure apparatus and exposure method |
Aug. 25, 2009 |
| 7571732 |
Ignition control of remote plasma unit |
Aug. 11, 2009 |
| 7572998 |
Method and device for creating a micro plasma jet |
Aug. 11, 2009 |
| 7570130 |
Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber |
Aug. 4, 2009 |
| 7569995 |
Apparatus for magnetic and electrostatic confinement of plasma |
Aug. 4, 2009 |
| 7566368 |
Method and apparatus for an improved upper electrode plate in a plasma processing system |
Jul. 28, 2009 |
| 7567037 |
High frequency power supply device and plasma generator |
Jul. 28, 2009 |
| 7564190 |
Light source device and image displaying apparatus using the same |
Jul. 21, 2009 |
| 7564042 |
Ion beam apparatus having plasma sheath controller |
Jul. 21, 2009 |
| 7560869 |
Method and apparatus for remotely monitoring properties of gases and plasmas |
Jul. 14, 2009 |
| 7557362 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
Jul. 7, 2009 |
| 7557364 |
Charge neutralizing device |
Jul. 7, 2009 |
| 7557511 |
Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma |
Jul. 7, 2009 |
| 7544269 |
Method and apparatus for electron density measurement |
Jun. 9, 2009 |
| 7541604 |
Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings |
Jun. 2, 2009 |
| 7541597 |
Automatic cleaning of ion sources |
Jun. 2, 2009 |
| 7538562 |
High performance miniature RF sensor for use in microelectronics plasma processing tools |
May. 26, 2009 |
| 7531820 |
Arrangement and method for the generation of extreme ultraviolet radiation |
May. 12, 2009 |
| 7527016 |
Plasma processing apparatus |
May. 5, 2009 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
May. 5, 2009 |
| 7522103 |
Electromagnetic impulse transmission system and method of using same |
Apr. 21, 2009 |
| 7520244 |
Plasma treatment apparatus |
Apr. 21, 2009 |
| 7514875 |
RF plasma source with quasi-closed ferrite core |
Apr. 7, 2009 |
| 7507977 |
System and method of ion beam control in response to a beam glitch |
Mar. 24, 2009 |
| 7508140 |
Plasma reactor |
Mar. 24, 2009 |
| 7498592 |
Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams |
Mar. 3, 2009 |
| 7498587 |
Bi-directional filtered arc plasma source |
Mar. 3, 2009 |
| 7498586 |
Ion source control system |
Mar. 3, 2009 |
| 7495241 |
Ion beam irradiation apparatus and insulating spacer for the same |
Feb. 24, 2009 |
| 7495524 |
Impedance matching apparatus |
Feb. 24, 2009 |
| 7491955 |
EUV light source, EUV exposure system, and production method for semiconductor device |
Feb. 17, 2009 |
| 7489206 |
High-frequency power device and method for controlling high-frequency power |
Feb. 10, 2009 |
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