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Class Information
Number: 315/111.21
Name: Electric lamp and discharge devices: systems > Discharge device load with fluent material supply to the discharge space > Plasma generating
Description: Subject matter including means for producing a plasma.

Sub-classes under this class:

Class Number Class Name Patents
315/111.31 With extraction electrode 183
315/111.41 With magnetic field 438

Patents under this class:

Patent Number Title Of Patent Date Issued
8704445 Method for improving uniformity of high-frequency plasma discharge by means of frequency modulation Apr. 22, 2014
8704444 Hall-effect plasma thruster Apr. 22, 2014
8692468 Transformer-coupled RF source for plasma processing tool Apr. 8, 2014
8692467 Synchronized and shortened master-slave RF pulsing in a plasma processing chamber Apr. 8, 2014
8692466 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator Apr. 8, 2014
8686711 High-frequency measuring device and high-frequency measuring device calibration method Apr. 1, 2014
8674607 Plasma processing apparatus and processing gas supply structure thereof Mar. 18, 2014
8674606 Detecting and preventing instabilities in plasma processes Mar. 18, 2014
8674327 Systems and methods for uniformly implanting materials on substrates using directed magnetic fields Mar. 18, 2014
8674256 Hybrid shield device for a plasma arc torch Mar. 18, 2014
8674255 Apparatus and method for controlling etch uniformity Mar. 18, 2014
8669705 Stable surface wave plasma source Mar. 11, 2014
8664862 Low-power gaseous plasma source Mar. 4, 2014
8664861 Plasma generator Mar. 4, 2014
8659335 Method and system for controlling radio frequency power Feb. 25, 2014
8659229 Plasma attenuation for uniformity control Feb. 25, 2014
8653404 In-liquid plasma electrode, in-liquid plasma generating apparatus and in-liquid plasma generating method Feb. 18, 2014
8652297 Symmetric VHF plasma power coupler with active uniformity steering Feb. 18, 2014
8648536 Plasma light source Feb. 11, 2014
8643281 Signal generation system Feb. 4, 2014
8643280 Method for controlling ion energy in radio frequency plasmas Feb. 4, 2014
8643279 Determining high frequency operating parameters in a plasma system Feb. 4, 2014
8643277 Light source Feb. 4, 2014
8633782 Radio frequency power delivery system Jan. 21, 2014
8633648 Gas conversion system Jan. 21, 2014
8633452 Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source Jan. 21, 2014
8624503 Collector-radiator structure for an electrohydrodynamic cooling system Jan. 7, 2014
8610356 Iodine fueled plasma generator system Dec. 17, 2013
8610355 Reactor structure and plasma treatment apparatus Dec. 17, 2013
8610354 Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge Dec. 17, 2013
8610353 Plasma generating apparatus, plasma processing apparatus and plasma processing method Dec. 17, 2013
8604697 Apparatus for generating plasma Dec. 10, 2013
8604696 Plasma excitation module Dec. 10, 2013
8603402 Microwave-excited plasma device Dec. 10, 2013
8597428 Vacuum sealing radio frequency (RF) and low frequency conducting actuator Dec. 3, 2013
8592712 Mounting table structure and plasma film forming apparatus Nov. 26, 2013
8587202 High-voltage insulator arrangement and ion accelerator arrangement having such a high-voltage insulator arrangement Nov. 19, 2013
8586954 Extreme ultraviolet light source apparatus Nov. 19, 2013
8585862 Plasma processing device and plasma discharge state monitoring device Nov. 19, 2013
8581597 Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events Nov. 12, 2013
8581496 Self-igniting long arc plasma torch Nov. 12, 2013
8581495 Apparatus for producing plasma Nov. 12, 2013
8575875 Control device for voltage converter, vehicle equipped with the same, and control method for voltage converter Nov. 5, 2013
8575844 Plasma klystron switch Nov. 5, 2013
8575843 System, method and apparatus for generating plasma Nov. 5, 2013
8569955 Plasma generator Oct. 29, 2013
8563924 Windowless ionization device Oct. 22, 2013
8558460 Plasma processing apparatus Oct. 15, 2013
8552650 Plasma formation region control apparatus and plasma processing apparatus Oct. 8, 2013
8551414 High-voltage plasma producing apparatus Oct. 8, 2013

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