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Class Information
Number: 279/3
Name: Chucks or sockets > Vacuum
Description: Chucks adapted to hold work-pieces, etc., by external atmospheric pressure produced by exhausting air from the side of the article against the chuck body or holder.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7442257 |
Substrate processing apparatus and substrate processing method |
Oct. 28, 2008 |
| 7425238 |
Substrate holding device |
Sep. 16, 2008 |
| 7406759 |
Releasing method and releasing apparatus of work having adhesive tape |
Aug. 5, 2008 |
| 7396022 |
System and method for optimizing wafer flatness at high rotational speeds |
Jul. 8, 2008 |
| 7367102 |
Method for mounting object and spindle device |
May. 6, 2008 |
| 7275749 |
Substrate supporting apparatus |
Oct. 2, 2007 |
| 7166019 |
Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same |
Jan. 23, 2007 |
| 7160105 |
Temperature controlled vacuum chuck |
Jan. 9, 2007 |
| 7055535 |
Holding unit, processing apparatus and holding method of substrates |
Jun. 6, 2006 |
| 7044476 |
Compact pinlifter assembly integrated in wafer chuck |
May. 16, 2006 |
| 7037870 |
Ceramic sintered body and process for producing the same |
May. 2, 2006 |
| 7033445 |
Gridded susceptor |
Apr. 25, 2006 |
| 7021635 |
Vacuum chuck utilizing sintered material and method of providing thereof |
Apr. 4, 2006 |
| 6966560 |
Device for fixing thin and flexible substrates |
Nov. 22, 2005 |
| 6958098 |
Semiconductor wafer support lift-pin assembly |
Oct. 25, 2005 |
| 6955720 |
Plasma deposition of spin chucks to reduce contamination of Silicon wafers |
Oct. 18, 2005 |
| 6767018 |
Machinable datum for a self-centering vacuum fixture |
Jul. 27, 2004 |
| 6746022 |
Chuck for holding a workpiece |
Jun. 8, 2004 |
| 6739326 |
Semiconductor manufacturing equipment |
May. 25, 2004 |
| 6736408 |
Rotary vacuum-chuck with venturi formed at base of rotating shaft |
May. 18, 2004 |
| 6634650 |
Rotary vacuum-chuck with water-assisted labyrinth seal |
Oct. 21, 2003 |
| 6570374 |
Vacuum chuck with integrated electrical testing points |
May. 27, 2003 |
| 6540014 |
Workpiece chuck |
Apr. 1, 2003 |
| 6530103 |
Method and apparatus for eliminating wafer breakage during wafer transfer by a vacuum pad |
Mar. 11, 2003 |
| 6437868 |
In-situ automated contactless thickness measurement for wafer thinning |
Aug. 20, 2002 |
| 6375176 |
Workpiece chuck with guard layer having vacuum distribution pattern |
Apr. 23, 2002 |
| 6271676 |
Spiral chuck |
Aug. 7, 2001 |
| 6232578 |
Thermophoretic vacuum wand |
May. 15, 2001 |
| 6203644 |
Method and apparatus for manufacture of quartz oscillator |
Mar. 20, 2001 |
| 6178856 |
Lathes |
Jan. 30, 2001 |
| 6168169 |
Vacuum collet with release filament |
Jan. 2, 2001 |
| 6099215 |
Clamping device |
Aug. 8, 2000 |
| 6072157 |
Thermophoretic vacuum wand |
Jun. 6, 2000 |
| 6036196 |
Collet arrangement for integrated circuit structures |
Mar. 14, 2000 |
| 5989760 |
Method of processing a substrate utilizing specific chuck |
Nov. 23, 1999 |
| 5938211 |
Alignment ledge for automatic and repeatable theta registration of laser bars |
Aug. 17, 1999 |
| 5937993 |
Apparatus and method for automatically handling and holding panels near and at the exact plane of exposure |
Aug. 17, 1999 |
| 5921560 |
Direct drive rotational motor with axial vacuum |
Jul. 13, 1999 |
| 5916368 |
Method and apparatus for temperature controlled spin-coating systems |
Jun. 29, 1999 |
| 5890279 |
Abutment member with a diamond film for use in electronic component placement apparatus |
Apr. 6, 1999 |
| 5883932 |
Substrate holding device and exposing apparatus using the same |
Mar. 16, 1999 |
| 5868401 |
Compliant flange holding apparatus |
Feb. 9, 1999 |
| 5791978 |
Bearing assembly for wafer planarization carrier |
Aug. 11, 1998 |
| 5788814 |
Chucks and methods for positioning multiple objects on a substrate |
Aug. 4, 1998 |
| 5758409 |
Conductive ball-placing apparatus |
Jun. 2, 1998 |
| 5743685 |
Clamping device for a workpiece processing machine |
Apr. 28, 1998 |
| 5741410 |
Apparatus for forming spherical electrodes |
Apr. 21, 1998 |
| 5738165 |
Substrate holding apparatus |
Apr. 14, 1998 |
| 5684557 |
Apparatus for minimizing and discharging electrostatic charges on a surface of an LCD panel or electronic part |
Nov. 4, 1997 |
| 5680428 |
Process for holding an object |
Oct. 21, 1997 |
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