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Class Information
Number: 257/E21.647
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components or integrated circuits formed in, or on, common substrate (epo) > With subsequent division of substrate into plural individual devices (epo) > To produce devices each consisting of plurality of components, e.g., integrated circuits (epo) > Substrate being semiconductor, using silicon technology (epo) > Field-effect technology (epo) > Mis technology (epo) > Dynamic random access memory structures (dram) (epo) > Characterized by type of capacitor (epo)
Description: This subclass is indented under subclass E21.646. This subclass is substantially the same in scope as ECLA classification H01L21/8242B.
Sub-classes under this class:
Patents under this class:
Patent Number |
Title Of Patent |
Date Issued |
8691704 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material |
Apr. 8, 2014 |
8669156 |
Method of manufacturing semiconductor circuit device |
Mar. 11, 2014 |
8648403 |
Dynamic memory cell structures |
Feb. 11, 2014 |
8617949 |
Capacitor and method for making same |
Dec. 31, 2013 |
8604532 |
Computing apparatus employing dynamic memory cell structures |
Dec. 10, 2013 |
8603876 |
Dynamic memory cell methods |
Dec. 10, 2013 |
8587046 |
System with logic and embedded MIM capacitor |
Nov. 19, 2013 |
8580648 |
Capacitor having an electrode structure, method of manufacturing a capacitor having an electrode structure and semiconductor device having an electrode structure |
Nov. 12, 2013 |
8518793 |
Oxygen diffusion barrier comprising Ru |
Aug. 27, 2013 |
8466517 |
Capacitorless DRAM on bulk silicon |
Jun. 18, 2013 |
8435854 |
Top electrode templating for DRAM capacitor |
May. 7, 2013 |
8426321 |
Weak-link capacitor |
Apr. 23, 2013 |
8420476 |
Integrated circuit with finFETs and MIM fin capacitor |
Apr. 16, 2013 |
8415249 |
Method of manufacturing semiconductor device |
Apr. 9, 2013 |
8410534 |
Integrated circuit structures with silicon germanium film incorporated as local interconnect and/or contact |
Apr. 2, 2013 |
8354675 |
Enhanced capacitance deep trench capacitor for EDRAM |
Jan. 15, 2013 |
8252641 |
Memory embedded logic semiconductor device having memory region and logic circuit region |
Aug. 28, 2012 |
8247289 |
Capacitor and manufacturing method thereof |
Aug. 21, 2012 |
8203176 |
Dielectric, capacitor using dielectric, semiconductor device using dielectric, and manufacturing method of dielectric |
Jun. 19, 2012 |
8198126 |
Method for producing solid electrolytic capacitor |
Jun. 12, 2012 |
8129772 |
Integrated circuit structures with silicon germanium film incorporated as local interconnect and/or contact |
Mar. 6, 2012 |
8076248 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material |
Dec. 13, 2011 |
8071440 |
Method of fabricating a dynamic random access memory |
Dec. 6, 2011 |
8003971 |
Integrated circuit including memory element doped with dielectric material |
Aug. 23, 2011 |
7999350 |
Electrode structure of memory capacitor |
Aug. 16, 2011 |
7989284 |
DRAM cell transistor device and method |
Aug. 2, 2011 |
7989865 |
Deep trench capacitor for SOI CMOS devices for soft error immunity |
Aug. 2, 2011 |
7960226 |
Method of forming on-chip decoupling capacitor with bottom electrode layer having surface roughness |
Jun. 14, 2011 |
7955945 |
Weak-link capacitor |
Jun. 7, 2011 |
7919802 |
MIM capacitor structure and fabricating method thereof |
Apr. 5, 2011 |
7871884 |
Manufacturing method of dynamic random access memory |
Jan. 18, 2011 |
7846808 |
Method for manufacturing a semiconductor capacitor |
Dec. 7, 2010 |
7829410 |
Methods of forming capacitors, and methods of forming DRAM arrays |
Nov. 9, 2010 |
7825043 |
Method for fabricating capacitor in semiconductor device |
Nov. 2, 2010 |
7799653 |
Method for forming capacitor in dynamic random access memory |
Sep. 21, 2010 |
7799633 |
Semiconductor device and method of manufacturing the same |
Sep. 21, 2010 |
7799580 |
Method for manufacturing ferroelectric memory device |
Sep. 21, 2010 |
7786521 |
Semiconductor device with dielectric structure and method for fabricating the same |
Aug. 31, 2010 |
7781346 |
Methods of forming patterns and capacitors for semiconductor devices using the same |
Aug. 24, 2010 |
7759190 |
Memory device and fabrication method thereof |
Jul. 20, 2010 |
7713881 |
Process sequence for doped silicon fill of deep trenches |
May. 11, 2010 |
7679124 |
Analog capacitor and method of manufacturing the same |
Mar. 16, 2010 |
7666752 |
Deposition method for a transition-metal-containing dielectric |
Feb. 23, 2010 |
7666797 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material |
Feb. 23, 2010 |
7659568 |
Monolithic ceramic capacitor and method for adjusting equivalent series resistance thereof |
Feb. 9, 2010 |
7638391 |
Semiconductor memory device and fabrication method thereof |
Dec. 29, 2009 |
7622307 |
Semiconductor devices having a planarized insulating layer and methods of forming the same |
Nov. 24, 2009 |
7615493 |
Method for forming alignment mark |
Nov. 10, 2009 |
7608517 |
Method for forming capacitor of semiconductor device |
Oct. 27, 2009 |
7585723 |
Method for fabricating capacitor |
Sep. 8, 2009 |
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