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Class Information
Number: 257/E21.643
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components or integrated circuits formed in, or on, common substrate (epo) > With subsequent division of substrate into plural individual devices (epo) > To produce devices each consisting of plurality of components, e.g., integrated circuits (epo) > Substrate being semiconductor, using silicon technology (epo) > Field-effect technology (epo) > Mis technology (epo) > Complementary field-effect transistors, e.g., cmos (epo) > With particular manufacturing method of vertical transistor structures, i.e., with channel vertical to substrate surface (epo)
Description: This subclass is indented under subclass E21.632. This subclass is substantially the same in scope as ECLA classification H01L21/8238V.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8574974 Method of manufacturing a semiconductor device Nov. 5, 2013
8564048 Contact barrier modulation of field effect transistors Oct. 22, 2013
8519475 Semiconductor device Aug. 27, 2013
8395208 Semiconductor device and method of producing the same Mar. 12, 2013
8299525 Power IC device and method for manufacturing same Oct. 30, 2012
8268713 Method of manufacturing nonvolatile memory device Sep. 18, 2012
8212296 Semiconductor device and a method of manufacturing the same, and solid-state image pickup element Jul. 3, 2012
8211758 Semiconductor device and method of producing the same Jul. 3, 2012
8193612 Complimentary nitride transistors vertical and common drain Jun. 5, 2012
8158463 Process and method for manufacturing a MOS device with intercell ion implant using one or more parallel enrichment windows Apr. 17, 2012
8039326 Methods for fabricating bulk FinFET devices having deep trench isolation Oct. 18, 2011
8039346 Insulated gate silicon carbide semiconductor device and method for manufacturing the same Oct. 18, 2011
8039893 CMOS inverter coupling circuit comprising vertical transistors Oct. 18, 2011
7951677 Corner rounding in a replacement gate approach based on a sacrificial fill material applied prior to work function metal deposition May. 31, 2011
7919376 CMOS transistor and method for manufacturing the same Apr. 5, 2011
7910983 MOS transistor having an increased gate-drain capacitance Mar. 22, 2011
7859026 Vertical semiconductor device Dec. 28, 2010
7851293 Method for forming vertical channel transistor of semiconductor device Dec. 14, 2010
7846799 Power semiconductor device and manufacturing method therefor Dec. 7, 2010
7807535 Methods of forming layers comprising epitaxial silicon Oct. 5, 2010
7785960 Vertical channel transistor in semiconductor device and method of fabricating the same Aug. 31, 2010
7781285 Semiconductor device having vertical transistor and method of fabricating the same Aug. 24, 2010
7741182 Method of fabricating a dual gate FET Jun. 22, 2010
7732246 Method for fabricating vertical CMOS image sensor Jun. 8, 2010
7714384 Castellated gate MOSFET device capable of fully-depleted operation May. 11, 2010
7709889 Semiconductor device with improved breakdown properties and manufacturing method thereof May. 4, 2010
7704836 Method of fabricating super trench MOSFET including buried source electrode Apr. 27, 2010
7704331 Technique for the growth of planar semi-polar gallium nitride Apr. 27, 2010
7679186 Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same Mar. 16, 2010
7635622 Method for manufacturing a vertical transistor that includes a super junction structure Dec. 22, 2009
7579281 Transistor assembly and method of its fabrication Aug. 25, 2009
7510955 Method of fabricating multi-fin field effect transistor Mar. 31, 2009
7473946 CMOS structure and method including multiple crystallographic planes Jan. 6, 2009
7432134 Semiconductor device and method of fabricating the same Oct. 7, 2008
7364997 Methods of forming integrated circuitry and methods of forming local interconnects Apr. 29, 2008
7329916 DRAM cell arrangement with vertical MOS transistors Feb. 12, 2008
7288815 Semiconductor device and manufacturing method thereof Oct. 30, 2007
7282402 Method of making a dual strained channel semiconductor device Oct. 16, 2007
7271048 Method for manufacturing trench MOSFET Sep. 18, 2007
7229872 Low voltage power MOSFET device and process for its manufacture Jun. 12, 2007
7045880 Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction May. 16, 2006
7023030 MISFET Apr. 4, 2006
7012301 Trench lateral power MOSFET and a method of manufacturing the same Mar. 14, 2006
6960821 Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction Nov. 1, 2005
6943407 Low leakage heterojunction vertical transistors and high performance devices thereof Sep. 13, 2005
6900495 Layer arrangement, memory cell, memory cell arrangement and method for producing a layer arrangement May. 31, 2005
6894532 Programmable logic arrays with ultra thin body transistors May. 17, 2005
6846709 Vertical gate CMOS with lithography-independent gate length Jan. 25, 2005
6773994 CMOS vertical replacement gate (VRG) transistors Aug. 10, 2004
6753573 Semiconductor device having complementary MOS transistor Jun. 22, 2004

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