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Class Information
Number: 257/E21.628
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components or integrated circuits formed in, or on, common substrate (epo) > With subsequent division of substrate into plural individual devices (epo) > To produce devices each consisting of plurality of components, e.g., integrated circuits (epo) > Substrate being semiconductor, using silicon technology (epo) > Field-effect technology (epo) > Mis technology (epo) > Isolation region manufacturing related aspects, e.g., to avoid interaction of isolation region with adjacent structure (epo)
Description: This subclass is indented under subclass E21.616. This subclass is substantially the same in scope as ECLA classification H01L21/8234U.










Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8691643 Methods of forming semiconductor devices Apr. 8, 2014
8685830 Method of filling shallow trenches Apr. 1, 2014
8624326 FinFET device and method of manufacturing same Jan. 7, 2014
8614127 Method of making a FinFET device Dec. 24, 2013
8575040 Low temperature process for polysilazane oxidation/densification Nov. 5, 2013
8546219 Reducing performance variation of narrow channel devices Oct. 1, 2013
8492845 Gate-to-gate recessed strap and methods of manufacture of same Jul. 23, 2013
8460992 Semiconductor device and method of manufacturing the same Jun. 11, 2013
8258570 Semiconductor device Sep. 4, 2012
8222148 Method of manufacturing a semiconductor device Jul. 17, 2012
8114746 Method for forming double gate and tri-gate transistors on a bulk substrate Feb. 14, 2012
8097531 Methods of manufacturing charge trap type memory devices Jan. 17, 2012
8034691 HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system Oct. 11, 2011
8030731 Isolated rectifier diode Oct. 4, 2011
7981800 Shallow trench isolation structures and methods for forming the same Jul. 19, 2011
7972914 Semiconductor device with FinFET and method of fabricating the same Jul. 5, 2011
7968425 Isolation regions Jun. 28, 2011
7960761 Semiconductor device having a recess channel transistor Jun. 14, 2011
7932143 Methods for protecting gate stacks during fabrication of semiconductor devices and semiconductor devices fabricated from such methods Apr. 26, 2011
7902037 Isolation structure in memory device and method for fabricating the same Mar. 8, 2011
7892929 Shallow trench isolation corner rounding Feb. 22, 2011
7880261 Isolation technique allowing both very high and low voltage circuits to be fabricated on the same chip Feb. 1, 2011
7855116 Nonvolatile semiconductor memory device and manufacturing method thereof Dec. 21, 2010
7842577 Two-step STI formation process Nov. 30, 2010
7816206 Semiconductor device and method for fabricating the same Oct. 19, 2010
7791161 Semiconductor devices employing poly-filled trenches Sep. 7, 2010
7790627 Semiconductor device, method of manufacturing the same, and method of manufacturing metal compound thin film Sep. 7, 2010
7759204 Process for high voltage superjunction termination Jul. 20, 2010
7732889 Capacitor structure in a semiconductor device Jun. 8, 2010
7709925 Semiconductor device May. 4, 2010
7682929 Method and structure for double lining for shallow trench isolation Mar. 23, 2010
7659180 Method of reducing step height difference between doped regions of field oxide in an integrated circuit Feb. 9, 2010
7659170 Method of increasing transistor drive current by recessing an isolation trench Feb. 9, 2010
7629223 Method for manufacturing semiconductor device Dec. 8, 2009
7615461 Method for forming shallow trench isolation of semiconductor device Nov. 10, 2009
7595558 Semiconductor device and method of manufacturing the same Sep. 29, 2009
7592676 Semiconductor device with a transistor having different source and drain lengths Sep. 22, 2009
7566601 Method of making a one transistor SOI non-volatile random access memory cell Jul. 28, 2009
7528076 Method for manufacturing gate oxide layer with different thicknesses May. 5, 2009
7524751 Method for forming contact hole in semiconductor device Apr. 28, 2009
7521302 Semiconductor device and method of manufacturing the same Apr. 21, 2009
7521763 Dual stress STI Apr. 21, 2009
7514312 Method of manufacturing semiconductor device Apr. 7, 2009
7514339 Method for fabricating shallow trench isolation structures using diblock copolymer patterning Apr. 7, 2009
7429496 Buried photodiode for image sensor with shallow trench isolation technology Sep. 30, 2008
7425486 Method for forming a trench capacitor Sep. 16, 2008
7425494 Method for forming void-free trench isolation layer Sep. 16, 2008
7396729 Methods of forming semiconductor devices having a trench with beveled corners Jul. 8, 2008
7388255 Semiconductor device having separation region Jun. 17, 2008
7375004 Method of making an isolation trench and resulting isolation trench May. 20, 2008

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