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Class Information
Number: 257/E21.59
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Interconnections, comprising conductors and dielectrics, for carrying current between separate components within device (epo) > Characterized by formation and post treatment of dielectrics, e.g., planarizing (epo) > Local interconnects; local pads (epo)
Description: This subclass is indented under subclass E21.582. This subclass is substantially the same in scope as ECLA classification H01L21/768C10.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6410384 |
Method of making an electric conductive strip |
Jun. 25, 2002 |
| 6410399 |
Process to lower strap, wordline and bitline contact resistance in trench-based DRAMS by silicidization |
Jun. 25, 2002 |
| 6410422 |
Method of forming a local interconnect contact opening |
Jun. 25, 2002 |
| 6410984 |
Conductive structure in an integrated circuit |
Jun. 25, 2002 |
| 6406963 |
Method of manufacturing a semiconductor device |
Jun. 18, 2002 |
| 6406968 |
Method of forming dynamic random access memory |
Jun. 18, 2002 |
| 6406985 |
Method of fabricating buried contact |
Jun. 18, 2002 |
| 6407455 |
Local interconnect using spacer-masked contact etch |
Jun. 18, 2002 |
| 6407464 |
Semiconductor device |
Jun. 18, 2002 |
| 6403411 |
Method for manufacturing lower electrode of DRAM capacitor |
Jun. 11, 2002 |
| 6403417 |
Method for in-situ fabrication of a landing via and a strip contact in an embedded memory |
Jun. 11, 2002 |
| 6403445 |
Enhanced trench isolation structure |
Jun. 11, 2002 |
| 6403458 |
Method for fabricating local interconnect structure for integrated circuit devices, source structures |
Jun. 11, 2002 |
| 6404020 |
Method of forming contact pads in a semiconductor device and a semiconductor device formed using the method |
Jun. 11, 2002 |
| 6399436 |
Method of making an electric conductive strip |
Jun. 4, 2002 |
| 6399974 |
Semiconductor memory device using an insulator film for the capacitor of the memory cell and method for manufacturing the same |
Jun. 4, 2002 |
| 6396112 |
Method of fabricating buried source to shrink chip size in memory array |
May. 28, 2002 |
| 6391711 |
Method of forming electrical connection between stack capacitor and node location of substrate |
May. 21, 2002 |
| 6391756 |
Semiconductor processing methods of forming contact openings |
May. 21, 2002 |
| 6391760 |
Method of fabricating local interconnect |
May. 21, 2002 |
| 6392264 |
Semiconductor memory device and method of producing the same |
May. 21, 2002 |
| 6387770 |
Thin-film capacitors and methods for forming the same |
May. 14, 2002 |
| 6387803 |
Method for forming a silicide region on a silicon body |
May. 14, 2002 |
| 6388284 |
Capacitor structures |
May. 14, 2002 |
| 6384440 |
Ferroelectric memory including ferroelectric capacitor, one of whose electrodes is connected to metal silicide film |
May. 7, 2002 |
| 6384443 |
Stacked capacitor and method of manufacturing same |
May. 7, 2002 |
| 6379977 |
Method of manufacturing ferroelectric memory device |
Apr. 30, 2002 |
| 6380023 |
Methods of forming contacts, methods of contacting lines, methods of operating integrated circuitry, and integrated circuits |
Apr. 30, 2002 |
| 6380063 |
Raised wall isolation device with spacer isolated contacts and the method of so forming |
Apr. 30, 2002 |
| 6380067 |
Method for creating partially UV transparent anti-reflective coating for semiconductors |
Apr. 30, 2002 |
| 6380596 |
METHOD OF FORMING A LOCAL INTERCONNECT, METHOD OF FABRICATING INTEGRATED CIRCUITRY COMPRISING AN SRAM CELL HAVING A LOCAL INTERCONNECT AND HAVING CIRCUITRY PERIPHERAL TO THE SRAM CELL, AND MET |
Apr. 30, 2002 |
| 6376284 |
Method of fabricating a memory device |
Apr. 23, 2002 |
| 6376344 |
Semiconductor device with fully self-aligned local interconnects, and method for fabricating the device |
Apr. 23, 2002 |
| 6376358 |
Method of forming plugs and local interconnect for embedded memory/system-on-chip (SOC) applications |
Apr. 23, 2002 |
| 6376389 |
Method for eliminating anti-reflective coating in semiconductors |
Apr. 23, 2002 |
| 6372649 |
Method for forming multi-level metal interconnection |
Apr. 16, 2002 |
| 6372667 |
Method of manufacturing a capacitor for semiconductor memory devices |
Apr. 16, 2002 |
| 6369431 |
Method for forming conductors in semiconductor devices |
Apr. 9, 2002 |
| 6369446 |
Multilayered semiconductor device |
Apr. 9, 2002 |
| 6365320 |
Process for forming anti-reflective film for semiconductor fabrication using extremely short wavelength deep ultraviolet photolithography |
Apr. 2, 2002 |
| 6365453 |
Method and structure for reducing contact aspect ratios |
Apr. 2, 2002 |
| 6365489 |
Creation of subresolution features via flow characteristics |
Apr. 2, 2002 |
| 6365509 |
Semiconductor manufacturing method using a dielectric photomask |
Apr. 2, 2002 |
| 6365512 |
Method and apparatus for a direct buried strap for same level contact interconnections for semiconductor devices |
Apr. 2, 2002 |
| 6362798 |
Transistor circuit, display panel and electronic apparatus |
Mar. 26, 2002 |
| 6358755 |
Ferroelectric memory device structure useful for preventing hydrogen line degradation |
Mar. 19, 2002 |
| 6359302 |
DRAM cells and integrated circuitry, and capacitor structures |
Mar. 19, 2002 |
| 6355547 |
Method of forming a self-aligned contact pad for a semiconductor device |
Mar. 12, 2002 |
| 6355549 |
Method of forming polycide structures |
Mar. 12, 2002 |
| 6352890 |
Method of forming a memory cell with self-aligned contacts |
Mar. 5, 2002 |
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