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Class Information
Number: 257/E21.585
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Interconnections, comprising conductors and dielectrics, for carrying current between separate components within device (epo) > Characterized by formation and post treatment of dielectrics, e.g., planarizing (epo) > Filling of holes, grooves, vias or trenches with conductive material (epo)
Description: This subclass is indented under subclass E21.582. This subclass is substantially the same in scope as ECLA classification H01L21/768C4.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.587 By deposition over sacrificial masking layer, e.g., lift-off (epo) 162
257/E21.586 By selective deposition of conductive material in vias, e.g., selective chemical vapor deposition on semiconductor material, plating (epo) 641
257/E21.588 Reflowing or applying pressure to fill contact hole, e.g., to remove voids (epo) 236

Patents under this class:

Patent Number Title Of Patent Date Issued
7842593 Semiconductor device and method for fabricating the same Nov. 30, 2010
7842571 Method for forming semiconductor device Nov. 30, 2010
7834459 Semiconductor device and semiconductor device manufacturing method Nov. 16, 2010
7829355 Method for inspecting semiconductor device Nov. 9, 2010
7824981 Method and apparatus for semiconductor device and semiconductor memory device Nov. 2, 2010
7820536 Method for removing a passivation layer prior to depositing a barrier layer in a copper metallization layer Oct. 26, 2010
7820535 Method for analyzing copper electroplating solution, apparatus for the analysis, and method for fabricating semiconductor product Oct. 26, 2010
7816267 Method for forming inlaid interconnect Oct. 19, 2010
7816259 Method of forming a contact in a semiconductor device Oct. 19, 2010
7816221 Dielectric ledge for high frequency devices Oct. 19, 2010
7816153 Method and apparatus for producing a dislocation-free crystalline sheet Oct. 19, 2010
7815786 Copper electrodeposition in microelectronics Oct. 19, 2010
7807570 Local metallization and use thereof in semiconductor devices Oct. 5, 2010
7807568 Methods for reducing damage to substrate layers in deposition processes Oct. 5, 2010
7807513 Method for manufacturing semiconductor device Oct. 5, 2010
7795648 Semiconductor device comprising capacitor and method of fabricating the same Sep. 14, 2010
7795137 Manufacturing method of semiconductor device Sep. 14, 2010
7795073 Method for manufacturing stack package using through-electrodes Sep. 14, 2010
7790607 Method for reducing dielectric overetch using a dielectric etch stop at a planar surface Sep. 7, 2010
7790600 Synthesis of zeolite crystals and formation of carbon nanostructures in patterned structures Sep. 7, 2010
7790590 Selective W-CVD method and method for forming multi-layered Cu electrical interconnection Sep. 7, 2010
7786015 Method for fabricating self-aligned complementary pillar structures and wiring Aug. 31, 2010
7786006 Interconnect structures with a metal nitride diffusion barrier containing ruthenium and method of forming Aug. 31, 2010
7785964 Non-volatile semiconductor memory device and method of manufacturing the same Aug. 31, 2010
RE41538 Method for making integrated circuit including interconnects with enhanced electromigration resistance using doped seed layer and integrated circuits produced thereby Aug. 17, 2010
7777323 Semiconductor structure and method for forming the same Aug. 17, 2010
7776738 Method for fabricating a storage electrode of a semiconductor device Aug. 17, 2010
7776730 Siloxane polymer composition, method of forming a pattern using the same, and method of manufacturing a semiconductor using the same Aug. 17, 2010
7776663 Semiconductor display devices Aug. 17, 2010
7772123 Through substrate via semiconductor components Aug. 10, 2010
7772119 Dual liner capping layer interconnect structure Aug. 10, 2010
7772108 Interconnection structures for semiconductor devices and methods of forming the same Aug. 10, 2010
7767586 Methods for forming connective elements on integrated circuits for packaging applications Aug. 3, 2010
7763508 Methods for protecting gate stacks during fabrication of semiconductor devices and semiconductor devices fabricated from such methods Jul. 27, 2010
7763499 CMOS front end process compatible low stress light shield Jul. 27, 2010
7754601 Semiconductor interconnect air gap formation process Jul. 13, 2010
7749899 Microelectronic workpieces and methods and systems for forming interconnects in microelectronic workpieces Jul. 6, 2010
7749894 Integrated circuit processing system Jul. 6, 2010
7749783 Method of forming a display panel Jul. 6, 2010
7745934 Integrated circuit and seed layers Jun. 29, 2010
7745333 Methods for depositing tungsten layers employing atomic layer deposition techniques Jun. 29, 2010
7745326 Semiconductor device having multiple wiring layers and method of producing the same Jun. 29, 2010
7745325 Wiring structure of a semiconductor device, method of forming the wiring structure, non-volatile memory device including the wiring structure, and method of manufacturing the non-volatile memo Jun. 29, 2010
7741228 Method for fabricating semiconductor device Jun. 22, 2010
7741218 Conductive via formation utilizing electroplating Jun. 22, 2010
7741214 Method of forming a semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thicknesses formed thereon Jun. 22, 2010
7741213 Semiconductor device, DRAM integrated circuit device, and method of producing the same Jun. 22, 2010
7741210 Methods of forming a conductive interconnect in a pixel of an imager and in other integrated circuitry Jun. 22, 2010
7741177 Method and apparatus transporting charges in semiconductor device and semiconductor memory device Jun. 22, 2010
7736943 Carbon nanotube transistor fabrication Jun. 15, 2010

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