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Class Information
Number: 257/E21.582
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Interconnections, comprising conductors and dielectrics, for carrying current between separate components within device (epo) > Characterized by formation and post treatment of dielectrics, e.g., planarizing (epo) > Characterized by formation and post treatment of conductors, e.g., patterning (epo)
Description: This subclass is indented under subclass E21.575. This subclass is substantially the same in scope as ECLA classification H01L21/768C.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615480 |
Methods of post-contact back end of the line through-hole via integration |
Nov. 10, 2009 |
| 7615440 |
Capacitor and method of manufacturing a capacitor |
Nov. 10, 2009 |
| 7605091 |
Etchant for conductive materials and method of manufacturing a thin film transistor array panel using the same |
Oct. 20, 2009 |
| 7595269 |
Semiconductor device comprising a copper alloy as a barrier layer in a copper metallization layer |
Sep. 29, 2009 |
| 7595217 |
Method of manufacturing a CMOS image sensor |
Sep. 29, 2009 |
| 7592258 |
Metallization layer of a semiconductor device having differently thick metal lines and a method of forming the same |
Sep. 22, 2009 |
| 7589014 |
Semiconductor device having multiple wiring layers and method of producing the same |
Sep. 15, 2009 |
| 7585784 |
System and method for reducing etch sequencing induced downstream dielectric defects in high volume semiconducting manufacturing |
Sep. 8, 2009 |
| 7585782 |
Methods of forming semiconductor constructions, and methods of selectively removing metal-containing materials relative to oxide |
Sep. 8, 2009 |
| 7585770 |
Method of growing carbon nanotubes and method of manufacturing field emission device having the same |
Sep. 8, 2009 |
| 7576002 |
Multi-step barrier deposition method |
Aug. 18, 2009 |
| 7575998 |
Semiconductor device and metal line fabrication method of the same |
Aug. 18, 2009 |
| 7572651 |
Inkjet-fabricated integrated circuits |
Aug. 11, 2009 |
| 7569467 |
Semiconductor device and manufacturing method thereof |
Aug. 4, 2009 |
| 7566652 |
Electrically inactive via for electromigration reliability improvement |
Jul. 28, 2009 |
| 7553754 |
Electronic device, method of manufacture of the same, and sputtering target |
Jun. 30, 2009 |
| 7550381 |
Contact clean by remote plasma and repair of silicide surface |
Jun. 23, 2009 |
| 7547640 |
Method for integrated circuit fabrication using pitch multiplication |
Jun. 16, 2009 |
| 7538039 |
Method for manufacturing a wiring over a substrate |
May. 26, 2009 |
| 7528493 |
Interconnect structure and method of fabrication of same |
May. 5, 2009 |
| 7524764 |
Method of forming film pattern, device, method of manufacturing the same, electro-optical apparatus, and electronic apparatus |
Apr. 28, 2009 |
| 7521366 |
Manufacturing method of electro line for liquid crystal display device |
Apr. 21, 2009 |
| 7511998 |
Non-volatile memory device and method of fabricating the same |
Mar. 31, 2009 |
| 7501156 |
Pattern formation substrate and method for pattern formation |
Mar. 10, 2009 |
| 7494923 |
Manufacturing method of wiring substrate and semiconductor device |
Feb. 24, 2009 |
| 7494867 |
Semiconductor device having MIM capacitive elements and manufacturing method for the same |
Feb. 24, 2009 |
| 7485577 |
Method of forming metal line stacking structure in semiconductor device |
Feb. 3, 2009 |
| 7462560 |
Process of physical vapor depositing mirror layer with improved reflectivity |
Dec. 9, 2008 |
| 7462514 |
Semiconductor device and method for manufacturing the same, liquid crystal television, and EL television |
Dec. 9, 2008 |
| 7456910 |
Liquid crystal display device and fabricating method thereof |
Nov. 25, 2008 |
| 7442567 |
Method for fabricating transflective liquid crystal display |
Oct. 28, 2008 |
| 7429530 |
Method of forming a pattern, method of forming wiring, semiconductor device, TFT device, electro-optic device, and electronic instrument |
Sep. 30, 2008 |
| 7427561 |
Method for manufacturing semiconductor device |
Sep. 23, 2008 |
| 7413985 |
Method for forming a self-aligned nitrogen-containing copper silicide capping layer in a microstructure device |
Aug. 19, 2008 |
| 7413981 |
Pitch doubled circuit layout |
Aug. 19, 2008 |
| 7405111 |
Methods for manufacturing an active matrix display device |
Jul. 29, 2008 |
| 7399359 |
Method and system for providing a thin film with a controlled crystal orientation using pulsed laser induced melting and nucleation-initiated crystallization |
Jul. 15, 2008 |
| 7396774 |
Methods for forming an enriched metal oxide surface |
Jul. 8, 2008 |
| 7396765 |
Method of fabricating a liquid crystal display device |
Jul. 8, 2008 |
| 7387971 |
Fabricating method for flat panel display device |
Jun. 17, 2008 |
| 7361586 |
Preamorphization to minimize void formation |
Apr. 22, 2008 |
| 7358169 |
Laser-assisted deposition |
Apr. 15, 2008 |
| 7344979 |
High pressure treatment for improved grain growth and void reduction |
Mar. 18, 2008 |
| 7341947 |
Methods of forming metal-containing films over surfaces of semiconductor substrates |
Mar. 11, 2008 |
| 7316934 |
Personalized hardware |
Jan. 8, 2008 |
| 7307022 |
Method of treating conductive layer for use in a circuitized substrate and method of making said substrate having said conductive layer as part thereof |
Dec. 11, 2007 |
| 7300833 |
Process for producing semiconductor integrated circuit device |
Nov. 27, 2007 |
| 7274078 |
Devices having vertically-disposed nanofabric articles and methods of making the same |
Sep. 25, 2007 |
| 7262500 |
Interconnection structure |
Aug. 28, 2007 |
| 7259083 |
Local interconnect manufacturing process |
Aug. 21, 2007 |
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