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Class Information
Number: 257/E21.573
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Making of isolation regions between components (epo) > Air gaps (epo)
Description: This subclass is indented under subclass E21.54. This subclass is substantially the same in scope as ECLA classification H01L21/764.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
5315147 Monolithic focal plane array May. 24, 1994
5298449 Semiconductor substrate having a silicon-on-insulator structure and method of fabricating the same Mar. 29, 1994
5294559 Method of forming a vertical transistor Mar. 15, 1994
5281847 Groove structure for isolating elements comprising a GTO structure Jan. 25, 1994
5266511 Process for manufacturing three dimensional IC's Nov. 30, 1993
5258323 Single crystal silicon on quartz Nov. 2, 1993
5242863 Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same Sep. 7, 1993
5236871 Method for producing a hybridization of detector array and integrated circuit for readout Aug. 17, 1993
5232866 Isolated films using an air dielectric Aug. 3, 1993
5227658 Buried air dielectric isolation of silicon islands Jul. 13, 1993
5206182 Trench isolation process Apr. 27, 1993
5104818 Preimplanted N-channel SOI mesa Apr. 14, 1992
5100810 Manufacturing method of semiconductor devices Mar. 31, 1992
5098856 Air-filled isolation trench with chemically vapor deposited silicon dioxide cap Mar. 24, 1992
5082793 Method for making solid state device utilizing ion implantation techniques Jan. 21, 1992
5057450 Method for fabricating silicon-on-insulator structures Oct. 15, 1991
5049513 Bi CMOS/SOI process flow Sep. 17, 1991
5026662 Method for fabricating a semiconductor stripe laser Jun. 25, 1991
4946800 Method for making solid-state device utilizing isolation grooves Aug. 7, 1990
4916513 Dielectrically isolated integrated circuit structure Apr. 10, 1990
4907057 Semiconductor device Mar. 6, 1990
4901126 Radiation detector Feb. 13, 1990
4892842 Method of treating an integrated circuit Jan. 9, 1990
4885261 Method for isolating a semiconductor element Dec. 5, 1989
4819037 Semiconductor device Apr. 4, 1989
4751561 Dielectrically isolated PMOS, NMOS, PNP and NPN transistors on a silicon wafer Jun. 14, 1988
4735679 Method of improving silicon-on-insulator uniformity Apr. 5, 1988
4710794 Composite semiconductor device Dec. 1, 1987
4694321 Semiconductor device having bipolar transistor and integrated injection logic Sep. 15, 1987
4692993 Schottky barrier charge coupled device (CCD) manufacture Sep. 15, 1987
4692996 Method of fabricating semiconductor devices in dielectrically isolated silicon islands Sep. 15, 1987
4690714 Method of making active solid state devices Sep. 1, 1987
4685199 Method for forming dielectrically isolated PMOS, NMOS, PNP and NPN transistors on a silicon wafer Aug. 11, 1987
4667058 Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby May. 19, 1987
4577208 Bidirectional power FET with integral avalanche protection Mar. 18, 1986
4541006 Static memory having load polysilicon resistors formed over driver FET drains Sep. 10, 1985
4530001 High voltage integrated semiconductor devices using a thermoplastic resin layer Jul. 16, 1985
4522682 Method for producing PNP type lateral transistor separated from substrate by O.D.E. for minimal interference therefrom Jun. 11, 1985
4467344 Bidirectional switch using two gated diode switches in a single dielectrically isolated tub Aug. 21, 1984
4453175 MOS Static RAM layout with polysilicon resistors over FET gates Jun. 5, 1984
4418470 Method for fabricating silicon-on-sapphire monolithic microwave integrated circuits Dec. 6, 1983
4404658 Mesa bipolar memory cell and method of fabrication Sep. 13, 1983
4384299 Capacitor memory and methods for reading, writing, and fabricating capacitor memories May. 17, 1983
4371406 Solid-state device Feb. 1, 1983
4353082 Buried sense line V-groove MOS random access memory Oct. 5, 1982
4346291 Thermally isolated monolithic semiconductor die Aug. 24, 1982
4317690 Self-aligned double polysilicon MOS fabrication Mar. 2, 1982
4317686 Method of manufacturing field-effect transistors by forming double insulative buried layers by ion-implantation Mar. 2, 1982
4297717 Semiconductor device Oct. 27, 1981
4296428 Merged field effect transistor circuit and fabrication process Oct. 20, 1981

1 2 3 4 5 6 7

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