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Class Information
Number: 257/E21.573
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Making of isolation regions between components (epo) > Air gaps (epo)
Description: This subclass is indented under subclass E21.54. This subclass is substantially the same in scope as ECLA classification H01L21/764.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8680602 Semiconductor device and method of manufacturing the same Mar. 25, 2014
8674473 Semiconductor cell and method for forming the same Mar. 18, 2014
8664743 Air-gap formation in interconnect structures Mar. 4, 2014
8659115 Airgap-containing interconnect structure with improved patternable low-K material and method of fabricating Feb. 25, 2014
8629035 Method of manufacturing semiconductor device Jan. 14, 2014
8629561 Air gap-containing interconnect structure having photo-patternable low k material Jan. 14, 2014
8618670 Corrosion control of stacked integrated circuits Dec. 31, 2013
8609508 Method of fabricating an integrated circuit having a strain inducing hollow trench isolation region Dec. 17, 2013
8610238 Crack stop trenches Dec. 17, 2013
8609507 Semiconductor device and method of manufacturing the same Dec. 17, 2013
8603890 Air gap isolation in non-volatile memory Dec. 10, 2013
8592941 Fuse structure having crack stop void, method for forming and programming same, and design structure Nov. 26, 2013
8587095 Method for establishing and closing a trench of a semiconductor component Nov. 19, 2013
8518794 Semiconductor devices and methods of forming thereof Aug. 27, 2013
8476118 Semiconductor device and fabrication mehtod of the semiconductor device Jul. 2, 2013
8441106 Apparatus and method for defining laser cleave alignment May. 14, 2013
8420524 Void boundary structures, semiconductor devices having the void boundary structures and methods of forming the same Apr. 16, 2013
8421166 Semiconductor device and fabrication thereof Apr. 16, 2013
8415257 Enhanced adhesion of PECVD carbon on dielectric materials by providing an adhesion interface Apr. 9, 2013
8399349 Materials and methods of forming controlled void Mar. 19, 2013
8362578 Triple-axis MEMS accelerometer Jan. 29, 2013
8344474 Microstructure device including a metallization structure with self-aligned air gaps and refilled air gap exclusion zones Jan. 1, 2013
8334188 Process for manufacturing a wafer by annealing of buried channels Dec. 18, 2012
8247902 Semiconductor device and manufacturing method of the same Aug. 21, 2012
8241990 Air gap fabricating method Aug. 14, 2012
8173513 Method for manufacturing a semiconductor pressure sensor May. 8, 2012
8163586 Method of producing a suspended membrane device Apr. 24, 2012
8148235 Methods of manufacturing semiconductor devices Apr. 3, 2012
8133794 Semiconductor structure and method of manufacture Mar. 13, 2012
8101448 Manufacturing method of a gas sensor integrated on a semiconductor substrate Jan. 24, 2012
8097949 Control of localized air gap formation in an interconnect stack Jan. 17, 2012
8048760 Semiconductor structure and method of manufacture Nov. 1, 2011
8026150 Semiconductor device manufacturing method and storage medium Sep. 27, 2011
8022501 Semiconductor device and method for isolating the same Sep. 20, 2011
8013364 Semiconductor devices and structures thereof Sep. 6, 2011
7985654 Planarization stop layer in phase change memory integration Jul. 26, 2011
7977239 Semiconductor device and method for fabricating the same Jul. 12, 2011
7972886 Method of manufacturing micro electro mechanical systems device Jul. 5, 2011
7947566 Method and apparatus for making coplanar isolated regions of different semiconductor materials on a substrate May. 24, 2011
7910473 Through-silicon via with air gap Mar. 22, 2011
7879683 Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay Feb. 1, 2011
7871894 Process for manufacturing thick suspended structures of semiconductor material Jan. 18, 2011
7867890 Manufacturing method of semiconductor device and semiconductor device Jan. 11, 2011
7867870 Semiconductor device and method for forming device isolation film of semiconductor device Jan. 11, 2011
7863072 Micromechanical diaphragm sensor having a double diaphragm Jan. 4, 2011
7863150 Method to generate airgaps with a template first scheme and a self aligned blockout mask Jan. 4, 2011
7855123 Method of integrating an air gap structure with a substrate Dec. 21, 2010
7843073 Semiconductor device and method for fabricating the same Nov. 30, 2010
7833890 Semiconductor device having a pair of fins and method of manufacturing the same Nov. 16, 2010
7825019 Structures and methods for reduction of parasitic capacitances in semiconductor integrated circuits Nov. 2, 2010

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