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Class Information
Number: 257/E21.564
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Making of isolation regions between components (epo) > Dielectric regions, e.g., epic dielectric isolation, locos; trench refilling techniques, soi technology, use of channel stoppers (epo) > Using semiconductor or insulator technology, i.e., soi technology (epo) > Soi together with lateral isolation, e.g., using local oxidation of silicon, or dielectric or polycrystalline material refilled trench or air gap isolation regions, e.g., completely isolated semiconductor islands (epo)
Description: This subclass is indented under subclass E21.561. This subclass is substantially the same in scope as ECLA classification H01L21/762D20.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8674471 Semiconductor device supplying charging current to element to be charged Mar. 18, 2014
8674472 Low harmonic RF switch in SOI Mar. 18, 2014
8664078 Manufacturing method of semiconductor device on cavities Mar. 4, 2014
8653596 Integrated circuit including DRAM and SRAM/logic Feb. 18, 2014
8643109 Isolation region fabrication for replacement gate processing Feb. 4, 2014
8642405 Process for production of SOI substrate and process for production of semiconductor device Feb. 4, 2014
8629501 Stress-generating structure for semiconductor-on-insulator devices Jan. 14, 2014
8623758 Subtractive metal multi-layer barrier layer for interconnect structure Jan. 7, 2014
8609508 Method of fabricating an integrated circuit having a strain inducing hollow trench isolation region Dec. 17, 2013
8575699 Thin box metal backgate extremely thin SOI device Nov. 5, 2013
8574972 Method for fabricating semiconductor device and plasma doping apparatus Nov. 5, 2013
8551860 Semiconductor devices having through electrodes and methods of fabricating the same Oct. 8, 2013
8546910 Semiconductor structure and method for manufacturing the same Oct. 1, 2013
8536018 Maskless inter-well deep trench isolation structure and methods of manufacture Sep. 17, 2013
8409974 Strained-silicon-on-insulator single-and double-gate MOSFET and method for forming the same Apr. 2, 2013
8399349 Materials and methods of forming controlled void Mar. 19, 2013
8395217 Isolation in CMOSFET devices utilizing buried air bags Mar. 12, 2013
8395231 Semiconductor device supplying charging current to element to be charged Mar. 12, 2013
8389412 Finishing method for a silicon on insulator substrate Mar. 5, 2013
8362564 Isolated epitaxial modulation device Jan. 29, 2013
8357975 Semiconductor-on-insulator with back side connection Jan. 22, 2013
8338909 Two-Step STI formation process Dec. 25, 2012
8293616 Methods of fabrication of semiconductor devices with low capacitance Oct. 23, 2012
8288185 Semiconductor devices and methods of forming the same Oct. 16, 2012
8269306 Isolation regions Sep. 18, 2012
8236638 Shallow trench isolation for SOI structures combining sidewall spacer and bottom liner Aug. 7, 2012
8232597 Semiconductor-on-insulator with back side connection Jul. 31, 2012
8173513 Method for manufacturing a semiconductor pressure sensor May. 8, 2012
8148235 Methods of manufacturing semiconductor devices Apr. 3, 2012
8138063 Manufacturing method of a semiconductor device including a single crystal semiconductor film, and a semiconductor film including impurity Mar. 20, 2012
8129252 Semiconductor devices with sealed, unlined trenches and methods of forming same Mar. 6, 2012
8115254 Semiconductor-on-insulator structures including a trench containing an insulator stressor plug and method of fabricating same Feb. 14, 2012
8097519 SOI device having a substrate diode formed by reduced implantation energy Jan. 17, 2012
8097949 Control of localized air gap formation in an interconnect stack Jan. 17, 2012
8071454 Method for manufacturing dielectric isolation type semiconductor device Dec. 6, 2011
8058689 Techniques to reduce substrate cross talk on mixed signal and RF circuit design Nov. 15, 2011
8043973 Mask overhang reduction or elimination after substrate etch Oct. 25, 2011
8030731 Isolated rectifier diode Oct. 4, 2011
8021992 High aspect ratio gap fill application using high density plasma chemical vapor deposition Sep. 20, 2011
8013364 Semiconductor devices and structures thereof Sep. 6, 2011
7998829 Semiconductor structure and method of manufacture Aug. 16, 2011
7993990 Multiple crystallographic orientation semiconductor structures Aug. 9, 2011
7955909 Strained ultra-thin SOI transistor formed by replacement gate Jun. 7, 2011
7947566 Method and apparatus for making coplanar isolated regions of different semiconductor materials on a substrate May. 24, 2011
7947569 Method for producing a semiconductor including a foreign material layer May. 24, 2011
7944018 Semiconductor devices with sealed, unlined trenches and methods of forming same May. 17, 2011
7943414 Method for manufacturing SOI substrate May. 17, 2011
7923786 Selective silicon-on-insulator isolation structure and method Apr. 12, 2011
7919829 Liner for shallow trench isolation Apr. 5, 2011
7910423 Semiconductor device and method of manufacturing the same Mar. 22, 2011

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