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Class Information
Number: 257/E21.563
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Making of isolation regions between components (epo) > Dielectric regions, e.g., epic dielectric isolation, locos; trench refilling techniques, soi technology, use of channel stoppers (epo) > Using semiconductor or insulator technology, i.e., soi technology (epo) > Using silicon implanted buried insulating layers, e.g., oxide layers, i.e., simox technique (epo)
Description: This subclass is indented under subclass E21.561. This subclass is substantially the same in scope as ECLA classification H01L21/762D2.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8563396 3D integration method using SOI substrates and structures produced thereby Oct. 22, 2013
8486776 Strained devices, methods of manufacture and design structures Jul. 16, 2013
8330222 Epitaxial wafer and production method thereof Dec. 11, 2012
8222124 Method for manufacturing SIMOX wafer and SIMOX wafer Jul. 17, 2012
8193068 Method of manufacturing SOI substrate Jun. 5, 2012
8183635 Semiconductor device May. 22, 2012
8173553 Epitaxial wafer and production method thereof May. 8, 2012
8138063 Manufacturing method of a semiconductor device including a single crystal semiconductor film, and a semiconductor film including impurity Mar. 20, 2012
8043929 Semiconductor substrate and method for production thereof Oct. 25, 2011
8034694 SOI substrate, method for manufacturing the same, and semiconductor device Oct. 11, 2011
8021991 Technique to radiation-harden trench refill oxides Sep. 20, 2011
7977167 Method of producing a field effect transistor arrangement Jul. 12, 2011
7943414 Method for manufacturing SOI substrate May. 17, 2011
7943482 Method for semiconductor device having radiation hardened insulators and design structure thereof May. 17, 2011
7935609 Method for fabricating semiconductor device having radiation hardened insulators May. 3, 2011
RE42241 Method of fabricating a semiconductor device Mar. 22, 2011
7897444 Strained semiconductor-on-insulator (sSOI) by a simox method Mar. 1, 2011
7897476 Method of manufacturing SOI substrate Mar. 1, 2011
RE42139 Method of fabricating a semiconductor device Feb. 15, 2011
7884000 Method for manufacturing simox wafer Feb. 8, 2011
RE42097 Method of fabricating a semiconductor device Feb. 1, 2011
7820524 Manufacturing method of SOI substrate and manufacturing method of semiconductor device Oct. 26, 2010
7811878 Method of manufacturing SOI substrate Oct. 12, 2010
7781302 Methods of fabricating semiconductor devices having isolation regions formed from annealed oxygen ion implanted regions Aug. 24, 2010
7745306 Method for producing bonded wafer Jun. 29, 2010
7727874 Non-polar and semi-polar GaN substrates, devices, and methods for making them Jun. 1, 2010
7727867 Method for manufacturing SIMOX wafer Jun. 1, 2010
7691734 Deep trench based far subcollector reachthrough Apr. 6, 2010
7666721 SOI substrates and SOI devices, and methods for forming the same Feb. 23, 2010
7659599 Patterned silicon-on-insulator layers and methods for forming the same Feb. 9, 2010
7642598 Method of fabricating a semiconductor device Jan. 5, 2010
7642112 Method of manufacturing bonded substrate stack Jan. 5, 2010
7632735 Process for manufacturing silicon-on-insulator substrate Dec. 15, 2009
7608506 Body-contacted semiconductor structures and methods of fabricating such body-contacted semiconductor structures Oct. 27, 2009
7566629 Patterned silicon-on-insulator layers and methods for forming the same Jul. 28, 2009
7550371 Method of producing SIMOX wafer Jun. 23, 2009
7537989 Method for manufacturing SOI substrate May. 26, 2009
7528463 Semiconductor on insulator structure May. 5, 2009
7524744 Method of producing SOI wafer and SOI wafer Apr. 28, 2009
7514343 Method for manufacturing SIMOX wafer and SIMOX wafer Apr. 7, 2009
7494901 Methods of forming semiconductor-on-insulator constructions Feb. 24, 2009
7485539 Strained semiconductor-on-insulator (sSOI) by a simox method Feb. 3, 2009
7476576 Method of fabricating a semiconductor device Jan. 13, 2009
7473971 Method of fabricating a semiconductor device Jan. 6, 2009
7473592 Method of fabricating a semiconductor device Jan. 6, 2009
7410877 Method for manufacturing SIMOX wafer and SIMOX wafer Aug. 12, 2008
7358161 Methods of forming transistor devices associated with semiconductor-on-insulator constructions Apr. 15, 2008
7352034 Semiconductor structures integrating damascene-body FinFET's and planar devices on a common substrate and methods for forming such semiconductor structures Apr. 1, 2008
7344957 SOI wafer with cooling channels and a method of manufacture thereof Mar. 18, 2008
7329589 Method for manufacturing silicon-on-insulator wafer Feb. 12, 2008

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