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Class Information
Number: 257/E21.551
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Making of isolation regions between components (epo) > Dielectric regions, e.g., epic dielectric isolation, locos; trench refilling techniques, soi technology, use of channel stoppers (epo) > Using trench refilling with dielectric materials (epo) > Introducing impurities in trench side or bottom walls, e.g., for forming channel stoppers or alter isolation behavior (epo)
Description: This subclass is indented under subclass E21.546. This subclass is substantially the same in scope as ECLA classification H01L21/762C8.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8680610 Trench MOSFET having floating dummy cells for avalanche improvement Mar. 25, 2014
8580651 Methods for manufacturing a trench type semiconductor device having a thermally sensitive refill material Nov. 12, 2013
8546234 Semiconductor process Oct. 1, 2013
8513087 Processes for forming isolation structures for integrated circuit devices Aug. 20, 2013
8501583 Method for connecting between substrates, flip-chip mounting structure, and connection structure between substrates Aug. 6, 2013
8486802 Method of manufacturing semiconductor device having shared bit line structure Jul. 16, 2013
8481404 Leakage control in field effect transistors based on an implantation species introduced locally at the STI edge Jul. 9, 2013
8440536 Mask layout and method for forming vertical channel transistor in semiconductor device using the same May. 14, 2013
8440495 Method for reducing crosstalk in image sensors using implant technology May. 14, 2013
8440540 Method for doping a selected portion of a device May. 14, 2013
8431465 Semiconductor device and method for fabricating the same Apr. 30, 2013
8294232 High quantum efficiency optical detectors Oct. 23, 2012
8258028 Deep trench isolation structures and methods of formation thereof Sep. 4, 2012
8242573 Semiconductor device with isolation formed between digital circuit and analog circuit Aug. 14, 2012
8236646 Non-volatile memory manufacturing method using STI trench implantation Aug. 7, 2012
8216913 Strain modulation in active areas by controlled incorporation of nitrogen at si-SiO2 interface Jul. 10, 2012
8216896 Method of forming STI regions in electronic devices Jul. 10, 2012
8173517 Method for forming a self-aligned isolation structure utilizing sidewall spacers as an etch mask and remaining as a portion of the isolation structure May. 8, 2012
8133805 Methods for forming dense dielectric layer over porous dielectrics Mar. 13, 2012
8129778 Semiconductor devices and methods for making the same Mar. 6, 2012
8071462 Isolation structures for integrated circuits and modular methods of forming the same Dec. 6, 2011
8058685 Trench MOSFET structures using three masks process Nov. 15, 2011
8053272 Semiconductor device fabrication method Nov. 8, 2011
8013381 Semiconductor device Sep. 6, 2011
8004035 Dual stress liner device and method Aug. 23, 2011
7998823 Method for reducing leakage currents caused by misalignment of a contact structure by increasing an error tolerance of the contact patterning process Aug. 16, 2011
7994061 Mask layout and method for forming vertical channel transistor in semiconductor device using the same Aug. 9, 2011
7968424 Method of implantation Jun. 28, 2011
7897479 Managing integrated circuit stress using dummy diffusion regions Mar. 1, 2011
7892939 Threshold voltage consistency and effective width in same-substrate device groups Feb. 22, 2011
7892944 Method of forming transistor in semiconductor device Feb. 22, 2011
7858491 Method of fabricating semiconductor device Dec. 28, 2010
7816229 Semiconductor device with channel stop trench and method Oct. 19, 2010
7816720 Trench MOSFET structure having improved avalanche capability using three masks process Oct. 19, 2010
7807501 Integrated circuit package and apparatus and method of producing an integrated circuit package Oct. 5, 2010
7808029 Mask structure for manufacture of trench type semiconductor device Oct. 5, 2010
7790564 Methods for fabricating active devices on a semiconductor-on-insulator substrate utilizing multiple depth shallow trench isolations Sep. 7, 2010
7785929 Mountable integrated circuit package system with exposed external interconnects Aug. 31, 2010
7749860 Method for forming a self-aligned T-shaped isolation trench Jul. 6, 2010
7745902 System and method for providing improved trench isolation of semiconductor devices Jun. 29, 2010
7670926 Method for forming shallow trench isolation utilizing two filling oxide layers Mar. 2, 2010
7666755 Method of forming device isolation film of semiconductor device Feb. 23, 2010
7651933 Method of fabricating semiconductor device Jan. 26, 2010
7645676 Semiconductor structures for latch-up suppression and methods of forming such semiconductor structures Jan. 12, 2010
7638347 Image sensor and method for fabricating the same Dec. 29, 2009
7601607 Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects Oct. 13, 2009
7592676 Semiconductor device with a transistor having different source and drain lengths Sep. 22, 2009
7557415 Trench isolation type semiconductor device and related method of manufacture Jul. 7, 2009
7521278 Isolation method for low dark current imager Apr. 21, 2009
7514317 Strained semiconductor device and method of making same Apr. 7, 2009

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