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Class Information
Number: 257/E21.548
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of devices consisting of plurality of solid-state components formed in or on common substrate or of parts thereof; manufacture of integrated circuit devices or of parts thereof (epo) > Manufacture of specific parts of devices (epo) > Making of isolation regions between components (epo) > Dielectric regions, e.g., epic dielectric isolation, locos; trench refilling techniques, soi technology, use of channel stoppers (epo) > Using trench refilling with dielectric materials (epo) > Concurrent filling of plurality of trenches having different trench shape or dimension, e.g., rectangular and v-shaped trenches, wide and narrow trenches, shallow and deep trenches (epo)
Description: This subclass is indented under subclass E21.546. This subclass is substantially the same in scope as ECLA classification H01L21/762C4.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8710479 Semiconductor devices having multi-width isolation layer structures Apr. 29, 2014
8703577 Method for fabrication deep trench isolation structure Apr. 22, 2014
8703604 Creation of vias and trenches with different depths Apr. 22, 2014
8691661 Trench with reduced silicon loss Apr. 8, 2014
8686468 Semiconductor power device having wide termination trench and self-aligned source regions for mask saving Apr. 1, 2014
8685831 Trenches with reduced silicon loss Apr. 1, 2014
8679941 Method to improve wet etch budget in FEOL integration Mar. 25, 2014
8680610 Trench MOSFET having floating dummy cells for avalanche improvement Mar. 25, 2014
8673737 Array and moat isolation structures and method of manufacture Mar. 18, 2014
8652933 Semiconductor structure having wide and narrow deep trenches with different materials Feb. 18, 2014
8647945 Method of forming substrate contact for semiconductor on insulator (SOI) substrate Feb. 11, 2014
RE44637 Method of fabricating an imaging device for collecting photons Dec. 10, 2013
8586429 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming Nov. 19, 2013
8580650 Lateral superjunction extended drain MOS transistor Nov. 12, 2013
8575035 Methods of forming varying depth trenches in semiconductor devices Nov. 5, 2013
8569144 Method of manufacturing semiconductor integrated circuit device Oct. 29, 2013
8552524 Semiconductor component with trench insulation and corresponding production method Oct. 8, 2013
8524569 Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer Sep. 3, 2013
8519484 Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same Aug. 27, 2013
8497206 Method of processing backside copper layer for semiconductor chips Jul. 30, 2013
8497176 Semiconductor device with STI and method for manufacturing the semiconductor device Jul. 30, 2013
8486818 Semiconductor devices including buried gate electrodes and isolation layers and methods of forming semiconductor devices including buried gate electrodes and isolation layers using self aligne Jul. 16, 2013
8486839 Methods and apparatus to improve reliability of isolated vias Jul. 16, 2013
8461016 Integrated circuit devices and methods of forming memory array and peripheral circuitry isolation Jun. 11, 2013
8450180 Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices May. 28, 2013
8420484 Semiconductor device having a buried gate that can realize a reduction in gate-induced drain leakage (GIDL) and method for manufacturing the same Apr. 16, 2013
8415721 Field side sub-bitline nor flash array and method of fabricating the same Apr. 9, 2013
8409964 Shallow trench isolation with improved structure and method of forming Apr. 2, 2013
8394719 System and method for implementing multi-resolution advanced process control Mar. 12, 2013
8389353 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming Mar. 5, 2013
8384188 Semiconductor device and fabrication method thereof Feb. 26, 2013
8367515 Hybrid shallow trench isolation for high-k metal gate device improvement Feb. 5, 2013
8318583 Method of forming isolation structure of semiconductor device Nov. 27, 2012
8298912 Semiconductor structure and method of manufacturing same Oct. 30, 2012
8298952 Isolation structure and formation method thereof Oct. 30, 2012
8294238 Nonvolatile semiconductor memory device with reduced size of peripheral circuit area Oct. 23, 2012
8269306 Isolation regions Sep. 18, 2012
8252693 Self-alignment for semiconductor patterns Aug. 28, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8237240 Isolation layer structure, method of forming the same and method of manufacturing a semiconductor device including the same Aug. 7, 2012
8227339 Creation of vias and trenches with different depths Jul. 24, 2012
8216913 Strain modulation in active areas by controlled incorporation of nitrogen at si-SiO2 interface Jul. 10, 2012
8202784 Semiconductor device having a high aspect ratio isolation trench and method for manufacturing the same Jun. 19, 2012
8198171 Semiconductor device and fabrication method thereof Jun. 12, 2012
8183664 Electrostatic discharge protection device, method of manufacturing the same, method of testing the same May. 22, 2012
8148788 Semiconductor device and method of manufacturing the same Apr. 3, 2012
8143167 Fabrication processes for forming dual depth trenches using a dry etch that deposits a polymer Mar. 27, 2012
8138093 Method for forming trenches having different widths and the same depth Mar. 20, 2012
8138571 Semiconductor device comprising isolation trenches inducing different types of strain Mar. 20, 2012
8133779 Method of fabricating a semiconductor device Mar. 13, 2012

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