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Class Information
Number: 257/E21.531
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Testing or measuring during manufacture or treatment or reliability measurement, i.e., testing of parts followed by no processing which modifies parts as such (epo) > Measuring as part of manufacturing process (epo) > For electrical parameters, e.g., resistance, deep-levels, cv, diffusions by electrical means (epo)
Description: This subclass is indented under subclass E21.529. This subclass is substantially the same in scope as ECLA classification H01L21/66M4.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7629185 |
Semiconductor laser device manufacturing method and semiconductor laser device |
Dec. 8, 2009 |
| 7622312 |
Method for evaluating dopant contamination of semiconductor wafer |
Nov. 24, 2009 |
| 7622737 |
Test structures for electrically detecting back end of the line failures and methods of making and using the same |
Nov. 24, 2009 |
| 7598100 |
Manufacturing method of semiconductor integrated circuit device |
Oct. 6, 2009 |
| 7537943 |
Method of manufacturing a semiconductor integrated circuit device |
May. 26, 2009 |
| 7534629 |
Manufacturing method of semiconductor integrated circuit device |
May. 19, 2009 |
| 7498604 |
Deposition stop time detection apparatus and methods for fabricating copper using the same |
Mar. 3, 2009 |
| 7456032 |
Method and system for measuring laser induced phenomena changes in a semiconductor device |
Nov. 25, 2008 |
| 7452734 |
Method of making a monitoring pattern to measure a depth and a profile of a shallow trench isolation |
Nov. 18, 2008 |
| 7405091 |
Method for testing contact open in semicoductor device |
Jul. 29, 2008 |
| 7405090 |
Method of measuring an effective channel length and an overlap length in a metal-oxide semiconductor field effect transistor |
Jul. 29, 2008 |
| 7381575 |
Device and method for detecting alignment of active areas and memory cell structures in DRAM devices |
Jun. 3, 2008 |
| 7351595 |
Method for manufacturing semiconductor device |
Apr. 1, 2008 |
| 7282375 |
Wafer level package design that facilitates trimming and testing |
Oct. 16, 2007 |
| 7276388 |
Method, system, and apparatus for authenticating devices during assembly |
Oct. 2, 2007 |
| 7250313 |
Method of detecting un-annealed ion implants |
Jul. 31, 2007 |
| 7223616 |
Test structures in unused areas of semiconductor integrated circuits and methods for designing the same |
May. 29, 2007 |
| 7220990 |
Technique for evaluating a fabrication of a die and wafer |
May. 22, 2007 |
| 7214962 |
Apparatus and methods of testing and assembling bumped devices using an anisotropically conductive layer |
May. 8, 2007 |
| 7214961 |
Semiconductor testing device and semiconductor testing method |
May. 8, 2007 |
| 7180152 |
Process for resurf diffusion for high voltage MOSFET |
Feb. 20, 2007 |
| 7151003 |
Semiconductor wafer test system |
Dec. 19, 2006 |
| 7138283 |
Method for analyzing fail bit maps of wafers |
Nov. 21, 2006 |
| 7132684 |
Test structure for detecting defect size in a semiconductor device and test method using same |
Nov. 7, 2006 |
| 7105379 |
Implementation of protection layer for bond pad protection |
Sep. 12, 2006 |
| 7046760 |
Method of measuring and controlling concentration of dopants of a thin film |
May. 16, 2006 |
| 7033844 |
Wafer including an In-containing-compound semiconductor surface layer, and method for profiling its carrier concentration |
Apr. 25, 2006 |
| 7020577 |
Apparatus and method for investigating semiconductors wafer |
Mar. 28, 2006 |
| 6967490 |
Real-time in-line testing of semiconductor wafers |
Nov. 22, 2005 |
| 6953698 |
Methods for making microwave circuits |
Oct. 11, 2005 |
| 6927078 |
Method of measuring contact resistance of probe and method of testing semiconductor device |
Aug. 9, 2005 |
| 6924657 |
Real-time in-line testing of semiconductor wafers |
Aug. 2, 2005 |
| 6908777 |
Compound semiconductor device and method for controlling characteristics of the same |
Jun. 21, 2005 |
| 6909302 |
Real-time in-line testing of semiconductor wafers |
Jun. 21, 2005 |
| 6872581 |
Measuring back-side voltage of an integrated circuit |
Mar. 29, 2005 |
| 6859023 |
Evaluation method for evaluating insulating film, evaluation device therefor and method for manufacturing evaluation device |
Feb. 22, 2005 |
| 6858511 |
Method of semiconductor via testing |
Feb. 22, 2005 |
| 6859060 |
Inspection method of semiconductor device and inspection system |
Feb. 22, 2005 |
| 6851096 |
Method and apparatus for testing semiconductor wafers |
Feb. 1, 2005 |
| 6803588 |
Apparatus and method for rapid photo-thermal surfaces treatment |
Oct. 12, 2004 |
| 6803242 |
Evaluation method of IG effectivity in semiconductor silicon substrates |
Oct. 12, 2004 |
| 6787802 |
Semiconductor device including evaluation elements |
Sep. 7, 2004 |
| 6741093 |
Method of determining one or more properties of a semiconductor wafer |
May. 25, 2004 |
| 6607927 |
Method and apparatus for monitoring in-line copper contamination |
Aug. 19, 2003 |
| 6602729 |
Pulse voltage breakdown (VBD) technique for inline gate oxide reliability monitoring |
Aug. 5, 2003 |
| 6569691 |
Measurement of different mobile ion concentrations in the oxide layer of a semiconductor wafer |
May. 27, 2003 |
| 6548420 |
Measurement and analysis of mercury-based pseudo-field effect transistors |
Apr. 15, 2003 |
| 6538462 |
Method for measuring stress induced leakage current and gate dielectric integrity using corona discharge |
Mar. 25, 2003 |
| 6531777 |
Barrier metal integrity testing using a dual level line to line leakage testing pattern and partial CMP |
Mar. 11, 2003 |
| 6528335 |
Electrical method for assessing yield-limiting asperities in silicon-on-insulator wafers |
Mar. 4, 2003 |
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