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Class Information
Number: 257/E21.53
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Testing or measuring during manufacture or treatment or reliability measurement, i.e., testing of parts followed by no processing which modifies parts as such (epo) > Measuring as part of manufacturing process (epo) > For structural parameters, e.g., thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (epo)
Description: This subclass is indented under subclass E21.529. This subclass is substantially the same in scope as ECLA classification H01L21/66M2.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8710489 Epitaxial substrate for electronic device, in which current flows in lateral direction and method of producing the same Apr. 29, 2014
8679864 Method and system for determining semiconductor characteristics Mar. 25, 2014
8673793 Method for automatic offset calculation for deposition of an aligned metal pattern onto selective emitter pattern and subsequent monitoring of alignment Mar. 18, 2014
8673656 Method and device for measuring temperature during deposition of semiconductor Mar. 18, 2014
8673709 FinFETs with multiple fin heights Mar. 18, 2014
8674355 Integrated circuit test units with integrated physical and electrical test regions Mar. 18, 2014
8647892 Inline process control structures Feb. 11, 2014
8623673 Structure and method for detecting defects in BEOL processing Jan. 7, 2014
8624266 Silicon carbide substrate, semiconductor device, method of manufacturing silicon carbide substrate and method of manufacturing semiconductor device Jan. 7, 2014
8610284 Semiconductor device and electronic device Dec. 17, 2013
8602838 Chemical mechanical polishing method and system Dec. 10, 2013
8604337 Method to evaluate effectiveness of substrate cleanness and quantity of pin holes in an antireflective coating of a solar cell Dec. 10, 2013
8592261 Method for designing semiconductor device Nov. 26, 2013
8592229 Method for forming dual damascene structure Nov. 26, 2013
8581249 Film thickness monitoring structure for semiconductor substrate Nov. 12, 2013
8564143 Overlay mark for multiple pre-layers and currently layer Oct. 22, 2013
8563430 Semiconductor integrated circuit and method for fabricating the same Oct. 22, 2013
8563335 Method of controlling polishing using in-situ optical monitoring and fourier transform Oct. 22, 2013
8546154 Apparatus and method to inspect defect of semiconductor device Oct. 1, 2013
8535986 Method of packaging an integrated circuit using a laser to remove material from a portion of a lead frame Sep. 17, 2013
8530247 Control of implant pattern critical dimensions using STI step height offset Sep. 10, 2013
8530883 Manufacture of quantum dot-enabled solid-state light emitters Sep. 10, 2013
8518722 Method for detecting the under-fill void in flip chip BGA Aug. 27, 2013
8519260 Method to evaluate effectiveness of substrate cleanness and quantity of pin holes in an antireflective coating of a solar cell Aug. 27, 2013
8513045 Laser system with multiple laser pulses for fabrication of solar cells Aug. 20, 2013
8507297 Packaging and testing of multiple MEMS devices on a wafer Aug. 13, 2013
8501500 Method for monitoring the removal of polysilicon pseudo gates Aug. 6, 2013
8502290 High full-well capacity pixel with graded photodetector implant Aug. 6, 2013
8497141 Semiconductor device and method of manufacturing it Jul. 30, 2013
8497142 Methods of forming conductive layer patterns using gas phase cleaning process and methods of manufacturing semiconductor devices Jul. 30, 2013
8492175 System and method for aligning surface mount devices on a substrate Jul. 23, 2013
8471368 Polysilicon control etch back indicator Jun. 25, 2013
8450123 Oxygen diffusion evaluation method of oxide film stacked body May. 28, 2013
8431421 Test patterns for detecting misalignment of through-wafer vias Apr. 30, 2013
8426857 Semiconductor device and method for producing the same Apr. 23, 2013
8420498 Alignment method of chips Apr. 16, 2013
8404498 Method of inspecting semiconductor thin film by transmission imaging and inspection device for the same Mar. 26, 2013
8404496 Method of testing a semiconductor device and suctioning a semiconductor device in the wafer state Mar. 26, 2013
8399275 Method for manufacturing semiconductor light emitting device Mar. 19, 2013
8399263 Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate Mar. 19, 2013
8399264 Alignment inspection Mar. 19, 2013
8394708 Assembly of quasicrystalline photonic heterostructures Mar. 12, 2013
8390131 Semiconductor device with reduced contact resistance Mar. 5, 2013
8373244 Temperature monitoring in a semiconductor device by thermocouples distributed in the contact structure Feb. 12, 2013
8367431 Manufacturing method of semiconductor photonic device substrate Feb. 5, 2013
8361819 Methods of fabricating a light-emitting device Jan. 29, 2013
8350393 Apparatus and method for predetermined component placement to a target platform Jan. 8, 2013
8338918 Method for manufacturing a semiconductor device, method for detecting a semiconductor substrate and semiconductor chip package Dec. 25, 2012
8304261 Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device Nov. 6, 2012
8298838 Method for staining sample Oct. 30, 2012

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