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Class Information
Number: 257/E21.529
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Testing or measuring during manufacture or treatment or reliability measurement, i.e., testing of parts followed by no processing which modifies parts as such (epo) > Measuring as part of manufacturing process (epo)
Description: This subclass is indented under subclass E21.521. This subclass is substantially the same in scope as ECLA classification H01L21/66M.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.531 For electrical parameters, e.g., resistance, deep-levels, cv, diffusions by electrical means (epo) 267
257/E21.53 For structural parameters, e.g., thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (epo) 802

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8709834 Methods of fabricating semiconductor device Apr. 29, 2014
8704384 Stacked die assembly Apr. 22, 2014
8674355 Integrated circuit test units with integrated physical and electrical test regions Mar. 18, 2014
8674357 Method for measuring impurity concentration profile, wafer used for same, and method for manufacturing semiconductor device using same Mar. 18, 2014
8664105 Mitigation of silicide formation on wafer bevel Mar. 4, 2014
8652858 Chip testing method Feb. 18, 2014
8648451 Semiconductor package, test socket and related methods Feb. 11, 2014
8617908 Method for producing a substrate including a step of thinning with stop when a porous zone is detected Dec. 31, 2013
8609442 Vapor deposition method, vapor deposition device and organic EL display device Dec. 17, 2013
8609548 Method for providing high etch rate Dec. 17, 2013
8609473 Method for fabricating a neo-layer using stud bumped bare die Dec. 17, 2013
8603839 In-line metrology system Dec. 10, 2013
8603908 Mitigation of silicide formation on wafer bevel Dec. 10, 2013
8592261 Method for designing semiconductor device Nov. 26, 2013
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8557613 Methods for designing, fabricating, and predicting shape formations in a material Oct. 15, 2013
8530354 Substrate processing method Sep. 10, 2013
8518720 UV irradiance monitoring in semiconductor processing using a temperature dependent signal Aug. 27, 2013
8487402 Semiconductor device Jul. 16, 2013
8487403 Semiconductor device Jul. 16, 2013
8470614 PECVD showerhead configuration for CMP uniformity and improved stress Jun. 25, 2013
8445314 Method of creating reusable template for detachable thin film substrate May. 21, 2013
8445906 Method for sorting and acquiring semiconductor element, method for producing semiconductor device, and semiconductor device May. 21, 2013
8445296 Apparatus and methods for end point determination in reactive ion etching May. 21, 2013
8440473 Use of spectrum to synchronize RF switching with gas switching during etch May. 14, 2013
8421186 Electrically programmable metal fuse Apr. 16, 2013
8409889 Method for producing semiconductor optical device Apr. 2, 2013
8404497 Semiconductor device and method of manufacturing the same Mar. 26, 2013
8399334 Method of manufacturing nano device by arbitrarily printing nanowire devices thereon and intermediate building block useful for the method Mar. 19, 2013
8399275 Method for manufacturing semiconductor light emitting device Mar. 19, 2013
8399265 Device for releasably receiving a semiconductor chip Mar. 19, 2013
8377723 Method of manufacturing thin-film transistor substrate Feb. 19, 2013
8361819 Methods of fabricating a light-emitting device Jan. 29, 2013
8361885 Group-III nitride semiconductor laser device, method of fabricating group-III nitride semiconductor laser device, and method of estimating damage from formation of scribe groove Jan. 29, 2013
8357620 Laser annealing method and laser annealing apparatus Jan. 22, 2013
8350393 Apparatus and method for predetermined component placement to a target platform Jan. 8, 2013
8328494 In vacuum optical wafer heater for cryogenic processing Dec. 11, 2012
8288177 SER testing for an IC chip using hot underfill Oct. 16, 2012
8278124 Assembly of ordered carbon shells on semiconducting nanomaterials Oct. 2, 2012
8268688 Production of VDMOS-transistors having optimized gate contact Sep. 18, 2012
RE43652 Substrate processing control method and storage medium Sep. 11, 2012
8244482 Photometrically modulated delivery of reagents Aug. 14, 2012
8227317 Semiconductor device manufacturing method and semiconductor device Jul. 24, 2012
8216927 Method of reducing contamination by providing a removable polymer protection film during microstructure processing Jul. 10, 2012
8216866 Method to manufacture semiconductor device with optical grating Jul. 10, 2012
8211717 SEM repair for sub-optimal features Jul. 3, 2012
8207051 Semiconductor surface modification Jun. 26, 2012
8207066 Dry etching method Jun. 26, 2012
8196545 Device and method for manufacturing a semiconductor wafer Jun. 12, 2012
8193007 Etch process control using optical metrology and sensor devices Jun. 5, 2012

1 2 3

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