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Class Information
Number: 257/E21.524
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Testing or measuring during manufacture or treatment or reliability measurement, i.e., testing of parts followed by no processing which modifies parts as such (epo) > Structural arrangement (epo) > Circuit for characterizing or monitoring manufacturing process, e.g., whole test die, wafer filled with test structures, onboard devices incorporated on each die, process/product control monitors or pcm, devices in scribe-line/kerf, drop-in devices (epo)
Description: This subclass is indented under subclass E21.522. This subclass is substantially the same in scope as ECLA classification H01L21/66A4.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8709833 Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations Apr. 29, 2014
8692248 Integrated circuit die having input and output circuit pads, test circuitry, and multiplex circuitry Apr. 8, 2014
8673657 Semiconductor device including a circuit area and a monitor area having a plurality of monitor layers and method for manufacturing the same Mar. 18, 2014
8674355 Integrated circuit test units with integrated physical and electrical test regions Mar. 18, 2014
8658437 Package method for electronic components by thin substrate Feb. 25, 2014
8648339 Semiconductor device including first semiconductor chip including first pads connected to first terminals, and second semiconductor chip including second pads connected to second terminals Feb. 11, 2014
8629435 Methods of extracting fin heights and overlap capacitance and structures for performing the same Jan. 14, 2014
8623673 Structure and method for detecting defects in BEOL processing Jan. 7, 2014
8623772 Method of forming patterns of semiconductor device Jan. 7, 2014
8610121 Methods for discretized processing and process sequence integration of regions of a substrate Dec. 17, 2013
8604475 IC dies with serarate connections to expected and mask data Dec. 10, 2013
8592813 Semiconductor device and stacked semiconductor apparatus Nov. 26, 2013
8586982 Semiconductor test chip device to mimic field thermal mini-cycles to assess reliability Nov. 19, 2013
8519388 Embedded structure for passivation integrity testing Aug. 27, 2013
8507908 Probe and probe card Aug. 13, 2013
8501502 Package method for electronic components by thin substrate Aug. 6, 2013
8466037 Method for producing a thin chip comprising an integrated circuit Jun. 18, 2013
8420498 Alignment method of chips Apr. 16, 2013
8362480 Reusable test chip for inline probing of three dimensionally arranged experiments Jan. 29, 2013
8362483 Thin film transistor substrate and flat panel display comprising the same Jan. 29, 2013
8350393 Apparatus and method for predetermined component placement to a target platform Jan. 8, 2013
8334582 Protective seal ring for preventing die-saw induced stress Dec. 18, 2012
8323991 Method for detecting stress migration properties Dec. 4, 2012
8309951 Test structure for determining gate-to-body tunneling current in a floating body FET Nov. 13, 2012
8299464 Comparator receiving expected and mask data from circuit pads Oct. 30, 2012
8274165 Semiconductor substrate, laminated chip package, semiconductor plate and method of manufacturing the same Sep. 25, 2012
8274080 Semiconductor wafer including guard ring patterns and process monitoring patterns Sep. 25, 2012
8211716 Manufacturing method of a semiconductor device, a semiconductor wafer, and a test method Jul. 3, 2012
8211720 Method for detecting stress migration properties Jul. 3, 2012
8193006 Method of chip repair by stacking a plurality of bad dies Jun. 5, 2012
8173534 Method for producing a semiconductor wafer with rear side identification May. 8, 2012
8124428 Structure and method for testing MEMS devices Feb. 28, 2012
8084770 Test structures for development of metal-insulator-metal (MIM) devices Dec. 27, 2011
8084769 Testkey design pattern for gate oxide Dec. 27, 2011
8039837 In-line voltage contrast detection of PFET silicide encroachment Oct. 18, 2011
8026523 Nitride semiconductor free-standing substrate and device using the same Sep. 27, 2011
7989803 Manufacturing method for semiconductor chips and semiconductor wafer Aug. 2, 2011
7948059 Dividable semiconductor device having ceramic substrate and surface mount components collectively sealed on principle surface of ceramic substrate May. 24, 2011
7935546 Method and apparatus for measurement and control of photomask to substrate alignment May. 3, 2011
7935965 Test structures and methods for electrical characterization of alignment of line patterns defined with double patterning May. 3, 2011
7919775 Semiconductor device and method comprising a high voltage reset driver and an isolated memory array Apr. 5, 2011
7915056 Image sensor monitor structure in scribe area Mar. 29, 2011
7911038 Wiring board, semiconductor device using wiring board and their manufacturing methods Mar. 22, 2011
7888672 Device for detecting stress migration properties Feb. 15, 2011
7871832 Generating an integrated circuit identifier Jan. 18, 2011
7855436 Semiconductor wafer Dec. 21, 2010
7842949 IC with comparator receiving expected and mask data from pads Nov. 30, 2010
7807481 Method of semiconductor device protection, package of semiconductor device Oct. 5, 2010
7800106 Test structure for OPC-related shorts between lines in a semiconductor device Sep. 21, 2010
7785906 Method to detect poly residues in LOCOS process Aug. 31, 2010

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