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Class Information
Number: 257/E21.497
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body other than carbon, si, ge, sic, se, te, cu 2 o, cui, and group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than electromagnetic radiation (epo) > Thermal treatment for modifying property of semiconductor body, e.g., annealing, sintering (epo)
Description: This subclass is indented under subclass E21.482. This subclass is substantially the same in scope as ECLA classification H01L21/477.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8603850 Method for manufacturing solar cell using silicon powder Dec. 10, 2013
8575014 Semiconductor device fabricated using a metal microstructure control process Nov. 5, 2013
8546805 Two-beam laser annealing with improved temperature performance Oct. 1, 2013
8524518 Epitaxial formation support structures and associated methods Sep. 3, 2013
8518838 Method of thermal processing structures formed on a substrate Aug. 27, 2013
8501521 Copper species surface treatment of thin film photovoltaic cell and manufacturing method Aug. 6, 2013
8486753 Patterning method of metal oxide thin film using nanoimprinting, and manufacturing method of light emitting diode Jul. 16, 2013
8476104 Sodium species surface treatment of thin film photovoltaic cell and manufacturing method Jul. 2, 2013
8461061 Quartz boat method and apparatus for thin film thermal treatment Jun. 11, 2013
8435826 Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method May. 7, 2013
8420554 Wafer support ring Apr. 16, 2013
8420981 Apparatus for thermal processing with micro-environment Apr. 16, 2013
8394662 Chloride species surface treatment of thin film photovoltaic cell and manufacturing method Mar. 12, 2013
8383441 Method for manufacturing a micromachined device and the micromachined device made thereof Feb. 26, 2013
8293643 Method and structure of forming silicide and diffusion barrier layer with direct deposited film on silicon Oct. 23, 2012
8237202 Semiconductor devices including dehydrogenated interlayer dielectric layers Aug. 7, 2012
8232552 Noncrystalline oxide semiconductor thin film, process for producing the noncrystalline oxide semiconductor thin film, process for producing thin-film transistor, field-effect-transistor, light Jul. 31, 2012
8187901 Epitaxial formation support structures and associated methods May. 29, 2012
8169059 On-chip RF shields with through substrate conductors May. 1, 2012
8138061 Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide Mar. 20, 2012
8129224 Stud bumps as local heat sinks during transient power operations Mar. 6, 2012
8093144 Patterning of nanostructures Jan. 10, 2012
8053330 Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide Nov. 8, 2011
8034656 Annealing method of zinc oxide thin film Oct. 11, 2011
8030099 Method for determining time to failure of submicron metal interconnects Oct. 4, 2011
8030189 Method for maintaining a smooth surface of crystallizable material Oct. 4, 2011
8012873 Method for providing temperature uniformity of rapid thermal annealing Sep. 6, 2011
8008171 Method of fabricating polycrystalline semiconductor Aug. 30, 2011
7998848 Method of producing field effect transistor Aug. 16, 2011
7977217 Method of crystallizing silicon Jul. 12, 2011
7939456 Method and apparatus for uniform microwave treatment of semiconductor wafers May. 10, 2011
7923378 Film formation method and apparatus for forming silicon-containing insulating film Apr. 12, 2011
7906402 Compensation techniques for substrate heating processes Mar. 15, 2011
7902070 Method and system for producing optically transparent noble metal films Mar. 8, 2011
7863204 Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure Jan. 4, 2011
7842539 Zinc oxide semiconductor and method of manufacturing the same Nov. 30, 2010
7838988 Stud bumps as local heat sinks during transient power operations Nov. 23, 2010
7829444 Field effect transistor manufacturing method Nov. 9, 2010
7825026 Method for processing copper surface, method for forming copper pattern wiring and semiconductor device manufactured using such method Nov. 2, 2010
7811923 Integrated wafer processing system for integration of patternable dielectric materials Oct. 12, 2010
7799580 Method for manufacturing ferroelectric memory device Sep. 21, 2010
7795119 Flash anneal for a PAI, NiSi process Sep. 14, 2010
7736947 Method using a carrier for manufacturing a memory device and manufacturing method of a memory device using the same and memory device using the same Jun. 15, 2010
7700460 Semiconductor device fabrication method and electronic device fabrication method Apr. 20, 2010
7678688 Method for forming metal interconnection in image sensor Mar. 16, 2010
7629232 Semiconductor storage device and manufacturing method thereof Dec. 8, 2009
7553758 Method of fabricating interconnections of microelectronic device using dual damascene process Jun. 30, 2009
7485553 Process for manufacturing a semiconductor device Feb. 3, 2009
7476980 Die configurations and methods of manufacture Jan. 13, 2009
7470594 System and method for controlling the formation of an interfacial oxide layer in a polysilicon emitter transistor Dec. 30, 2008

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