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Class Information
Number: 257/E21.485
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body other than carbon, si, ge, sic, se, te, cu 2 o, cui, and group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than electromagnetic radiation (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Chemical or electrical treatment, e.g., electrolytic etching (epo)
Description: This subclass is indented under subclass E21.483. This subclass is substantially the same in scope as ECLA classification H01L21/465.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.486 Using mask (epo) 33

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8673076 Substrate processing apparatus and semiconductor device producing method Mar. 18, 2014
8633090 Method for forming substrate with buried insulating layer Jan. 21, 2014
8610034 Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device Dec. 17, 2013
8501521 Copper species surface treatment of thin film photovoltaic cell and manufacturing method Aug. 6, 2013
8476104 Sodium species surface treatment of thin film photovoltaic cell and manufacturing method Jul. 2, 2013
8460474 Method of cleaning semiconductor wafers Jun. 11, 2013
8435826 Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method May. 7, 2013
8426235 Method for manufacturing capacitive electromechanical transducer Apr. 23, 2013
8394662 Chloride species surface treatment of thin film photovoltaic cell and manufacturing method Mar. 12, 2013
8377830 Method of manufacturing a semiconductor device and wet processing apparatus Feb. 19, 2013
8324112 Wet etching agent for II-VI semiconductors and method Dec. 4, 2012
8187963 Method of forming back contact to a cadmium telluride solar cell May. 29, 2012
8187485 Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus May. 29, 2012
8129287 Method for manufacturing semiconductor device and semiconductor device Mar. 6, 2012
8076250 PECVD oxide-nitride and oxide-silicon stacks for 3D memory application Dec. 13, 2011
8012772 Substrate treating apparatus, substrate treating method, and method for manufacturing high-voltage device Sep. 6, 2011
7985982 Etchant composition, patterning conductive layer and manufacturing flat panel, display device using the same Jul. 26, 2011
7932176 Self-aligned barrier layers for interconnects Apr. 26, 2011
7838431 Method for surface treatment of semiconductor substrates Nov. 23, 2010
7776713 Etching solution, method of surface modification of semiconductor substrate and method of forming shallow trench isolation Aug. 17, 2010
7718532 Method of forming a high-k film on a semiconductor device May. 18, 2010
7622391 Method of forming an electrically conductive line in an integrated circuit Nov. 24, 2009
7473646 Dry etching method and production method of magnetic memory device Jan. 6, 2009
7439189 Surface treatment after selective etching Oct. 21, 2008
7402530 Method for manufacturing semiconductor device and semiconductor device Jul. 22, 2008
7297994 Semiconductor device having a retrograde dopant profile in a channel region Nov. 20, 2007
6750151 Etching method for ZnSe polycrystalline substrate Jun. 15, 2004
6524966 Surface treatment and protection method for cadmium zinc telluride crystals Feb. 25, 2003
6306674 Method for etching multilayer compound semiconductor material Oct. 23, 2001
6281035 Ion-beam treatment to prepare surfaces of p-CdTe films Aug. 28, 2001
6127273 Process for anisotropic plasma etching of different substrates Oct. 3, 2000
6058123 Selective etch for II-VI semiconductors May. 2, 2000
6043113 Method of forming self-aligned thin film transistor Mar. 28, 2000
6043106 Method for surface passivation and protection of cadmium zinc telluride crystals Mar. 28, 2000
5933706 Method for surface treatment of a cadmium zinc telluride crystal Aug. 3, 1999
5888410 Dry etching method and manufacturing method of manufacturing EL element using same Mar. 30, 1999
5882988 Semiconductor chip-making without scribing Mar. 16, 1999
5834330 Selective etch method for II-VI semiconductors Nov. 10, 1998
5762813 Method for fabricating semiconductor device Jun. 9, 1998
5733801 Method of making a semiconductor device with alignment marks Mar. 31, 1998
5674779 Method for fabricating a ridge-shaped laser in a channel Oct. 7, 1997
5647954 Manufacture of etched substrates such as infrared detectors Jul. 15, 1997
5637189 Dry etch process control using electrically biased stop junctions Jun. 10, 1997
5607601 Method for patterning and etching film layers of semiconductor devices Mar. 4, 1997
5569932 Porous silicon carbide (SIC) semiconductor device Oct. 29, 1996
5559058 Method for producing native oxides on compound semiconductors Sep. 24, 1996
5557146 Ohmic contact using binder paste with semiconductor material dispersed therein Sep. 17, 1996
5534109 Method for etching HgCdTe substrate Jul. 9, 1996
5475237 Light emitting device having first and second cladding layers with an active layer and carrier blocking layer therebetween Dec. 12, 1995
5454915 Method of fabricating porous silicon carbide (SiC) Oct. 3, 1995

1 2 3

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