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Class Information
Number: 257/E21.475
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body other than carbon, si, ge, sic, se, te, cu 2 o, cui, and group iii-v compounds with or without impurities, e.g., doping materials (epo) > Radiation treatment (epo) > With high-energy radiation (epo) > Using electromagnetic radiation, e.g., laser radiation (epo)
Description: This subclass is indented under subclass E21.472. This subclass is substantially the same in scope as ECLA classification H01L21/428.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608527 |
Laser irradiation method and method for manufacturing crystalline semiconductor film |
Oct. 27, 2009 |
| 7605029 |
Method of manufacturing semiconductor device |
Oct. 20, 2009 |
| 7605072 |
Interconnect structure with a barrier-redundancy feature |
Oct. 20, 2009 |
| 7595208 |
Method of laser annealing using two wavelengths of radiation |
Sep. 29, 2009 |
| 7585791 |
Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7569458 |
Non-thermally annealed doped semiconductor material and methods related thereto |
Aug. 4, 2009 |
| 7569503 |
Contact doping and annealing systems and processes for nanowire thin films |
Aug. 4, 2009 |
| 7557050 |
Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same |
Jul. 7, 2009 |
| 7553778 |
Method for producing a semiconductor device including crystallizing an amphorous semiconductor film |
Jun. 30, 2009 |
| 7553777 |
Silicon wafer laser processing method and laser beam processing machine |
Jun. 30, 2009 |
| 7553772 |
Process and apparatus for simultaneous light and radical surface treatment of integrated circuit structure |
Jun. 30, 2009 |
| 7528009 |
Wafer-leveled chip packaging structure and method thereof |
May. 5, 2009 |
| 7479465 |
Transfer of stress to a layer |
Jan. 20, 2009 |
| 7479466 |
Method of heating semiconductor wafer to improve wafer flatness |
Jan. 20, 2009 |
| 7476568 |
Wafer-level assembly of heat spreaders for dual IHS packages |
Jan. 13, 2009 |
| 7473649 |
Methods for controlling feature dimensions in crystalline substrates |
Jan. 6, 2009 |
| 7470602 |
Crystalline film and its manufacture method using laser |
Dec. 30, 2008 |
| 7465614 |
Method of fabricating semiconductor device and semiconductor fabricated by the same method |
Dec. 16, 2008 |
| 7462572 |
Plasma treatment apparatus and method for plasma treatment |
Dec. 9, 2008 |
| 7449347 |
Repairing method of a thin film transistor array |
Nov. 11, 2008 |
| 7442629 |
Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
Oct. 28, 2008 |
| 7442644 |
Method for manufacturing nitride semiconductor wafer or nitride semiconductor device; nitride semiconductor wafer or nitride semiconductor device made by the same; and laser irradiating appara |
Oct. 28, 2008 |
| 7393729 |
Method for fabricating semiconductor device |
Jul. 1, 2008 |
| 7393764 |
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device |
Jul. 1, 2008 |
| 7364985 |
Method for creating electrical pathways for semiconductor device structures using laser machining processes |
Apr. 29, 2008 |
| 7348648 |
Interconnect structure with a barrier-redundancy feature |
Mar. 25, 2008 |
| 7326598 |
Method of fabricating polycrystalline silicon |
Feb. 5, 2008 |
| 7317257 |
Inhibiting underfill flow using nanoparticles |
Jan. 8, 2008 |
| 7307029 |
Plasma treatment apparatus and method for plasma treatment |
Dec. 11, 2007 |
| 7294906 |
Wiring technique |
Nov. 13, 2007 |
| 7279721 |
Dual wavelength thermal flux laser anneal |
Oct. 9, 2007 |
| 7268062 |
Method of crystallizing a semiconductor film using laser irradiation |
Sep. 11, 2007 |
| 7183229 |
Semiconductor thin film forming method, production methods for semiconductor device and electrooptical device, devices used for these methods, and semiconductor device and electrooptical devic |
Feb. 27, 2007 |
| 7138303 |
Method for manufacturing a thin film transistor having high mobility and high on-current |
Nov. 21, 2006 |
| 7071042 |
Method of fabricating silicon integrated circuit on glass |
Jul. 4, 2006 |
| 6355544 |
Selective high concentration doping of semiconductor material utilizing laser annealing |
Mar. 12, 2002 |
| 5018164 |
Excimer laser ablation method and apparatus for microcircuit fabrication |
May. 21, 1991 |
| 4406709 |
Method of increasing the grain size of polycrystalline materials by directed energy-beams |
Sep. 27, 1983 |
| 4354198 |
Zinc-sulphide capping layer for gallium-arsenide device |
Oct. 12, 1982 |
| 4242149 |
Method of making photodetectors using ion implantation and laser annealing |
Dec. 30, 1980 |
| 4204933 |
Electrocoating process for producing a semiconducting film |
May. 27, 1980 |
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