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Class Information
Number: 257/E21.461
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body other than carbon, si, ge, sic, se, te, cu 2 o, cui, and group iii-v compounds with or without impurities, e.g., doping materials (epo) > Deposition of semiconductor material on substrate, e.g., epitaxial growth (epo)
Description: This subclass is indented under subclass E21.459. This subclass is substantially the same in scope as ECLA classification H01L21/36.


Sub-classes under this class:

Class Number Class Name Patents
257/E21.464 Using liquid deposition (epo) 51
257/E21.462 Using physical deposition, e.g., vacuum deposition, sputtering (epo) 97
257/E21.463 Using reduction or decomposition of gaseous compound yielding solid condensate, i.e., chemical deposition (epo) 82


Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
7618836 Method for manufacturing semiconductor optical device Nov. 17, 2009
7615390 Method and apparatus for forming expitaxial layers Nov. 10, 2009
7611951 Method of fabricating MOS transistor having epitaxial region Nov. 3, 2009
7605012 ZnO based compound semiconductor light emitting device and method for manufacturing the same Oct. 20, 2009
7598178 Carbon precursors for use during silicon epitaxial film formation Oct. 6, 2009
7560296 Process for producing an epitalixal layer of galium nitride Jul. 14, 2009
7560352 Selective deposition Jul. 14, 2009
7560364 Dislocation-specific lateral epitaxial overgrowth to reduce dislocation density of nitride films Jul. 14, 2009
7547617 Semiconductor device including container having epitaxial silicon therein Jun. 16, 2009
7541250 Method for forming a self-aligned twin well region with simplified processing Jun. 2, 2009
7517771 Method for manufacturing semiconductor device having trench Apr. 14, 2009
7459380 Dislocation-specific dielectric mask deposition and lateral epitaxial overgrowth to reduce dislocation density of nitride films Dec. 2, 2008
7446024 Method of forming nanowires with a narrow diameter distribution Nov. 4, 2008
7410864 Trench and a trench capacitor and method for forming the same Aug. 12, 2008
7399686 Method and apparatus for making coplanar dielectrically-isolated regions of different semiconductor materials on a substrate Jul. 15, 2008
7364990 Epitaxial crystal growth process in the manufacturing of a semiconductor device Apr. 29, 2008
7338886 Implantation-less approach to fabricating strained semiconductor on isolation wafers Mar. 4, 2008
7312128 Selective epitaxy process with alternating gas supply Dec. 25, 2007
7265417 Method of fabricating semiconductor side wall fin Sep. 4, 2007
7259084 Growth of GaAs epitaxial layers on Si substrate by using a novel GeSi buffer layer Aug. 21, 2007
7253084 Deposition from liquid sources Aug. 7, 2007
7192892 Atomic layer deposited dielectric layers Mar. 20, 2007
7169713 Atomic layer deposition (ALD) method with enhanced deposition rate Jan. 30, 2007
7115489 Methods of growing epitaxial silicon Oct. 3, 2006
6955985 Domain epitaxy for thin film growth Oct. 18, 2005
6939604 Doped semiconductor nanocrystals Sep. 6, 2005
6888156 Thin film device May. 3, 2005
6878962 Semiconductor device Apr. 12, 2005
6759690 II-VI semiconductor device with BeTe buffer layer Jul. 6, 2004
6673478 Crystal-growth substrate and a ZnO-containing compound semiconductor device Jan. 6, 2004
6583450 II-VI semiconductor device with BeTe buffer layer Jun. 24, 2003
6399473 Method of producing a II-VI semiconductor component containing selenium and/or sulrfur Jun. 4, 2002
6320208 II-VI compound semiconductor device Nov. 20, 2001
6072202 II-VI compound semiconductor device with III-V buffer layer Jun. 6, 2000
6010937 Reduction of dislocations in a heteroepitaxial semiconductor structure Jan. 4, 2000
6001669 Method for producing II-VI compound semiconductor epitaxial layers having low defects Dec. 14, 1999
5959308 Epitaxial layer on a heterointerface Sep. 28, 1999
5874349 Multi-layer structure for II-VI group compound semiconductor and method for forming the same Feb. 23, 1999
5750434 Surface polishing of silicon carbide electronic device substrate using CEO.sub.2 May. 12, 1998
5610413 Group II-VI compound semiconductor light emitting devices and an ohmic contact therefor Mar. 11, 1997
5602057 Process of making a semiconductor device using crystal growth by a nucleation site in a recessed substrate and planarization Feb. 11, 1997
5581117 Si base substrate covered by a CdTe or Cd-rich CdZnTe layer Dec. 3, 1996
5578503 Rapid process for producing a chalcopyrite semiconductor on a substrate Nov. 26, 1996
5567469 Process for producing chalcopyrite type compound thin film Oct. 22, 1996
5548137 Group II-VI compound semiconductor light emitting devices and an ohmic contact therefor Aug. 20, 1996
5511509 Apparatus for p-type doping of semiconductor structures formed of group II and group VI elements Apr. 30, 1996
5471946 Method for producing a wafer with a monocrystalline silicon carbide layer Dec. 5, 1995
5463978 Compound semiconductor and controlled doping thereof Nov. 7, 1995
5449927 Multilayer buffer structure including II-VI compounds on a silicon substrate Sep. 12, 1995
5399206 Arsenic passivation for epitaxial deposition of ternary chalcogenide semiconductor films onto silicon substrates Mar. 21, 1995

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