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Class Information
Number: 257/E21.408
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Multi-step process for the manufacture of unipolar device (epo) > Field-effect transistor (epo) > Active layer is group iii-v compound, e.g., iii-v velocity modulation transistor (vmt), nerfet (epo) > With one or zero or quasi-one or quasi-zero dimensional channel, e.g., in plane gate transistor (ipg), single electron transistor (set), striped channel transistor, coulomb blockade device (epo)
Description: This subclass is indented under subclass E21.405. This subclass is substantially the same in scope as ECLA classification H01L21/335P4.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8637374 Method of fabricating self-aligned nanotube field effect transistor Jan. 28, 2014
8124961 Single electron transistor Feb. 28, 2012
8048747 Method of manufacturing embedded metal-oxide-nitride-oxide-silicon memory device Nov. 1, 2011
8022393 Lithographic process using a nanowire mask, and nanoscale devices fabricated using the process Sep. 20, 2011
7955932 Single electron transistor and method of manufacturing the same Jun. 7, 2011
7944017 Semiconductor device and manufacturing method of the same May. 17, 2011
7863651 Using multiple coulomb islands to reduce voltage stress Jan. 4, 2011
7749922 Nanowire structures and electrical devices Jul. 6, 2010
7224026 Nanoelectronic devices and circuits May. 29, 2007
7026641 Electrically tunable quantum dots and methods for making and using same Apr. 11, 2006
6744065 Single electron devices Jun. 1, 2004
6358316 Method for producing semiconductor device, method for producing semiconductor laser device, and method for producing quantum wire structure Mar. 19, 2002
6335245 Method for fabricating single electron transistor Jan. 1, 2002
6211013 Method for fabricating single electron transistor Apr. 3, 2001
6204102 Method of fabricating compound semiconductor devices using lift-off of insulating film Mar. 20, 2001
5989947 Method for the manufacture of quantum structures, in particular quantum dots and tunnel barriers as well as components with such quantum structures Nov. 23, 1999
5892247 Semiconductor device and a manufacturing method thereof Apr. 6, 1999
5833870 Method for forming a high density quantum wire Nov. 10, 1998
5714765 Method of fabricating a compositional semiconductor device Feb. 3, 1998
5679962 Semiconductor device and a single electron device Oct. 21, 1997
5665979 Coulomb-blockade element and method of manufacturing the same Sep. 9, 1997
5604154 Method of manufacturing coulamb blockade element using thermal oxidation Feb. 18, 1997
5571376 Quantum device and method of making such a device Nov. 5, 1996
5557141 Method of doping, semiconductor device, and method of fabricating semiconductor device Sep. 17, 1996
5548129 Quantum well structure with self-aligned gate and method of making the same Aug. 20, 1996
5532184 Method of fabricating a semiconductor device using quantum dots or wires Jul. 2, 1996
5532510 Reverse side etching for producing layers with strain variation Jul. 2, 1996
5530272 High electron mobility transistor including periodic heterojunction interface Jun. 25, 1996
5514883 Field effect transistor May. 7, 1996
5489539 Method of making quantum well structure with self-aligned gate Feb. 6, 1996
5479027 Semiconductor device having a channel for a zero-or one-dimensional carrier gas Dec. 26, 1995
5449929 IPG transistor semiconductor integrated circuit device Sep. 12, 1995
5396089 Method of generating active semiconductor structures by means of starting structures which have a 2D charge carrier layer parallel to the surface Mar. 7, 1995
5385865 Method of generating active semiconductor structures by means of starting structures which have a 2D charge carrier layer parallel to the surface Jan. 31, 1995
5376225 Method of forming fine structure on compound semiconductor with inclined ion beam etching Dec. 27, 1994
5372675 Method for producing fine structure for electronic device Dec. 13, 1994
5365078 Semiconductor device and method of making it Nov. 15, 1994
5362972 Semiconductor device using whiskers Nov. 8, 1994
5350709 Method of doping a group III-V compound semiconductor Sep. 27, 1994
5338692 Method of generating active semiconductor structures by means of starting structures which have a 2D charge carrier layer parallel to the surface Aug. 16, 1994
5332681 Method of making a semiconductor device by forming a nanochannel mask Jul. 26, 1994
5281543 Fabrication method for quantum devices in compound semiconductor layers Jan. 25, 1994
5258326 Quantum device fabrication method Nov. 2, 1993
5236547 Method of forming a pattern in semiconductor device manufacturing process Aug. 17, 1993
5229320 Method for forming quantum dots Jul. 20, 1993
5198879 Heterojunction semiconductor device Mar. 30, 1993
5170226 Fabrication of quantum devices in compound semiconductor layers and resulting structures Dec. 8, 1992
5138405 Quasi one-dimensional electron gas field effect transistor Aug. 11, 1992
5119151 Quasi-one-dimensional channel field effect transistor having gate electrode with stripes Jun. 2, 1992
5096846 Method of forming a quantum effect switching device Mar. 17, 1992

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