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Class Information
Number: 257/E21.347
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Radiation treatment (epo) > With high-energy radiation (epo) > Using electromagnetic radiation, e.g., laser radiation (epo)
Description: This subclass is indented under subclass E21.331. This subclass is substantially the same in scope as ECLA classification H01L21/268.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.349 Using incoherent radiation (epo) 85
257/E21.348 Using x-ray laser (epo) 7

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14

Patent Number Title Of Patent Date Issued
8703582 Laser processing method Apr. 22, 2014
8691605 Crystallization processing for semiconductor applications Apr. 8, 2014
8685269 Laser processing method Apr. 1, 2014
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8664116 Heat treatment method for growing silicide Mar. 4, 2014
8652974 Method and system for pre-heating of semiconductor material for laser annealing and gas immersion laser doping Feb. 18, 2014
8652893 Semiconductor device and manufacturing method thereof Feb. 18, 2014
8629522 Laser annealing method and device Jan. 14, 2014
8569814 Laser annealing method and laser annealing device Oct. 29, 2013
8569187 Thermal processing apparatus Oct. 29, 2013
8558291 Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device Oct. 15, 2013
8546065 Mask for crystallizing a semiconductor layer and method of crystallizing a semiconductor layer using the same Oct. 1, 2013
8546805 Two-beam laser annealing with improved temperature performance Oct. 1, 2013
8541319 Laser processing method Sep. 24, 2013
8518803 Laser processing method for semiconductor wafer Aug. 27, 2013
8507327 Semiconductor device manufacturing method thereof Aug. 13, 2013
8492862 Sputtering target and manufacturing method thereof, and transistor Jul. 23, 2013
8481378 Effecting selectivity of silicon or silicon-germanium deposition on a silicon or silicon-germanium substrate by doping Jul. 9, 2013
8470721 Magnetic processing of operating electronic materials Jun. 25, 2013
8466074 Method for processing a substrate using a laser beam Jun. 18, 2013
8461033 Heat treatment apparatus and method for heating substrate by light-irradiation Jun. 11, 2013
8445390 Patterning of antistiction films for electromechanical systems devices May. 21, 2013
8445312 Method of manufacturing crystalline silicon solar cells using co diffusion of Boron and Phosphorus May. 21, 2013
8426324 Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method Apr. 23, 2013
8409982 Method of forming solid blind vias through the dielectric coating on high density interconnect (HDI) substrate materials Apr. 2, 2013
8405175 Suitably short wavelength light for laser annealing of silicon in DSA type systems Mar. 26, 2013
8383452 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8367564 Crystallization method of amorphous silicon layer Feb. 5, 2013
8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jan. 29, 2013
8357567 Manufacturing method of semiconductor device Jan. 22, 2013
8357598 Method for manufacturing antenna and method for manufacturing semiconductor device Jan. 22, 2013
8338315 Processes for curing silicon based low-k dielectric materials Dec. 25, 2012
8329600 Method and system for high-speed precise laser trimming and scan lens for use therein Dec. 11, 2012
8324086 Method for manufacturing a semiconductor substrate by laser irradiation Dec. 4, 2012
8319238 Light emitting device with improved light extraction efficiency Nov. 27, 2012
8313965 Crystallization processing for semiconductor applications Nov. 20, 2012
8309421 Dual-bulb lamphead control methodology Nov. 13, 2012
8299553 Laser annealing method and device Oct. 30, 2012
8283661 Organic EL display and method for manufacturing same Oct. 9, 2012
8278739 Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof Oct. 2, 2012
8278124 Assembly of ordered carbon shells on semiconducting nanomaterials Oct. 2, 2012
8268656 Optical device wafer processing method Sep. 18, 2012
8268669 Laser optical path detection Sep. 18, 2012
8269328 Stacked die package for peripheral and center device pad layout device Sep. 18, 2012
8258045 Device processing method Sep. 4, 2012
8252667 Laser processing method for semiconductor wafer Aug. 28, 2012
8242021 Method for manufacturing semiconductor device Aug. 14, 2012
8242585 Semiconductor device and method for manufacturing the same Aug. 14, 2012
8216867 Front end scribing of light emitting diode (LED) wafers and resulting devices Jul. 10, 2012
8187983 Methods for fabricating semiconductor components using thinning and back side laser processing May. 29, 2012

1 2 3 4 5 6 7 8 9 10 11 12 13 14

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