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Class Information
Number: 257/E21.328
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Radiation treatment (epo)
Description: This subclass is indented under subclass E21.085. This subclass is substantially the same in scope as ECLA classification H01L21/26.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.33 To produce chemical element by transmutation (epo) 32
257/E21.329 Using natural radiation, e.g., alpha , beta or gamma radiation (epo) 42
257/E21.331 With high-energy radiation (epo) 90

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685269 Laser processing method Apr. 1, 2014
8664098 Plasma processing apparatus Mar. 4, 2014
8642488 Multi-step system and method for curing a dielectric film Feb. 4, 2014
8643174 Calibration of temperature sensitive circuits with heater elements Feb. 4, 2014
8628993 Method for using laser ablation process for forming solar cell components Jan. 14, 2014
8557719 Method for fabricating semiconductor device Oct. 15, 2013
8558291 Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device Oct. 15, 2013
8557669 MOSFET device with localized stressor Oct. 15, 2013
8552533 Compound semiconductor substrate and method for manufacturing the same Oct. 8, 2013
8536052 Semiconductor device comprising contact elements with silicided sidewall regions Sep. 17, 2013
8501638 Laser annealing scanning methods with reduced annealing non-uniformities Aug. 6, 2013
8492295 On-chip cooling for integrated circuits Jul. 23, 2013
8431419 UV absorption based monitor and control of chloride gas stream Apr. 30, 2013
8426262 Stress adjustment in stressed dielectric materials of semiconductor devices by stress relaxation based on radiation Apr. 23, 2013
8426297 Method for manufacturing semiconductor wafer Apr. 23, 2013
8426285 Method of fabricating semiconductor device Apr. 23, 2013
8415670 Methods of producing high uniformity in thin film transistor devices fabricated on laterally crystallized thin films Apr. 9, 2013
8394703 Manufacturing method of SOI substrate and manufacturing method of semiconductor device Mar. 12, 2013
8377807 Method for minimizing defects in a semiconductor substrate due to ion implantation Feb. 19, 2013
8373161 Organic thin film transistor Feb. 12, 2013
8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jan. 29, 2013
8357620 Laser annealing method and laser annealing apparatus Jan. 22, 2013
8344475 Integrated circuit heating to effect in-situ annealing Jan. 1, 2013
8334532 IGZO-based oxide material and method of producing IGZO-based oxide material Dec. 18, 2012
8318555 Method of producing a hybrid substrate having a continuous buried electrically insulating layer Nov. 27, 2012
8314371 Rapid thermal processing chamber with micro-positioning system Nov. 20, 2012
8309475 Apparatus and method of aligning and positioning a cold substrate on a hot surface Nov. 13, 2012
8298966 On-chip cooling systems for integrated circuits Oct. 30, 2012
8278163 Semiconductor processing apparatus and semiconductor processing method Oct. 2, 2012
8273525 Systems and methods for forming defects on graphitic materials and curing radiation-damaged graphitic materials Sep. 25, 2012
8263475 Method for manufacturing heterostructures Sep. 11, 2012
8252609 Curvature reduction for semiconductor wafers Aug. 28, 2012
8153538 Process for annealing semiconductor wafers with flat dopant depth profiles Apr. 10, 2012
8148190 Semiconductor device and method of manufacturing the same Apr. 3, 2012
8110417 Method of forming pattern on group III nitride semiconductor substrate and method of manufacturing group III nitride semiconductor light emitting device Feb. 7, 2012
8101510 Plasma processing apparatus Jan. 24, 2012
8097543 Apparatus and method of aligning and positioning a cold substrate on a hot surface Jan. 17, 2012
8084374 Tuning of photo-absorption materials through use of magnetic fields Dec. 27, 2011
8076226 Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device Dec. 13, 2011
8067302 Defect-free junction formation using laser melt annealing of octadecaborane self-amorphizing implants Nov. 29, 2011
8048754 Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer Nov. 1, 2011
8048783 Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Nov. 1, 2011
8021962 Functional film containing structure and method of manufacturing functional film Sep. 20, 2011
7977256 Method for removing a pore-generating material from an uncured low-k dielectric film Jul. 12, 2011
7928021 System for and method of microwave annealing semiconductor material Apr. 19, 2011
7915102 Methods of fabricating thin film transistor and organic light emitting display device using the same Mar. 29, 2011
7906384 Semiconductor devices having tensile and/or compressive stress and methods of manufacturing Mar. 15, 2011
7902091 Cleaving of substrates Mar. 8, 2011
7897523 Substrate heating apparatus, heating method, and semiconductor device manufacturing method Mar. 1, 2011
7858410 Surface emitting semiconductor laser, its manufacturing method, and manufacturing method of electron device Dec. 28, 2010

1 2 3

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