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Class Information
Number: 257/E21.328
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Radiation treatment (epo)
Description: This subclass is indented under subclass E21.085. This subclass is substantially the same in scope as ECLA classification H01L21/26.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7589032 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment |
Sep. 15, 2009 |
| 7585790 |
Method for forming semiconductor device |
Sep. 8, 2009 |
| 7582492 |
Method of doping impurities, and electronic element using the same |
Sep. 1, 2009 |
| 7553772 |
Process and apparatus for simultaneous light and radical surface treatment of integrated circuit structure |
Jun. 30, 2009 |
| 7553778 |
Method for producing a semiconductor device including crystallizing an amphorous semiconductor film |
Jun. 30, 2009 |
| 7528009 |
Wafer-leveled chip packaging structure and method thereof |
May. 5, 2009 |
| 7524777 |
Method for manufacturing an isolation structure using an energy beam treatment |
Apr. 28, 2009 |
| 7521382 |
High resistivity silicon structure and a process for the preparation thereof |
Apr. 21, 2009 |
| 7521383 |
Manufacturing method of semiconductor device |
Apr. 21, 2009 |
| 7510985 |
Method to manufacture high-precision RFID straps and RFID antennas using a laser |
Mar. 31, 2009 |
| 7507648 |
Methods of fabricating crystalline silicon film and thin film transistors |
Mar. 24, 2009 |
| 7482254 |
Apparatus and methods for thermally processing undoped and lightly doped substrates without pre-heating |
Jan. 27, 2009 |
| 7473622 |
Laser annealing method and manufacturing method of a semiconductor device |
Jan. 6, 2009 |
| 7442625 |
Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device |
Oct. 28, 2008 |
| 7351638 |
Scanning laser thermal annealing |
Apr. 1, 2008 |
| 7294526 |
Nano optical sensors via molecular self-assembly |
Nov. 13, 2007 |
| 7294590 |
System and method for removing charges with enhanced efficiency |
Nov. 13, 2007 |
| 7241708 |
Laser irradiation method that includes moving a center of rotation along a straight line in order to enhance the crystallinity of the semiconductor film |
Jul. 10, 2007 |
| 7223670 |
DUV laser annealing and stabilization of SiCOH films |
May. 29, 2007 |
| 7224008 |
Self-aligned production method for an insulated gate semiconductor device cell and insulated gate semiconductor device cell |
May. 29, 2007 |
| 7084068 |
Annealing furnace, manufacturing apparatus, annealing method and manufacturing method of electronic device |
Aug. 1, 2006 |
| 4784723 |
Method for producing a single-crystalline layer |
Nov. 15, 1988 |
| 4731855 |
Pattern defect inspection apparatus |
Mar. 15, 1988 |
| 4580157 |
Semiconductor device having a soft-error preventing structure |
Apr. 1, 1986 |
| 4554568 |
Temperature-compensated Zener diode |
Nov. 19, 1985 |
| 4541003 |
Semiconductor device including an alpha-particle shield |
Sep. 10, 1985 |
| 4295265 |
Method for producing a nonvolatile semiconductor memory |
Oct. 20, 1981 |
| 4288911 |
Method for qualifying biased integrated circuits on a wafer level |
Sep. 15, 1981 |
| 4277882 |
Method of producing a metal-semiconductor field-effect transistor |
Jul. 14, 1981 |
| 4234355 |
Method for manufacturing a semiconductor element utilizing thermal neutron irradiation and annealing |
Nov. 18, 1980 |
| 4224083 |
Dynamic isolation of conductivity modulation states in integrated circuits |
Sep. 23, 1980 |
| 4210464 |
Method of simultaneously controlling the lifetimes and leakage currents in semiconductor devices by hot electron irradiation through passivating glass layers |
Jul. 1, 1980 |
| 4193003 |
Method for controlling the migration of a chemical species within a solid substrate |
Mar. 11, 1980 |
| 4184896 |
Surface barrier tailoring of semiconductor devices utilizing scanning electron microscope produced ionizing radiation |
Jan. 22, 1980 |
| 4170500 |
Process for forming field dielectric regions in semiconductor structures without encroaching on device regions |
Oct. 9, 1979 |
| 3938178 |
Process for treatment of semiconductor |
Feb. 10, 1976 |
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