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Class Information
Number: 257/E21.321
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To modify their internal properties, e.g., to produce internal imperfections (epo) > Of silicon body, e.g., for gettering (epo) > Thermally inducing defects using oxygen present in silicon body for intrinsic gettering (epo)
Description: This subclass is indented under subclass E21.318. This subclass is substantially the same in scope as ECLA classification H01L21/322B8.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8569149 Method of treating a semiconductor device Oct. 29, 2013
8557641 Semiconductor device and method for manufacturing the same Oct. 15, 2013
8486813 Silicon wafer and fabrication method thereof Jul. 16, 2013
8481393 Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device Jul. 9, 2013
8466043 Process of internal gettering for Czochralski silicon wafer Jun. 18, 2013
8349646 Semiconductor wafer for semiconductor components and production method Jan. 8, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8316745 Semiconductor wafer pre-process annealing and gettering method and system for solar cell formation Nov. 27, 2012
8207048 Method for producing ordered nanostructures Jun. 26, 2012
8093089 Methods of manufacturing image sensors including gettering regions Jan. 10, 2012
8026145 Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering Sep. 27, 2011
8008107 Semiconductor wafer pre-process annealing and gettering method and system for solar cell formation Aug. 30, 2011
7989321 Semiconductor device gate structure including a gettering layer Aug. 2, 2011
7977216 Silicon wafer and fabrication method thereof Jul. 12, 2011
7968459 Ion implantation combined with in situ or ex situ heat treatment for improved field effect transistors Jun. 28, 2011
7851318 Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device Dec. 14, 2010
7811912 Method for manufacturing semiconductor device Oct. 12, 2010
7803715 Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmask Sep. 28, 2010
7799651 Method of treating interface defects in a substrate Sep. 21, 2010
7790563 Semiconductor device, electronic device and method for manufacturing semiconductor device Sep. 7, 2010
7776723 Method of manufacturing an epitaxial semiconductor substrate and method of manufacturing a semiconductor device Aug. 17, 2010
7621996 Silicon wafer and method for producing same Nov. 24, 2009
7585683 Methods of fabricating ferroelectric devices Sep. 8, 2009
7538008 Method for producing a layer structure May. 26, 2009
7507640 Method for producing silicon wafer Mar. 24, 2009
7485929 Semiconductor-on-insulator (SOI) strained active areas Feb. 3, 2009
7485928 Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering Feb. 3, 2009
7422634 Three inch silicon carbide wafer with low warp, bow, and TTV Sep. 9, 2008
7410877 Method for manufacturing SIMOX wafer and SIMOX wafer Aug. 12, 2008
7397063 Semiconductor device Jul. 8, 2008
7368823 Semiconductor device and method of manufacturing the same May. 6, 2008
7326658 Method for preparing nitrogen-doped annealed wafer and nitrogen-doped and annealed wafer Feb. 5, 2008
7242075 Silicon wafers and method of fabricating the same Jul. 10, 2007
7071079 Epitaxial wafer and a method for producing it Jul. 4, 2006
7033962 Methods for manufacturing silicon wafer and silicone epitaxial wafer, and silicon epitaxial wafer Apr. 25, 2006
7011717 Method for heat treatment of silicon wafers and silicon wafer Mar. 14, 2006
6958092 Epitaxial silicon wafer with intrinsic gettering and a method for the preparation thereof Oct. 25, 2005
6896728 Process for producing low defect density, ideal oxygen precipitating silicon May. 24, 2005
6897084 Control of oxygen precipitate formation in high resistivity CZ silicon May. 24, 2005
6893944 Method of manufacturing a semiconductor wafer May. 17, 2005
6878645 Method for manufacturing silicon wafer Apr. 12, 2005
6858094 Silicon wafer and silicon epitaxial wafer and production methods therefor Feb. 22, 2005
6849119 Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor Feb. 1, 2005
6849901 Device layer of a silicon-on-insulator structure having vacancy dominated and substantially free of agglomerated vacancy-type defects Feb. 1, 2005
6843847 Silicon single crystal wafer and production method thereof and soi wafer Jan. 18, 2005
6840997 Vacancy, dominsated, defect-free silicon Jan. 11, 2005
6833195 Low temperature germanium transfer Dec. 21, 2004
6821344 Czochralski pullers including heat shield housings having sloping top and bottom Nov. 23, 2004
6818197 Epitaxial wafer Nov. 16, 2004
6809015 Method for heat treatment of silicon wafers and silicon wafer Oct. 26, 2004

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