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Class Information
Number: 257/E21.318
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To modify their internal properties, e.g., to produce internal imperfections (epo) > Of silicon body, e.g., for gettering (epo)
Description: This subclass is indented under subclass E21.317. This subclass is substantially the same in scope as ECLA classification H01L21/322B.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7621996 |
Silicon wafer and method for producing same |
Nov. 24, 2009 |
| 7615823 |
SOI substrate and method of manufacturing the same |
Nov. 10, 2009 |
| 7611970 |
Wafer processing method |
Nov. 3, 2009 |
| 7611972 |
Semiconductor devices and methods of manufacture thereof |
Nov. 3, 2009 |
| 7582899 |
Semiconductor device having overlay measurement mark and method of fabricating the same |
Sep. 1, 2009 |
| 7564082 |
Gettering using voids formed by surface transformation |
Jul. 21, 2009 |
| 7538011 |
Method of manufacturing a semiconductor device |
May. 26, 2009 |
| 7538044 |
Process for producing high-purity silicon and apparatus |
May. 26, 2009 |
| 7524713 |
Manufacturing method of semiconductor device |
Apr. 28, 2009 |
| 7507640 |
Method for producing silicon wafer |
Mar. 24, 2009 |
| 7445959 |
Sensor module and method of manufacturing same |
Nov. 4, 2008 |
| 7397063 |
Semiconductor device |
Jul. 8, 2008 |
| 7397110 |
High resistance silicon wafer and its manufacturing method |
Jul. 8, 2008 |
| 7364987 |
Method for manufacturing semiconductor device |
Apr. 29, 2008 |
| 7332385 |
Method of manufacturing a semiconductor device that includes gettering regions |
Feb. 19, 2008 |
| 7326597 |
Gettering using voids formed by surface transformation |
Feb. 5, 2008 |
| 7323398 |
Method of layer transfer comprising sequential implantations of atomic species |
Jan. 29, 2008 |
| 7316947 |
Method of manufacturing a semiconductor device |
Jan. 8, 2008 |
| 7195990 |
Process for producing a photoelectric conversion device that includes using a gettering process |
Mar. 27, 2007 |
| 7193294 |
Semiconductor substrate comprising a support substrate which comprises a gettering site |
Mar. 20, 2007 |
| 7135386 |
Process for fabricating a semiconductor device |
Nov. 14, 2006 |
| 7126194 |
Method for removing impurities of a semiconductor wafer, semiconductor wafer assembly, and semiconductor device |
Oct. 24, 2006 |
| 6946711 |
Semiconductor device |
Sep. 20, 2005 |
| 6924213 |
Semiconductor device and process for fabricating the same |
Aug. 2, 2005 |
| 6864516 |
SOI MOSFET junction degradation using multiple buried amorphous layers |
Mar. 8, 2005 |
| 6855207 |
Apparatus and system for eliminating contaminants on a substrate surface |
Feb. 15, 2005 |
| 6852371 |
Metal processing for impurity gettering in silicon |
Feb. 8, 2005 |
| 6833195 |
Low temperature germanium transfer |
Dec. 21, 2004 |
| 6830991 |
Method of manufacturing a semiconductor device including a gettering operation |
Dec. 14, 2004 |
| 6828690 |
Non-uniform minority carrier lifetime distributions in high performance silicon power devices |
Dec. 7, 2004 |
| 6828614 |
Semiconductor constructions, and methods of forming semiconductor constructions |
Dec. 7, 2004 |
| 6825072 |
Method of manufacturing a semiconductor device |
Nov. 30, 2004 |
| 6821828 |
Method of manufacturing a semiconductor device |
Nov. 23, 2004 |
| 6818569 |
Method of fabricating annealed wafer |
Nov. 16, 2004 |
| 6808968 |
Method of manufacturing a semiconductor device |
Oct. 26, 2004 |
| 6743700 |
Semiconductor film, semiconductor device and method of their production |
Jun. 1, 2004 |
| 6715497 |
Treatment to eliminate polysilicon defects induced by metallic contaminants |
Apr. 6, 2004 |
| 6670640 |
Method for producing semiconductor device |
Dec. 30, 2003 |
| 6670225 |
Method of manufacturing a semiconductor device |
Dec. 30, 2003 |
| 6649427 |
Method for evaluating impurity concentrations in epitaxial susceptors |
Nov. 18, 2003 |
| 6635950 |
Semiconductor device having buried boron and carbon regions, and method of manufacture thereof |
Oct. 21, 2003 |
| 6632688 |
Method for evaluating impurity concentrations in epitaxial reagent gases |
Oct. 14, 2003 |
| 6630363 |
Method for evaluating impurity concentrations in unpolished wafers grown by the Czochralski method |
Oct. 7, 2003 |
| 6624049 |
Semiconductor device and method of manufacturing the same |
Sep. 23, 2003 |
| 6620632 |
Method for evaluating impurity concentrations in semiconductor substrates |
Sep. 16, 2003 |
| 6599817 |
Semiconductor constructions, and methods of forming semiconductor constructions |
Jul. 29, 2003 |
| 6576501 |
Double side polished wafers having external gettering sites, and method of producing same |
Jun. 10, 2003 |
| 6569749 |
Silicon and oxygen ion co-implanation for metallic gettering in epitaxial wafers |
May. 27, 2003 |
| 6562733 |
Semiconductor device manufacturing method |
May. 13, 2003 |
| 6551866 |
Method of manufacturing a semiconductor memory device |
Apr. 22, 2003 |
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