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Class Information
Number: 257/E21.314
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Deposition/post-treatment of noninsulating, e.g., conductive - or resistive - layers on insulating layers (epo) > Post treatment (epo) > Physical or chemical etching of layer, e.g., to produce a patterned layer from pre-deposited extensive layer (epo) > Using mask (epo)
Description: This subclass is indented under subclass E21.305. This subclass is substantially the same in scope as ECLA classification H01L21/3213D.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8664040 Exposing connectors in packages through selective treatment Mar. 4, 2014
8629064 Multiple patterning lithography using spacer and self-aligned assist patterns Jan. 14, 2014
8586482 Film stack including metal hardmask layer for sidewall image transfer fin field effect transistor formation Nov. 19, 2013
8580692 Film stack including metal hardmask layer for sidewall image transfer fin field effect transistor formation Nov. 12, 2013
8513033 Method, design apparatus, and design program of semiconductor device, and semiconductor device Aug. 20, 2013
8501499 Adaptive recipe selector Aug. 6, 2013
8384135 Phase-change random access memory device and method of manufacturing the same Feb. 26, 2013
8119533 Pattern formation in semiconductor fabrication Feb. 21, 2012
7981797 Phase-change random access memory device and method of manufacturing the same Jul. 19, 2011
7964900 Semiconductor device with semi-insulating substrate portions Jun. 21, 2011
7951682 Method for fabricating capacitor in semiconductor device May. 31, 2011
7867911 Method for forming pattern using hard mask Jan. 11, 2011
7807574 Etching method using hard mask in semiconductor device Oct. 5, 2010
7794793 Carbon nanotube arrays for field electron emission and methods of manufacture and use Sep. 14, 2010
7767582 Method of manufacturing semiconductor device Aug. 3, 2010
7754591 Method for forming fine pattern of semiconductor device Jul. 13, 2010
7745349 Method for fabricating semiconductor transistor Jun. 29, 2010
7700435 Method for fabricating deep trench DRAM array Apr. 20, 2010
7696027 Method of fabricating display substrate and method of fabricating display panel using the same Apr. 13, 2010
7678588 Method for constructing module for optical critical dimension (OCD) and measuring method of module for optical critical dimension using the module Mar. 16, 2010
7648918 Method of pattern formation in semiconductor fabrication Jan. 19, 2010
7638369 Semiconductor chip and method of fabricating the same Dec. 29, 2009
7625493 Method for manufacturing display device Dec. 1, 2009
7622336 Manufacturing method of semiconductor device Nov. 24, 2009
7622358 Semiconductor device with semi-insulating substrate portions and method for forming the same Nov. 24, 2009
7575998 Semiconductor device and metal line fabrication method of the same Aug. 18, 2009
7541286 Method for manufacturing semiconductor device using KrF light source Jun. 2, 2009
7524733 Asymmetric source/drain transistor employing selective epitaxial growth (SEG) layer and method of fabricating same Apr. 28, 2009
7504676 Planar split-gate high-performance MOSFET structure and manufacturing method Mar. 17, 2009
7498232 Semiconductor devices and methods of manufacture thereof Mar. 3, 2009
7491600 Nanocrystal bitcell process integration for high density application Feb. 17, 2009
7482268 Top layers of metal for integrated circuits Jan. 27, 2009
7473611 Methods of forming non-volatile memory cells including fin structures Jan. 6, 2009
7413960 Method of forming floating gate electrode in flash memory device Aug. 19, 2008
7413963 Method of edge bevel rinse Aug. 19, 2008
7399703 Process for patterning nanocarbon material, semiconductor device, and method for manufacturing semiconductor device Jul. 15, 2008
7351666 Layout and process to contact sub-lithographic structures Apr. 1, 2008
7341960 Method for making a metal oxide semiconductor device Mar. 11, 2008
7271022 Process for forming microstructures Sep. 18, 2007
7060626 Multi-run selective pattern and etch wafer process Jun. 13, 2006
7060628 Method for fabricating a hard mask polysilicon gate Jun. 13, 2006
7056446 Method of manufacturing nano-gap electrode Jun. 6, 2006
7056824 Electronic device manufacture Jun. 6, 2006
7051454 Method for etching a metal layer in a semiconductor device May. 30, 2006
7049703 Semiconductor device having a tapered interconnection with insulating material on conductive sidewall thereof within through hole May. 23, 2006
7049169 Method of fabricating a semiconductor device May. 23, 2006
7049245 Two-step GC etch for GC profile and process window improvement May. 23, 2006
7045837 Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing May. 16, 2006
7045070 Method of producing an electrode configuration and method of electrically contacting the electrode configuration May. 16, 2006
7029925 FeRAM capacitor stack etch Apr. 18, 2006

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