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Class Information
Number: 257/E21.31
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Deposition/post-treatment of noninsulating, e.g., conductive - or resistive - layers on insulating layers (epo) > Post treatment (epo) > Physical or chemical etching of layer, e.g., to produce a patterned layer from pre-deposited extensive layer (epo) > By chemical means only (epo) > By vapor etching only (epo)
Description: This subclass is indented under subclass E21.308. This subclass is substantially the same in scope as ECLA classification H01L21/3213C4.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.311 Using plasma (epo) 890
257/E21.313 Pre- or post-treatment, e.g., anti-corrosion process (epo) 428

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8598039 Barrier layer removal method and apparatus Dec. 3, 2013
8471994 Liquid crystal display device and method for fabricating the same Jun. 25, 2013
8441070 Semiconductor device and method of manufacturing semiconductor device May. 14, 2013
8264037 Semiconductor device and method of manufacturing semiconductor device Sep. 11, 2012
8258063 Method for manufacturing a metal gate electrode/high K dielectric gate stack Sep. 4, 2012
8120104 Semiconductor device and method of manufacturing semiconductor device Feb. 21, 2012
7981734 Manufacturing method of thin film transistor including low resistance conductive thin films Jul. 19, 2011
7952675 Liquid crystal display device and method for fabricating the same May. 31, 2011
7759748 Semiconductor device with reduced diffusion of workfunction modulating element Jul. 20, 2010
7718457 Method for producing a MEMS device May. 18, 2010
7709394 Substrate processing method and apparatus fabrication process of a semiconductor device May. 4, 2010
7572685 Method of manufacturing thin film transistor Aug. 11, 2009
7553721 Flash memory devices and methods of fabricating the same Jun. 30, 2009
7486366 Liquid crystal display device and method for fabricating the same Feb. 3, 2009
7419916 Manufacturing method of semiconductor device Sep. 2, 2008
7371688 Removal of transition metal ternary and/or quaternary barrier materials from a substrate May. 13, 2008
7259105 Methods of fabricating gate spacers for semiconductor devices Aug. 21, 2007
7208424 Method of forming a semiconductor device having a metal layer Apr. 24, 2007
7166543 Methods for forming an enriched metal oxide surface for use in a semiconductor device Jan. 23, 2007
7071565 Patterning three dimensional structures Jul. 4, 2006
7025896 Process for treating solid surface and substrate surface Apr. 11, 2006
7015524 Method of etching magnetic material, magnetoresistive film and magnetic random access memory Mar. 21, 2006
6998347 Method of reworking layers over substrate Feb. 14, 2006
6987067 Semiconductor copper line cutting method Jan. 17, 2006
6972257 Conductive material patterning methods Dec. 6, 2005
6939796 System, method and apparatus for improved global dual-damascene planarization Sep. 6, 2005
6926843 Etching of hard masks Aug. 9, 2005
6900137 Dry etch process to edit copper lines May. 31, 2005
6875698 Dry etching method Apr. 5, 2005
6841084 Etching solution for forming an embedded resistor Jan. 11, 2005
6821899 System, method and apparatus for improved local dual-damascene planarization Nov. 23, 2004
6821836 Disposable spacer Nov. 23, 2004
6815368 Semiconductor substrate cleaning Nov. 9, 2004
6805138 Semiconductor device production method and semiconductor device production apparatus Oct. 19, 2004
6806198 Gas-assisted etch with oxygen Oct. 19, 2004
6794302 Dynamic feed forward temperature control to achieve CD etching uniformity Sep. 21, 2004
6777297 Disposable spacer and method of forming and using same Aug. 17, 2004
6756312 Method of fabricating a semiconductor device including time-selective etching process Jun. 29, 2004
6730600 Method of dry etching a semiconductor device in the absence of a plasma May. 4, 2004
6706642 Method for fabricating semiconductor capacitors Mar. 16, 2004
6664184 Method for manufacturing semiconductor device having an etching treatment Dec. 16, 2003
6664179 Semiconductor device production method and semiconductor device production apparatus Dec. 16, 2003
6630716 Disposable spacer Oct. 7, 2003
6627530 Patterning three dimensional structures Sep. 30, 2003
6613242 Process for treating solid surface and substrate surface Sep. 2, 2003
6602653 Conductive material patterning methods Aug. 5, 2003
6540930 Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases Apr. 1, 2003
6537461 Process for treating solid surface and substrate surface Mar. 25, 2003
6524958 Method of forming channel in thin film transistor using non-ionic excited species Feb. 25, 2003
6514808 Transistor having a high K dielectric and short gate length and method therefor Feb. 4, 2003

1 2 3

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