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Class Information
Number: 257/E21.304
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Deposition/post-treatment of noninsulating, e.g., conductive - or resistive - layers on insulating layers (epo) > Post treatment (epo) > Planarization (epo) > By chemical mechanical polishing (cmp) (epo)
Description: This subclass is indented under subclass E21.303. This subclass is substantially the same in scope as ECLA classification H01L21/321P2.










Patents under this class:

Patent Number Title Of Patent Date Issued
8709957 Spalling utilizing stressor layer portions Apr. 29, 2014
8709915 Method of manufacturing semiconductor device Apr. 29, 2014
8679979 Using optical metrology for within wafer feed forward process control Mar. 25, 2014
8658538 Method of fabricating memory device Feb. 25, 2014
8647988 Memory device and method of fabricating the same Feb. 11, 2014
8647986 Semiconductor process Feb. 11, 2014
8633105 Method of fabricating a self-aligning damascene memory structure Jan. 21, 2014
8629031 Method for manufacturing SOI substrate and semiconductor device Jan. 14, 2014
8624313 Method of manufacturing semiconductor memory device Jan. 7, 2014
8618668 Semiconductor contact barrier Dec. 31, 2013
8618615 Semiconductor device and fabrication method thereof Dec. 31, 2013
8592882 Magnetic random access memory and manufacturing method thereof Nov. 26, 2013
8574926 Magnetic memory and manufacturing method thereof Nov. 5, 2013
8564038 Nonvolatile semiconductor memory device including resistive element Oct. 22, 2013
8563335 Method of controlling polishing using in-situ optical monitoring and fourier transform Oct. 22, 2013
8552510 Semiconductor device having ring-shaped gate electrode, design apparatus, and program Oct. 8, 2013
8551886 CMP process for processing STI on two distinct silicon planes Oct. 8, 2013
8540894 Polishing composition Sep. 24, 2013
8530932 Replacement spacer for tunnel FETS Sep. 10, 2013
8497208 Semiconductor device and method for manufacturing the same Jul. 30, 2013
8492862 Sputtering target and manufacturing method thereof, and transistor Jul. 23, 2013
8492276 Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Jul. 23, 2013
8492264 Method for forming interconnection levels of an integrated circuit Jul. 23, 2013
8492196 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jul. 23, 2013
8481393 Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device Jul. 9, 2013
8480920 Chemical mechanical polishing aqueous dispersion, method of preparing the same, chemical mechanical polishing aqueous dispersion preparation kit, and chemical mechanical polishing method Jul. 9, 2013
8475599 Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions Jul. 2, 2013
8471321 Semiconductor device comprising capacitor and method of fabricating the same Jun. 25, 2013
8470195 Chemical mechanical polishing aqueous dispersion preparation set, method of preparing chemical mechanical polishing aqueous dispersion, chemical mechanical polishing aqueous dispersion, and ch Jun. 25, 2013
8461040 Method of forming shielded gate power transistor utilizing chemical mechanical planarization Jun. 11, 2013
8455365 Self-aligned carbon electronics with embedded gate electrode Jun. 4, 2013
8455314 Transistors comprising high-K metal gate electrode structures and embedded strain-inducing semiconductor alloys formed in a late stage Jun. 4, 2013
8445387 Epitaxial silicon growth May. 21, 2013
8436439 Semiconductor device and method of forming a shielding layer over a semiconductor die after forming a build-up interconnect structure May. 7, 2013
8426925 Memory device and method of fabricating the same Apr. 23, 2013
8421137 Magnetic random access memory Apr. 16, 2013
8420529 Copper wiring surface protective liquid and method for manufacturing semiconductor circuit Apr. 16, 2013
8415728 Memory device and method of fabricating the same Apr. 9, 2013
8409993 Method and system for controlling copper chemical mechanical polish uniformity Apr. 2, 2013
8399936 Through substrate via semiconductor components Mar. 19, 2013
8399329 Method for manufacturing SOI substrate and semiconductor device Mar. 19, 2013
8394719 System and method for implementing multi-resolution advanced process control Mar. 12, 2013
8390135 Semiconductor device Mar. 5, 2013
8390074 Structure and method for latchup improvement using through wafer via latchup guard ring Mar. 5, 2013
8389417 Semiconductor device and manufacturing method thereof Mar. 5, 2013
8389399 Method of fabricating a self-aligning damascene memory structure Mar. 5, 2013
8378497 Contact structures and semiconductor devices including the same Feb. 19, 2013
8368134 Nonvolatile memory device and method for fabricating the same Feb. 5, 2013
8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jan. 29, 2013
8354699 Method and apparatus providing CMOS imager device pixel with transistor having lower threshold voltage than other imager device transistors Jan. 15, 2013











 
 
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