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Class Information
Number: 257/E21.304
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Deposition/post-treatment of noninsulating, e.g., conductive - or resistive - layers on insulating layers (epo) > Post treatment (epo) > Planarization (epo) > By chemical mechanical polishing (cmp) (epo)
Description: This subclass is indented under subclass E21.303. This subclass is substantially the same in scope as ECLA classification H01L21/321P2.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615456 |
Method for manufacturing SOI substrate |
Nov. 10, 2009 |
| 7615443 |
Method of forming finFET device |
Nov. 10, 2009 |
| 7615428 |
Vertical memory device and method |
Nov. 10, 2009 |
| 7608543 |
Method for planarizing thin layer of semiconductor device |
Oct. 27, 2009 |
| 7608514 |
MSM binary switch memory |
Oct. 27, 2009 |
| 7605092 |
Passive elements, articles, packages, semiconductor composites, and methods of manufacturing same |
Oct. 20, 2009 |
| 7605074 |
Chemical mechanical polishing and method for manufacturing semiconductor device using the same |
Oct. 20, 2009 |
| 7605071 |
Controlling lateral distribution of air gaps in interconnects |
Oct. 20, 2009 |
| 7598180 |
Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby |
Oct. 6, 2009 |
| 7585765 |
Formation of oxidation-resistant seed layer for interconnect applications |
Sep. 8, 2009 |
| 7585683 |
Methods of fabricating ferroelectric devices |
Sep. 8, 2009 |
| 7582566 |
Method for redirecting void diffusion away from vias in an integrated circuit design |
Sep. 1, 2009 |
| 7579273 |
Method of manufacturing a photodiode array with through-wafer vias |
Aug. 25, 2009 |
| 7576007 |
Method for electrochemically mechanically polishing a conductive material on a substrate |
Aug. 18, 2009 |
| 7575962 |
Fin structure and method of manufacturing fin transistor adopting the fin structure |
Aug. 18, 2009 |
| 7566574 |
Method of performing a double-sided process |
Jul. 28, 2009 |
| 7563719 |
Dual damascene process |
Jul. 21, 2009 |
| 7563717 |
Method for fabricating a semiconductor device |
Jul. 21, 2009 |
| 7560386 |
Method of manufacturing nonvolatile semiconductor memory device |
Jul. 14, 2009 |
| 7557002 |
Methods of forming transistor devices |
Jul. 7, 2009 |
| 7556972 |
Detection and characterization of SiCOH-based dielectric materials during device fabrication |
Jul. 7, 2009 |
| 7554171 |
Semiconductor constructions |
Jun. 30, 2009 |
| 7553677 |
Method for manufacturing ferroelectric memory |
Jun. 30, 2009 |
| 7550380 |
Electroless plating of metal caps for chalcogenide-based memory devices |
Jun. 23, 2009 |
| 7550354 |
Nanoelectromechanical transistors and methods of forming same |
Jun. 23, 2009 |
| 7547627 |
Method for manufacturing semiconductor device |
Jun. 16, 2009 |
| 7544983 |
MTJ read head with sidewall spacers |
Jun. 9, 2009 |
| 7544618 |
Two-step chemical mechanical polishing process |
Jun. 9, 2009 |
| 7538035 |
Lapping of gold pads in a liquid medium for work hardening the surface of the pads |
May. 26, 2009 |
| 7538005 |
Semiconductor device and method for fabricating the same |
May. 26, 2009 |
| 7535077 |
Method for manufacturing a semiconductor device including a shallow trench isolation structure |
May. 19, 2009 |
| 7524752 |
Method of manufacturing semiconductor device |
Apr. 28, 2009 |
| 7524742 |
Structure of metal interconnect and fabrication method thereof |
Apr. 28, 2009 |
| 7524733 |
Asymmetric source/drain transistor employing selective epitaxial growth (SEG) layer and method of fabricating same |
Apr. 28, 2009 |
| 7524722 |
Resistance type memory device and fabricating method and operating method thereof |
Apr. 28, 2009 |
| 7518214 |
Semiconductor device and method of fabricating the same |
Apr. 14, 2009 |
| 7514366 |
Methods for forming shallow trench isolation |
Apr. 7, 2009 |
| 7510972 |
Method of processing substrate, post-chemical mechanical polishing cleaning method, and method of and program for manufacturing electronic device |
Mar. 31, 2009 |
| 7498273 |
Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II--remote plasma enhanced deposition processes |
Mar. 3, 2009 |
| 7498265 |
Epitaxial silicon growth |
Mar. 3, 2009 |
| 7498214 |
Semiconductor devices and manufacturing methods of the same |
Mar. 3, 2009 |
| 7495337 |
Dual-gate device and method |
Feb. 24, 2009 |
| 7491600 |
Nanocrystal bitcell process integration for high density application |
Feb. 17, 2009 |
| 7488686 |
Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures |
Feb. 10, 2009 |
| 7476970 |
Composition for forming insulating film and method for fabricating semiconductor device |
Jan. 13, 2009 |
| 7473630 |
Semiconductor device and method for manufacturing same |
Jan. 6, 2009 |
| 7470998 |
Semiconductor device and method of manufacturing the same |
Dec. 30, 2008 |
| 7465669 |
Method of fabricating a silicon nitride stack |
Dec. 16, 2008 |
| 7465663 |
Semiconductor device fabrication method |
Dec. 16, 2008 |
| 7465625 |
Flash memory cell having reduced floating gate to floating gate coupling |
Dec. 16, 2008 |
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