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Class Information
Number: 257/E21.291
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > To form insulating layer thereon, e.g., for masking or by using photolithographic technique (epo) > Inorganic layer (epo) > Composed of oxide or glassy oxide or oxide based glass (epo) > Formed by oxidation (epo) > Of metallic layer, e.g., al deposited on body, e.g., formation of multi-layer insulating structures (epo) > By anodic oxidation (epo)
Description: This subclass is indented under subclass E21.29. This subclass is substantially the same in scope as ECLA classification H01L21/316C3B.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8470689 Method for forming a multilayer structure Jun. 25, 2013
8288771 Thin film transistor array panel and manufacturing method thereof Oct. 16, 2012
8193030 Methods of fabricating non-volatile memory devices having carbon nanotube layer and passivation layer Jun. 5, 2012
8138046 Process for fabricating a nanowire-based vertical transistor structure Mar. 20, 2012
7977141 Solid-state image pickup device and method of manufacturing the same Jul. 12, 2011
7943519 Etchant, method for fabricating interconnection line using the etchant, and method for fabricating thin film transistor substrate using the etchant May. 17, 2011
7767502 Method for manufacturing electronic device using thin film transistor with protective cap over flexible substrate Aug. 3, 2010
7524750 Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD Apr. 28, 2009
7485024 Fabricating method of field emission triodes Feb. 3, 2009
7479417 Method for manufacturing contact structure of pixel electrode of liquid crystal display device Jan. 20, 2009
7439091 Light-emitting diode and method for manufacturing the same Oct. 21, 2008
7393727 Manufacturing method of thin-film transistor, thin-film transistor sheet, and electric circuit Jul. 1, 2008
7387648 Solid electrolytic capacitor and manufacturing method thereof Jun. 17, 2008
7371674 Nanostructure-based package interconnect May. 13, 2008
7368331 Manufacturing method of thin-film transistor, thin-film transistor sheet, and electric circuit May. 6, 2008
7335538 Method for manufacturing bottom substrate of liquid crystal display device Feb. 26, 2008
7129183 Method of forming grating microstrutures by anodic oxidation Oct. 31, 2006
7060622 Method of forming dummy wafer Jun. 13, 2006
6992368 Production of metal insulator metal (MIM) structures using anodizing process Jan. 31, 2006
6867431 Semiconductor device and method for manufacturing the same Mar. 15, 2005
6838353 Devices having improved capacitance and methods of their fabrication Jan. 4, 2005
6818486 Method of electronic component fabrication and an electronic component Nov. 16, 2004
6815315 Method for electrochemical oxidation Nov. 9, 2004
6660610 Devices having improved capacitance and methods of their fabrication Dec. 9, 2003
6613641 Production of metal insulator metal (MIM) structures using anodizing process Sep. 2, 2003
6506678 Integrated circuit structures having low k porous aluminum oxide dielectric material separating aluminum lines, and method of making same Jan. 14, 2003
6433379 Tantalum anodization for in-laid copper metallization capacitor Aug. 13, 2002
6387771 Low temperature oxidation of conductive layers for semiconductor fabrication May. 14, 2002
6368485 Forming electrolyte for forming metal oxide coating film Apr. 9, 2002
6329226 Method for fabricating a thin-film transistor Dec. 11, 2001
6326246 Method for manufacturing thin film transistor Dec. 4, 2001
6319616 Scaled interconnect anodization for high frequency applications Nov. 20, 2001
6075691 Thin film capacitors and process for making them Jun. 13, 2000
6069070 Multilevel interconnections of electronic components May. 30, 2000
6049092 Semiconductor device and method for manufacturing the same Apr. 11, 2000
6033982 Scaled interconnect anodization for high frequency applications Mar. 7, 2000
6028325 Semiconductor device contact registration structure Feb. 22, 2000
5970326 Thin film transistor films made with anodized film and reverse-anodized etching technique Oct. 19, 1999
5936831 Thin film tantalum oxide capacitors and resulting product Aug. 10, 1999
5880021 Method of making multilevel interconnections of electronic parts Mar. 9, 1999
5811326 Method for manufacturing thin film transistor Sep. 22, 1998
5733661 High-permittivity composite oxide film and uses thereof Mar. 31, 1998
5681439 Configuration of an anode-oxidation preventing portion of a metal line Oct. 28, 1997
5580825 Process for making multilevel interconnections of electronic components Dec. 3, 1996
5418636 Liquid crystal image display apparatus with anodized films of the same thickness and a method of fabricating the same May. 23, 1995
5334544 Method of making thin film transistors Aug. 2, 1994
5306668 Method of fabricating metal-electrode in semiconductor device Apr. 26, 1994
5240868 Method of fabrication metal-electrode in semiconductor device Aug. 31, 1993
5202274 Method of fabricating thin film transistor Apr. 13, 1993
4905066 Thin-film transistor Feb. 27, 1990

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