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Class Information
Number: 257/E21.278
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > To form insulating layer thereon, e.g., for masking or by using photolithographic technique (epo) > Inorganic layer (epo) > Composed of oxide or glassy oxide or oxide based glass (epo) > Deposition from gas or vapor (epo) > Deposition of silicon oxide (epo)
Description: This subclass is indented under subclass E21.274. This subclass is substantially the same in scope as ECLA classification H01L21/316B2.










Sub-classes under this class:

Class Number Class Name Patents
257/E21.279 On silicon body (epo) 949


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8703624 Dielectric films comprising silicon and methods for making same Apr. 22, 2014
8664691 Silicon photomultiplier with trench isolation Mar. 4, 2014
8647988 Memory device and method of fabricating the same Feb. 11, 2014
8629031 Method for manufacturing SOI substrate and semiconductor device Jan. 14, 2014
8603899 Method of manufacturing a semiconductor device Dec. 10, 2013
8587064 Semiconductor device Nov. 19, 2013
8586475 Semiconductor device including gate electrode for applying tensile stress to silicon substrate, and method of manufacturing the same Nov. 19, 2013
8574926 Magnetic memory and manufacturing method thereof Nov. 5, 2013
8564038 Nonvolatile semiconductor memory device including resistive element Oct. 22, 2013
8546262 Solid-state image pickup device, method of manufacturing the same and electronic apparatus Oct. 1, 2013
8536031 Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme Sep. 17, 2013
8536699 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Sep. 17, 2013
8530932 Replacement spacer for tunnel FETS Sep. 10, 2013
8501637 Silicon dioxide thin films by ALD Aug. 6, 2013
8497208 Semiconductor device and method for manufacturing the same Jul. 30, 2013
8497542 ZrXHfYSn1-X-YO2 films as high K gate dielectrics Jul. 30, 2013
8492264 Method for forming interconnection levels of an integrated circuit Jul. 23, 2013
8486835 Czochralski growth of randomly oriented polysilicon and use of randomly oriented polysilicon dummy wafers Jul. 16, 2013
8486839 Methods and apparatus to improve reliability of isolated vias Jul. 16, 2013
8476764 Bonding pad structure for semiconductor devices Jul. 2, 2013
8470693 Method for manufacturing quantum dot Jun. 25, 2013
8466069 Method for manufacturing semiconductor device Jun. 18, 2013
8445387 Epitaxial silicon growth May. 21, 2013
8415728 Memory device and method of fabricating the same Apr. 9, 2013
8409982 Method of forming solid blind vias through the dielectric coating on high density interconnect (HDI) substrate materials Apr. 2, 2013
8409988 Method of manufacturing semiconductor device and substrate processing apparatus Apr. 2, 2013
8399329 Method for manufacturing SOI substrate and semiconductor device Mar. 19, 2013
8390135 Semiconductor device Mar. 5, 2013
8372747 Semiconductor device including gate electrode for applying tensile stress to silicon substrate, and method of manufacturing the same Feb. 12, 2013
8368134 Nonvolatile memory device and method for fabricating the same Feb. 5, 2013
8357562 Method to improve the reliability of the breakdown voltage in high voltage devices Jan. 22, 2013
8354349 Semiconductor device having sealing film and manufacturing method thereof Jan. 15, 2013
8329559 Damascene process for use in fabricating semiconductor structures having micro/nano gaps Dec. 11, 2012
8318584 Oxide-rich liner layer for flowable CVD gapfill Nov. 27, 2012
8304327 Method of manufacturing a semiconductor device Nov. 6, 2012
8294182 Light emitting device Oct. 23, 2012
8269318 MOS device Sep. 18, 2012
8242031 High quality silicon oxide films by remote plasma CVD from disilane precursors Aug. 14, 2012
8236708 Reduced pattern loading using bis(diethylamino)silane (C.sub.8H.sub.22N.sub.2Si) as silicon precursor Aug. 7, 2012
8237264 Method of manufacturing semiconductor device and thermal annealing apparatus Aug. 7, 2012
8222705 Solid-state image pickup device, method of manufacturing the same and electronic apparatus Jul. 17, 2012
8212266 Light emitting device and method of fabricating the same Jul. 3, 2012
8187973 Method for manufacturing semiconductor device and the semiconductor device May. 29, 2012
8178400 Replacement spacer for tunnel FETs May. 15, 2012
8138070 Methods of using a set of silicon nanoparticle fluids to control in situ a set of dopant diffusion profiles Mar. 20, 2012
8119543 Methods of reducing defect formation on silicon dioxide formed by atomic layer deposition (ALD) processes Feb. 21, 2012
8101492 Method for making semiconductor device Jan. 24, 2012
8084312 Nitrogen based implants for defect reduction in strained silicon Dec. 27, 2011
8076727 Magnesium-doped zinc oxide structures and methods Dec. 13, 2011
8071483 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Dec. 6, 2011

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