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Class Information
Number: 257/E21.274
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > To form insulating layer thereon, e.g., for masking or by using photolithographic technique (epo) > Inorganic layer (epo) > Composed of oxide or glassy oxide or oxide based glass (epo) > Deposition from gas or vapor (epo)
Description: This subclass is indented under subclass E21.271. This subclass is substantially the same in scope as ECLA classification H01L21/316B.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.28 Deposition of aluminum oxide (epo) 101
257/E21.275 Deposition of boron or phosphorus doped silicon oxide, e.g., bsg, psg, bpsg (epo) 339
257/E21.277 Deposition of carbon doped silicon oxide, e.g., sioc (epo) 273
257/E21.276 Deposition of halogen doped silicon oxide, e.g., fluorine doped silicon oxide (epo) 243
257/E21.278 Deposition of silicon oxide (epo) 301

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8652957 High-K gate dielectric oxide Feb. 18, 2014
8530361 Process for producing silicon and oxide films from organoaminosilane precursors Sep. 10, 2013
8481372 JFET device structures and methods for fabricating the same Jul. 9, 2013
8470693 Method for manufacturing quantum dot Jun. 25, 2013
8445367 Methods of manufacturing semiconductor devices May. 21, 2013
8431494 Film formation method and film formation apparatus Apr. 30, 2013
8409984 Apparatus and method for manufacturing multi-component oxide heterostructures Apr. 2, 2013
8377827 Methods for forming a gate and a shallow trench isolation region and for planarizing an etched surface of silicon substrate Feb. 19, 2013
8367530 Substrate processing apparatus and manufacturing method of semiconductor device Feb. 5, 2013
8367554 Methods for forming a gate and a shallow trench isolation region and for planarizing an etched surface of silicon substrate Feb. 5, 2013
8357619 Film formation method for forming silicon-containing insulating film Jan. 22, 2013
8258053 Performance enhancement in transistors comprising high-K metal gate stack by reducing a width of offset spacers Sep. 4, 2012
8203176 Dielectric, capacitor using dielectric, semiconductor device using dielectric, and manufacturing method of dielectric Jun. 19, 2012
8187973 Method for manufacturing semiconductor device and the semiconductor device May. 29, 2012
8163634 Devices with graphene layers Apr. 24, 2012
8163648 Atomic layer deposition methods Apr. 24, 2012
8143145 Method and arrangement for producing an N-semiconductive indium sulfide thin layer Mar. 27, 2012
8093158 Semiconductor device manufacturing method and substrate processing apparatus Jan. 10, 2012
8076251 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Dec. 13, 2011
8058729 Titanium nitride films Nov. 15, 2011
8043981 Dual frequency low temperature oxidation of a semiconductor device Oct. 25, 2011
8039402 Methods for forming a gate and a shallow trench isolation region and for planarizating an etched surface of silicon substrate Oct. 18, 2011
8026161 Highly reliable amorphous high-K gate oxide ZrO2 Sep. 27, 2011
8021992 High aspect ratio gap fill application using high density plasma chemical vapor deposition Sep. 20, 2011
7989362 Hafnium lanthanide oxynitride films Aug. 2, 2011
7985679 Atomic layer deposition methods Jul. 26, 2011
7939442 Strontium ruthenium oxide interface May. 10, 2011
7923381 Methods of forming electronic devices containing Zr-Sn-Ti-O films Apr. 12, 2011
7892917 Method for forming bismuth titanium silicon oxide thin film Feb. 22, 2011
7867919 Method of fabricating an apparatus having a lanthanum-metal oxide dielectric layer Jan. 11, 2011
7863202 High dielectric constant materials Jan. 4, 2011
7829457 Protection of conductors from oxidation in deposition chambers Nov. 9, 2010
7825043 Method for fabricating capacitor in semiconductor device Nov. 2, 2010
7816278 In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition Oct. 19, 2010
7799680 Surface preparation prior to deposition on germanium Sep. 21, 2010
7795143 Substrate processing apparatus and manufacturing method of semiconductor device Sep. 14, 2010
7795160 ALD of metal silicate films Sep. 14, 2010
7790627 Semiconductor device, method of manufacturing the same, and method of manufacturing metal compound thin film Sep. 7, 2010
7772133 Method and equipment for forming oxide film Aug. 10, 2010
7772597 Light emitting diode lamp Aug. 10, 2010
7754620 Film formation method and recording medium Jul. 13, 2010
7732852 High-K dielectric materials and processes for manufacturing them Jun. 8, 2010
7727780 Substrate processing method and semiconductor manufacturing apparatus Jun. 1, 2010
7709399 Atomic layer deposition systems and methods including metal .beta.-diketiminate compounds May. 4, 2010
7704893 Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD Apr. 27, 2010
7704896 Atomic layer deposition of thin films on germanium Apr. 27, 2010
7700965 Light emitting diode Apr. 20, 2010
7663241 Semiconductor device Feb. 16, 2010
7662729 Atomic layer deposition of a ruthenium layer to a lanthanide oxide dielectric layer Feb. 16, 2010
7611958 Method of making a semiconductor element Nov. 3, 2009

1 2 3 4 5 6 7 8 9 10 11 12 13

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