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Class Information
Number: 257/E21.269
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > To form insulating layer thereon, e.g., for masking or by using photolithographic technique (epo) > Inorganic layer (epo) > Of silicon (epo) > Formed by deposition from a gas or vapor (epo)
Description: This subclass is indented under subclass E21.268. This subclass is substantially the same in scope as ECLA classification H01L21/314B2.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8618003 Method of making electronic devices using selective deposition Dec. 31, 2013
8575720 Process for integrating on an inert substrate a device comprising at least a passive element and an active element and corresponding integrated device Nov. 5, 2013
8563443 Method of depositing dielectric film by ALD using precursor containing silicon, hydrocarbon, and halogen Oct. 22, 2013
8470693 Method for manufacturing quantum dot Jun. 25, 2013
8445367 Methods of manufacturing semiconductor devices May. 21, 2013
8440578 GCIB process for reducing interfacial roughness following pre-amorphization May. 14, 2013
8399952 Integrated circuit devices having a strontium ruthenium oxide interface Mar. 19, 2013
8367453 Method of manufacturing solar battery Feb. 5, 2013
8367530 Substrate processing apparatus and manufacturing method of semiconductor device Feb. 5, 2013
8312840 Substrate processing apparatus and method Nov. 20, 2012
8252659 Method for producing interconnect structures for integrated circuits Aug. 28, 2012
8242031 High quality silicon oxide films by remote plasma CVD from disilane precursors Aug. 14, 2012
8227357 Methods of fabricating silicon oxide layers using inorganic silicon precursors and methods of fabricating semiconductor devices including the same Jul. 24, 2012
8173474 Method of manufacturing solar battery May. 8, 2012
8168546 Method for selective deposition and devices May. 1, 2012
8163648 Atomic layer deposition methods Apr. 24, 2012
8163634 Devices with graphene layers Apr. 24, 2012
8163571 Multi-step deposition control Apr. 24, 2012
8158465 Vertical coffee-stain method for forming self-organized line structures Apr. 17, 2012
8143145 Method and arrangement for producing an N-semiconductive indium sulfide thin layer Mar. 27, 2012
8129555 Precursors for depositing silicon-containing films and methods for making and using same Mar. 6, 2012
8119544 Film formation method and apparatus for semiconductor process Feb. 21, 2012
8110490 Gate oxide leakage reduction Feb. 7, 2012
8093158 Semiconductor device manufacturing method and substrate processing apparatus Jan. 10, 2012
8039374 Method for low temperature ion implantation Oct. 18, 2011
8026606 Interconnect layers without electromigration Sep. 27, 2011
7998878 Method for selective deposition and devices Aug. 16, 2011
7985679 Atomic layer deposition methods Jul. 26, 2011
7972898 Process for making doped zinc oxide Jul. 5, 2011
7939442 Strontium ruthenium oxide interface May. 10, 2011
7927981 Apparatus for depositing silicon-based thin film and method for depositing silicon-based thin film Apr. 19, 2011
7927982 Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film Apr. 19, 2011
7897518 Plasma processing method and computer storage medium Mar. 1, 2011
7884032 Thin film deposition Feb. 8, 2011
7867916 Horizontal coffee-stain method using control structure to pattern self-organized line structures Jan. 11, 2011
7858510 Interfacial layers for electromigration resistance improvement in damascene interconnects Dec. 28, 2010
7846795 Bit line of a semiconductor device and method for fabricating the same Dec. 7, 2010
7825014 Method for fabricating semiconductor device Nov. 2, 2010
7795143 Substrate processing apparatus and manufacturing method of semiconductor device Sep. 14, 2010
7745872 Asymmetric operation method of non-volatile memory structure Jun. 29, 2010
7723241 Plasma processing method and computer storage medium May. 25, 2010
7709399 Atomic layer deposition systems and methods including metal .beta.-diketiminate compounds May. 4, 2010
7691696 Hemi-spherical structure and method for fabricating the same Apr. 6, 2010
7645710 Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system Jan. 12, 2010
7582562 Atomic layer deposition methods Sep. 1, 2009
7582571 Substrate processing method and recording medium Sep. 1, 2009
7572686 System for thin film deposition utilizing compensating forces Aug. 11, 2009
7569497 Method and apparatus for forming insulating layer Aug. 4, 2009
7563718 Method for forming tungsten layer of semiconductor device and method for forming tungsten wiring layer using the same Jul. 21, 2009
7541626 High K-gate oxide TFTs built on transparent glass or transparent flexible polymer substrate Jun. 2, 2009

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