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Class Information
Number: 257/E21.249
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > To form insulating layer thereon, e.g., for masking or by using photolithographic technique (epo) > Post-treatment (epo) > Etching insulating layer by chemical or physical means (epo)
Description: This subclass is indented under subclass E21.241. This subclass is substantially the same in scope as ECLA classification H01L21/311.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.25 Etching inorganic layer (epo) 86
257/E21.254 Etching organic layer (epo) 35
257/E21.257 Using mask (epo) 858

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8647981 Methods of forming patterns, and methods of forming integrated circuitry Feb. 11, 2014
8629052 Methods of forming semiconductor devices having narrow conductive line patterns Jan. 14, 2014
8609480 Methods of forming isolation structures on FinFET semiconductor devices Dec. 17, 2013
8609544 Method for fabricating semiconductor device Dec. 17, 2013
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8598643 Nonvolatile semiconductor memory device and method of manufacturing the same Dec. 3, 2013
8586486 Method for forming semiconductor device Nov. 19, 2013
8581421 Semiconductor package manufacturing method and semiconductor package Nov. 12, 2013
8546232 Method of manufacturing a semiconductor device having a laminated structure comprising a boron-doped silicon germanium film and a metal film Oct. 1, 2013
8530312 Vertical devices and methods of forming Sep. 10, 2013
8524605 Fabrication and mask design methods using spatial frequency sextupling technique Sep. 3, 2013
8518831 Method of forming semiconductor memory device Aug. 27, 2013
8513131 Fin field effect transistor with variable channel thickness for threshold voltage tuning Aug. 20, 2013
8507958 Transistor and method for forming the same Aug. 13, 2013
8497212 Filling narrow openings using ion beam etch Jul. 30, 2013
8492278 Method of forming a plurality of spaced features Jul. 23, 2013
8470713 Nitride etch for improved spacer uniformity Jun. 25, 2013
8461050 Taper-etching method and method of manufacturing near-field light generator Jun. 11, 2013
8455314 Transistors comprising high-K metal gate electrode structures and embedded strain-inducing semiconductor alloys formed in a late stage Jun. 4, 2013
8445919 Wafer-level package structure of light emitting diode and manufacturing method thereof May. 21, 2013
8435898 First inter-layer dielectric stack for non-volatile memory May. 7, 2013
8420542 Method of patterned image reversal Apr. 16, 2013
8410002 Semiconductor device and manufacturing method thereof Apr. 2, 2013
8394719 System and method for implementing multi-resolution advanced process control Mar. 12, 2013
8394724 Processing with reduced line end shortening ratio Mar. 12, 2013
8389412 Finishing method for a silicon on insulator substrate Mar. 5, 2013
8383518 Method for forming contact holes Feb. 26, 2013
8338282 Method for encapsulating a microcomponent using a mechanically reinforced cap Dec. 25, 2012
8318540 Method of manufacturing a semiconductor structure Nov. 27, 2012
8298961 Patterns of semiconductor device and method of forming the same Oct. 30, 2012
8288292 Depositing conformal boron nitride film by CVD without plasma Oct. 16, 2012
8288242 Overlay vernier key and method for fabricating the same Oct. 16, 2012
8278208 Semiconductor device having decreased contact resistance and method for manufacturing the same Oct. 2, 2012
8232155 Structure and method for manufacturing device with a V-shape channel nMOSFET Jul. 31, 2012
8207065 Method for forming a shallow trench isolation Jun. 26, 2012
8187974 Methods of manufacturing semiconductor devices and optical proximity correction May. 29, 2012
8173095 Method and apparatus for producing graphene oxide layers on an insulating substrate May. 8, 2012
8163654 Method for fabricating fine pattern in semiconductor device Apr. 24, 2012
8143152 Manufacturing method of semiconductor device having self-aligned contact connected to silicide layer on substrate surface Mar. 27, 2012
8114778 Method of forming minute patterns in semiconductor device using double patterning Feb. 14, 2012
8093152 Trench forming method Jan. 10, 2012
8076230 Method of forming self-aligned contacts and local interconnects Dec. 13, 2011
8058151 Methods of die sawing Nov. 15, 2011
8039399 Methods of forming patterns utilizing lithography and spacers Oct. 18, 2011
8021984 Method for manufacturing semiconductor Sep. 20, 2011
8021986 Method for producing a transistor with metallic source and drain Sep. 20, 2011
8003540 Method for manufacturing semiconductor device Aug. 23, 2011
7998863 High efficiency solar cell fabrication Aug. 16, 2011
7998876 Method of producing semiconductor element Aug. 16, 2011
7993960 Electronic device and method of manufacturing the same Aug. 9, 2011

1 2 3

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