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Class Information
Number: 257/E21.245
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > To form insulating layer thereon, e.g., for masking or by using photolithographic technique (epo) > Post-treatment (epo) > Planarization of insulating layer (epo) > Involving dielectric removal step (epo) > Removal by chemical etching, e.g., dry etching (epo)
Description: This subclass is indented under subclass E21.244. This subclass is substantially the same in scope as ECLA classification H01L21/3105B2B.










Sub-classes under this class:

Class Number Class Name Patents
257/E21.246 Removal by selective chemical etching, e.g., selective dry etching through mask (epo) 112


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8669187 Porous lift-off layer for selective removal of deposited films Mar. 11, 2014
8669190 Method for manufacturing semiconductor device and semiconductor wafer Mar. 11, 2014
8664040 Exposing connectors in packages through selective treatment Mar. 4, 2014
8647986 Semiconductor process Feb. 11, 2014
8633116 Dry etching method Jan. 21, 2014
8551836 Semiconductor device and method of manufacturing the same Oct. 8, 2013
8551886 CMP process for processing STI on two distinct silicon planes Oct. 8, 2013
8546265 Method, apparatus and program for manufacturing silicon structure Oct. 1, 2013
8536699 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Sep. 17, 2013
8492196 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jul. 23, 2013
8436439 Semiconductor device and method of forming a shielding layer over a semiconductor die after forming a build-up interconnect structure May. 7, 2013
8420543 Method for treating the dislocation in a GaN-containing semiconductor layer Apr. 16, 2013
8389415 Profiling solid state samples Mar. 5, 2013
8362553 Multifunctional tape Jan. 29, 2013
8273659 Method for patterned etching of selected material Sep. 25, 2012
8269318 MOS device Sep. 18, 2012
8193099 Protecting exposed metal gate structures from etching processes in integrated circuit manufacturing Jun. 5, 2012
8143112 Method for removing semiconductor street material Mar. 27, 2012
8110879 Controlling lateral distribution of air gaps in interconnects Feb. 7, 2012
8105872 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jan. 31, 2012
8097490 Semiconductor device and method of forming stepped interconnect layer for stacked semiconductor die Jan. 17, 2012
8084832 Semiconductor device Dec. 27, 2011
8080475 Removal chemistry for selectively etching metal hard mask Dec. 20, 2011
8071483 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Dec. 6, 2011
8003531 Method for manufacturing flash memory device Aug. 23, 2011
7994066 Si surface cleaning for semiconductor circuits Aug. 9, 2011
7985690 Method for a gate last process Jul. 26, 2011
7960289 Etching method, pattern forming process, thin-film transistor fabrication process, and etching solution Jun. 14, 2011
7947607 Apparatus and associated method for making a virtual ground array structure that uses inversion bit lines May. 24, 2011
7947548 Multifunctional tape May. 24, 2011
7943440 Fabrication method of thin film device May. 17, 2011
7939438 Method of inhibiting background plating May. 10, 2011
7902001 Method of fabricating thin film device Mar. 8, 2011
7897503 Infinitely stackable interconnect device and method Mar. 1, 2011
7858529 Treatment method of semiconductor, method for manufacturing MOS, and MOS structure Dec. 28, 2010
7855404 Bipolar complementary semiconductor device Dec. 21, 2010
7838379 Non-volatile memory device and method of manufacturing the same Nov. 23, 2010
7825029 Method for the production of structured layers on substrates Nov. 2, 2010
7820479 Conductive ball mounting method Oct. 26, 2010
7808026 Dry etching method and production method of magnetic memory device Oct. 5, 2010
7799580 Method for manufacturing ferroelectric memory device Sep. 21, 2010
7799602 Semiconductor device and method of forming a shielding layer over a semiconductor die after forming a build-up interconnect structure Sep. 21, 2010
7790563 Semiconductor device, electronic device and method for manufacturing semiconductor device Sep. 7, 2010
7749913 Semiconductor device manufacturing method Jul. 6, 2010
7745302 Method for making transmission electron microscope grid Jun. 29, 2010
7727902 Composition for forming nitride coating film for hard mask Jun. 1, 2010
7723150 Image sensor and fabricating method thereof May. 25, 2010
7709394 Substrate processing method and apparatus fabrication process of a semiconductor device May. 4, 2010
7687322 Method for removing semiconductor street material Mar. 30, 2010
7687323 Surface-roughening method Mar. 30, 2010

1 2 3 4 5 6 7










 
 
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