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Class Information
Number: 257/E21.228
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Chemical or electrical treatment, e.g., electrolytic etching (epo) > Chemical cleaning (epo) > Wet cleaning only (epo)
Description: This subclass is indented under subclass E21.224. This subclass is substantially the same in scope as ECLA classification H01L21/306N4.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

Patent Number Title Of Patent Date Issued
8703605 High yield and high throughput method for the manufacture of integrated circuit devices of improved integrity, performance and reliability Apr. 22, 2014
8623682 Method for manufacturing high efficiency light-emitting diodes Jan. 7, 2014
8613287 Apparatus for preventing stiction of MEMS microstructure Dec. 24, 2013
8603899 Method of manufacturing a semiconductor device Dec. 10, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8507387 Methods of removing noble metal-containing nanoparticles Aug. 13, 2013
8486742 Method for manufacturing high efficiency light-emitting diodes Jul. 16, 2013
8431488 Damascene process using cleaning solution Apr. 30, 2013
8354328 Semiconductor device manufacturing method and semiconductor device Jan. 15, 2013
8309472 Method of rapid thermal treatment using high energy electromagnetic radiation of a semiconductor substrate for formation of epitaxial materials Nov. 13, 2012
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8304327 Method of manufacturing a semiconductor device Nov. 6, 2012
8293653 Method of manufacturing a semiconductor device Oct. 23, 2012
8278186 Wafer cleaning method and wafer bonding method using the same Oct. 2, 2012
8268675 Passivation layer for semiconductor device packaging Sep. 18, 2012
8207060 High yield and high throughput method for the manufacture of integrated circuit devices of improved integrity, performance and reliability Jun. 26, 2012
8148272 Application of millisecond heating source for surface treatment Apr. 3, 2012
8129212 Surface cleaning and texturing process for crystalline solar cells Mar. 6, 2012
8114773 Cleaning solution, cleaning method and damascene process using the same Feb. 14, 2012
8071480 Method and apparatuses for removing polysilicon from semiconductor workpieces Dec. 6, 2011
8058180 Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture Nov. 15, 2011
8043878 Method for manufacturing high efficiency light-emitting diodes Oct. 25, 2011
8043903 Method of manufacturing semiconductor device Oct. 25, 2011
7994063 Method for manufacturing semiconductor device and method for cleaning semiconductor substrate Aug. 9, 2011
7985683 Method of treating a semiconductor substrate Jul. 26, 2011
7968506 Wet cleaning stripping of etch residue after trench and via opening formation in dual damascene process Jun. 28, 2011
7955440 Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer Jun. 7, 2011
7939436 Method of fabricating a semiconductor device May. 10, 2011
7935554 Semiconductor light emitting device and method of manufacturing the same May. 3, 2011
7879724 Method of manufacturing a semiconductor device and a semiconductor manufacturing equipment Feb. 1, 2011
7838425 Method of treating surface of semiconductor substrate Nov. 23, 2010
7838431 Method for surface treatment of semiconductor substrates Nov. 23, 2010
7811936 Method of producing semiconductor device Oct. 12, 2010
7803721 Semiconductor device and method of manufacturing same Sep. 28, 2010
7776757 Method of fabricating high-k metal gate devices Aug. 17, 2010
7776754 Semiconductor device manufacturing method and chemical fluid used for manufacturing semiconductor device Aug. 17, 2010
7763517 Method of forming non-volatile memory cell Jul. 27, 2010
7754612 Methods and apparatuses for removing polysilicon from semiconductor workpieces Jul. 13, 2010
7749909 Method of treating a semiconductor substrate Jul. 6, 2010
7736997 Production method of flexible electronic device Jun. 15, 2010
7709277 PAA-based etchant, methods of using same, and resultant structures May. 4, 2010
7700497 Methods for fabricating residue-free contact openings Apr. 20, 2010
7592267 Method for manufacturing semiconductor silicon substrate and apparatus for manufacturing the same Sep. 22, 2009
7582539 Methods of cleaning a semiconductor device and methods of manufacturing a semiconductor device using the same Sep. 1, 2009
7579253 Method for cleaning a semiconductor wafer Aug. 25, 2009
7560313 SOI wafer and method for producing the same Jul. 14, 2009
7560369 Method of forming metal line in semiconductor device Jul. 14, 2009
7498213 Methods of fabricating a semiconductor substrate for reducing wafer warpage Mar. 3, 2009
7470631 Methods for fabricating residue-free contact openings Dec. 30, 2008

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