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Class Information
Number: 257/E21.227
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Chemical or electrical treatment, e.g., electrolytic etching (epo) > Chemical cleaning (epo) > Dry cleaning (epo) > With gaseous hydrogen fluoride (hf) (epo)
Description: This subclass is indented under subclass E21.226. This subclass is substantially the same in scope as ECLA classification H01L21/306N2B.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8679922 Method of producing semiconductor device and method of producing solid-state image pickup device Mar. 25, 2014
8664040 Exposing connectors in packages through selective treatment Mar. 4, 2014
8633105 Method of fabricating a self-aligning damascene memory structure Jan. 21, 2014
8633116 Dry etching method Jan. 21, 2014
8603899 Method of manufacturing a semiconductor device Dec. 10, 2013
8569821 Semiconductor devices and methods of forming the same Oct. 29, 2013
8552501 Method of forming an inverted T shaped channel structure for an inverted T channel field effect transistor device Oct. 8, 2013
8536699 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Sep. 17, 2013
8492264 Method for forming interconnection levels of an integrated circuit Jul. 23, 2013
8486835 Czochralski growth of randomly oriented polysilicon and use of randomly oriented polysilicon dummy wafers Jul. 16, 2013
8470095 Process and installation for surface preparation by dielectric barrier discharge Jun. 25, 2013
8410002 Semiconductor device and manufacturing method thereof Apr. 2, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8389399 Method of fabricating a self-aligning damascene memory structure Mar. 5, 2013
8389417 Semiconductor device and manufacturing method thereof Mar. 5, 2013
8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jan. 29, 2013
8324119 Enhancing deposition uniformity of a channel semiconductor alloy by an in situ etch process Dec. 4, 2012
8304327 Method of manufacturing a semiconductor device Nov. 6, 2012
8269318 MOS device Sep. 18, 2012
8242498 Compound semiconductor substrate, semiconductor device, and processes for producing them Aug. 14, 2012
8198194 Methods of forming p-channel field effect transistors having SiGe source/drain regions Jun. 12, 2012
8183158 Semiconductor processing apparatus and method for using same May. 22, 2012
8158484 Method of forming an inverted T shaped channel structure for an inverted T channel field effect transistor device Apr. 17, 2012
8153463 Method of manufacturing thin film transistor substrate Apr. 10, 2012
8138070 Methods of using a set of silicon nanoparticle fluids to control in situ a set of dopant diffusion profiles Mar. 20, 2012
8084832 Semiconductor device Dec. 27, 2011
8071483 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus Dec. 6, 2011
8048787 Methods of forming semiconductor devices Nov. 1, 2011
8035131 Method for forming a nitride semiconductor laminated structure and method for manufacturing a nitride semiconductor element Oct. 11, 2011
7973345 Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a subst Jul. 5, 2011
7927972 Method for producing bonded wafer Apr. 19, 2011
7906439 Method of fabricating a MEMS/NEMS electromechanical component Mar. 15, 2011
7863609 Compound semiconductor substrate, semiconductor device, and processes for producing them Jan. 4, 2011
7846845 Integrated method for removal of halogen residues from etched substrates in a processing system Dec. 7, 2010
7838400 Rapid thermal oxide passivated solar cell with improved junction Nov. 23, 2010
7833887 Notched-base spacer profile for non-planar transistors Nov. 16, 2010
7829402 MOSFET devices and methods of making Nov. 9, 2010
7816221 Dielectric ledge for high frequency devices Oct. 19, 2010
7786013 Method of fabricating semiconductor device Aug. 31, 2010
7759256 Micro-electro-mechanical system device and method for making same Jul. 20, 2010
7727846 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device Jun. 1, 2010
7727891 Method of manufacturing a semiconductor device using a wet process Jun. 1, 2010
7713842 Method for producing bonded wafer May. 11, 2010
7682956 Three-dimensional metal microfabrication process and devices produced thereby Mar. 23, 2010
7674718 Method for forming spacers of different sizes Mar. 9, 2010
7645666 Method of making a semiconductor device Jan. 12, 2010
7629247 Method of fabricating a self-aligning damascene memory structure Dec. 8, 2009
7618853 Field effect transistors with dielectric source drain halo regions and reduced miller capacitance Nov. 17, 2009
7615456 Method for manufacturing SOI substrate Nov. 10, 2009
7611989 Polysilicon dummy wafers and process used therewith Nov. 3, 2009

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